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EP 4 334 488 A1

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(43) Date of publication: 13.03.2024 Bulletin 2024/11 (21) Application number: 22720739.6 (22) Date of filing: 05.05.2022

(51) International Patent Classification (IPC):  C23C 14/02(2006.01) C23C 14/56(2006.01) H01J 37/32(2006.01) C23C 14/35(2006.01) H01J 37/34(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/562; C23C 14/35; C23C 14/022; H01J 37/3405; H01J 37/32825 (86) International application number: PCT/EP2022/062180 (87) International publication number: WO 2022/234029 (10.11.2022 Gazette 2022/45)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 06.05.2021 EP 21172402 (71) Applicant: Tata Steel Nederland Technology B.V. 1951 JZ Velsen-Noord (NL)

(72) Inventors: WESTERWAAL, Ruud, Johannes 1970 CA IJmuiden (NL) BOELSMA, Christiaan 1970 CA IJmuiden (NL) BOUWENS, Erwin 1970 CA IJMUIDEN (NL) WITTEBROOD, Adrianus, Jacobus 1970 CA IJmuiden (NL) ZOESTBERGEN, Edzo 1970 CA IJmuiden (NL) ROLLS, Jennifer 1970 CA IJMUIDEN (NL) (74) Representative: Group Intellectual Property Services  c/o Tata Steel Nederland Technology B.V. P.O. Box 10000 - 3G.37 1970 CA IJmuiden 1970 CA IJmuiden (NL)