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EP 4 337 814 A1

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(43) Date of publication: 20.03.2024 Bulletin 2024/12 (21) Application number: 22808017.2 (22) Date of filing: 19.04.2022

(51) International Patent Classification (IPC):  C30B 25/14(2006.01) C30B 25/16(2006.01) C30B 25/10(2006.01) (52) Cooperative Patent Classification (CPC): C30B 25/14; H01L 21/67115; H01L 21/6719; C30B 25/165; C23C 16/45561; C23C 16/45578; C23C 16/4558; C23C 16/45512; C23C 16/4557; C23C 16/4412; C23C 16/482; C23C 16/4409; C23C 16/45574 (86) International application number: PCT/US2022/025321 (87) International publication number: WO 2022/240553 (17.11.2022 Gazette 2022/46)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 11.05.2021 US 202117317342 11.05.2021 US 202117317363 11.05.2021 US 202117317565 11.05.2021 US 202117317684 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)

(72) Inventors: ISHIKAWA, Tetsuya Santa Clara, California 95054 (US) SRINIVASAN, Swaminathan T. Pleasanton, California 94566 (US) BAUER, Matthias Sunnyvale, California 94086 (US) MORADIAN, Ala Santa Clara, California 95054 (US) SUBBANNA, Manjunath Bangalore 560 066 (IN) SHAH, Kartik Bhupendra Saratoga, California 95070 (US) SANCHEZ, Errol Antonio C. Tracy, California 95377 (US) ZOKAEI, Sohrab Santa Clara, California 95054 (US) RICE, Michael R. Santa Clara, California 95054 (US) REIMER, Peter Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)