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EP 4 367 282 A1

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(43) Date of publication: 15.05.2024 Bulletin 2024/20 (21) Application number: 22747643.9 (22) Date of filing: 06.07.2022

(51) International Patent Classification (IPC):  C23C 14/02(2006.01) C23C 14/22(2006.01) H01J 37/32(2006.01) C23C 14/06(2006.01) C23C 14/32(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/025; C23C 14/0605; C23C 14/221; C23C 14/325 (86) International application number: PCT/EP2022/068804 (87) International publication number: WO 2023/280951 (12.01.2023 Gazette 2023/02)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 07.07.2021 US 202163219131 P 30.06.2022 US 202217854612 (71) Applicant: Lion Alternative Energy PLC London Greater London EC3M 1EU (GB)	(72) Inventor: LIAPIS, Kostas London Greater, London EC3M 1EU (GB) (74) Representative: Dietz, Christopher Friedrich et al Gleiss Große Schrell und Partner mbB Patentanwälte Rechtsanwälte Leitzstraße 45 70469 Stuttgart 70469 Stuttgart (DE)