(84) |
Designated Contracting States: |
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AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL
NO PL PT RO RS SE SI SK SM TR |
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Designated Extension States: |
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BA ME |
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Designated Validation States: |
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KH MA MD TN |
(30) |
Priority: |
09.06.2021 EP 21178538
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(71) |
Applicant: Atotech Deutschland GmbH & Co. KG |
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10553 Berlin (DE) |
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(72) |
Inventors: |
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- SCHMIDT, Ralf
10553 Berlin (DE)
- WOLTER, Ingomar
10553 Berlin (DE)
- STEINBERGER, Gerhard
10553 Berlin (DE)
- HAARMANN, Philipp
10553 Berlin (DE)
- LÜTZOW, Norbert
10553 Berlin (DE)
- HÜLSMANN, Thomas
10553 Berlin (DE)
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(74) |
Representative: MKS IP Association |
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Intellectual Property Erasmusstraße 20 10553 Berlin 10553 Berlin (DE) |
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