(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(30) |
Priority: |
11.05.2021 US 202117317342 11.05.2021 US 202117317363 11.05.2021 US 202117317565 11.05.2021 US 202117317684
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(71) |
Applicant: Applied Materials, Inc. |
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Santa Clara, California 95054 (US) |
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(72) |
Inventors: |
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- ISHIKAWA, Tetsuya
Santa Clara, California 95054 (US)
- SRINIVASAN, Swaminathan T.
Pleasanton, California 94566 (US)
- SHAH, Kartik Bhupendra
Saratoga, California 95070 (US)
- MORADIAN, Ala
Santa Clara, California 95054 (US)
- SUBBANNA, Manjunath
Bangalore 560 066 (IN)
- BAUER, Matthias
Sunnyvale, California 94086 (US)
- REIMER, Peter
Santa Clara, California 95054 (US)
- RICE, Michael R.
Santa Clara, California 95054 (US)
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(74) |
Representative: Zimmermann & Partner Patentanwälte mbB |
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Postfach 330 920 80069 München 80069 München (DE) |
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