(19)
(11) EP 4 337 813 A1

(12)

(43) Date of publication:
20.03.2024 Bulletin 2024/12

(21) Application number: 22808027.1

(22) Date of filing: 23.04.2022
(51) International Patent Classification (IPC): 
C30B 25/10(2006.01)
C30B 25/16(2006.01)
(52) Cooperative Patent Classification (CPC):
C30B 25/14; H01L 21/67115; H01L 21/6719; C30B 25/165; C23C 16/45561; C23C 16/45578; C23C 16/4558; C23C 16/45512; C23C 16/4557; C23C 16/4412; C23C 16/482; C23C 16/4409; C23C 16/45574
(86) International application number:
PCT/US2022/026071
(87) International publication number:
WO 2022/240574 (17.11.2022 Gazette 2022/46)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA ME
Designated Validation States:
KH MA MD TN

(30) Priority: 11.05.2021 US 202117317342
11.05.2021 US 202117317363
11.05.2021 US 202117317565
11.05.2021 US 202117317684

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • ISHIKAWA, Tetsuya
    Santa Clara, California 95054 (US)
  • SRINIVASAN, Swaminathan T.
    Pleasanton, California 94566 (US)
  • SHAH, Kartik Bhupendra
    Saratoga, California 95070 (US)
  • MORADIAN, Ala
    Santa Clara, California 95054 (US)
  • SUBBANNA, Manjunath
    Bangalore 560 066 (IN)
  • BAUER, Matthias
    Sunnyvale, California 94086 (US)
  • REIMER, Peter
    Santa Clara, California 95054 (US)
  • RICE, Michael R.
    Santa Clara, California 95054 (US)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCESS CHAMBER