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EP 4 347 912 A1

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(43) Date of publication: 10.04.2024 Bulletin 2024/15 (21) Application number: 22721839.3 (22) Date of filing: 27.04.2022

(51) International Patent Classification (IPC):  C23C 14/04(2006.01) C23C 14/12(2006.01) C23C 14/28(2006.01) B82Y 30/00(2011.01) H01L 29/16(2006.01) B82Y 10/00(2011.01) H01L 29/66(2006.01) H01L 23/00(2006.01) B41M 1/26(2006.01) B41M 7/00(2006.01) B41J 2/00(2006.01) C23C 14/06(2006.01) C23C 14/58(2006.01) C01B 32/184(2017.01) B82Y 40/00(2011.01) H01L 21/02(2006.01) G06F 3/00(2006.01) H05K 3/12(2006.01) B41J 2/005(2006.01) B41M 5/035(2006.01) B23K 26/00(2014.01) (52) Cooperative Patent Classification (CPC): C23C 14/048; C23C 14/0605; C23C 14/0647; C23C 14/12; C23C 14/5813; C23C 14/28; C01B 32/184; B82Y 40/00; C23C 14/0623; H01L 24/11; B23K 26/342; B23K 26/57; B23K 26/1224; B23K 26/127; B23K 26/0622; B23K 26/083; B23K 26/0869; B23K 2103/50; G06F 2203/04102; G06F 2203/04103; G06F 3/044 (86) International application number: PCT/GR2022/000025 (87) International publication number: WO 2022/248893 (01.12.2022 Gazette 2022/48)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 27.05.2021 US 202163193968 P 20.04.2022 US 202217725365 (71) Applicants: National Technical University of Athens 15780 Zografou (GR) Bar-Ilan University 5290002 Ramat-Gan (IL) Graphenea Semiconductor SLU 20009 Donostia - San Sebastián (ES)

(72) Inventors: PAPAZOGLOU, Symeon 11473 Athens (GR) ZACHARATOS, Filimon 11141 Athens (GR) LOGOTHETI, Adamantia 15772 Athens (GR) PESQUERA, Amaia 20015 Gipuzkoa (ES) ZURUTUZA, Amaia 20007 Gipuzkoa (ES) NAVEH, Doron 4921398 Petach Tikva (IL) ZERGIOTI, Ioanna 15669 Papagou (GR) (74) Representative: Algemeen Octrooi- en Merkenbureau B.V.  P.O. Box 645 5600 AP Eindhoven 5600 AP Eindhoven (NL)