| (84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
| (30) |
Priority: |
06.05.2021 US 202163185223 P
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| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara, California 95054 (US) |
|
| (72) |
Inventors: |
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- DELMAS, Jean
Santa Clara, California 95054 (US)
- VACHHANI, Kiran
Santa Clara, California 95054 (US)
- HEGEDUS, Andreas G.
Menlo Park, California 94025 (US)
- HERLE, Subramanya P.
Santa Clara, California 95054 (US)
|
| (74) |
Representative: Zimmermann & Partner Patentanwälte mbB |
|
Postfach 330 920
80069 München
80069 München (DE) |
|
