(19)
(11) EP 4 334 492 A1

(12)

(43) Date of publication:
13.03.2024 Bulletin 2024/11

(21) Application number: 22799207.0

(22) Date of filing: 05.05.2022
(51) International Patent Classification (IPC): 
C23C 16/30(2006.01)
C23C 16/52(2006.01)
H01L 21/02(2006.01)
 C23C 16/34(2006.01)
C30B 25/02(2006.01)
(52) Cooperative Patent Classification (CPC):
C30B 25/02; C30B 29/403; C30B 25/14; C23C 16/303; H01L 21/0262; H01L 21/0254; H01L 21/02543; H01L 21/02546
(86) International application number:
PCT/SE2022/050438
(87) International publication number:
WO 2022/235194 (10.11.2022 Gazette 2022/45)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 05.05.2021 SE 2130122

(71) Applicant: Veeco SIC CVD Systems AB
223 62 Lund (SE)

(72) Inventors:
  • HAMMARLUND, Bo
    191 40 Sollentuna (SE)
  • NILSSON, Roger
    226 52 Lund (SE)
  • SPENGLER, Richard
    222 40 Lund (SE)

(74) Representative: Bergenstråhle & Partners AB 
P.O. Box 17704
118 93 Stockholm
118 93 Stockholm (SE)

   


(54) A METHOD FOR USING CATALYST IN GROWTH OF SEMICONDUCTORS COMPRISING N-AND P- ATOMS AND DEVICE FOR THE METHOD