AN ANTI-TIP ELECTRODE TYPE SINGLE ELECTRODE STRUCTURE AND ELECTRODE CLEANING DEVICE

Abstract

 The present invention relates to the technical field of plasma cleaning, and provides a point-discharge prevention unipolar electrode structure and a plasma cleaning device. The point-discharge prevention unipolar electrode structure comprises a dielectric-barrier-free electrode assembly, an insulation groove body, and a high-voltage conductive assembly. The dielectric-barrier-free electrode assembly comprises two de-pointed electrodes, the two de-pointed electrodes are arranged opposite to each other and form an electrode space, both the two de-pointed electrodes are embedded in a groove of the insulation groove body, both the two de-pointed electrodes are electrically connected to the high-voltage conductive assembly, and both the two de-pointed electrodes have a point-discharge prevention property, thereby preventing the triggering of a unipolar corona near the two de-pointed electrodes, and helping to suppress the arc light caused by the tipped electrodes. Therefore, the electrode space has the property of extending the discharge space, which supports extending the discharge space on the basis of enhancing the electric field strength, breaks through the restraint of suppressing the arc light caused by the point electrode by using the insulating dielectric barrier layer, and helps to get rid of the restriction of the insulating dielectric barrier layer to the discharge space.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma cleaning, and more particularly to a point-discharge prevention unipolar electrode structure and a plasma cleaning device.

Background Art

[0002] In the relevant art, a plasma cleaning device generally comprises an alternating-current high-voltage power supply and a dielectric barrier electrode structure. The dielectric barrier electrode structure comprises a high-voltage electrode, a grounding electrode, and an insulating dielectric barrier layer, a point with a small radius of curvature is present on the high-voltage electrode or the grounding electrode, the high-voltage electrode is arranged opposite to the grounding electrode and forms an electrode space, the insulating dielectric barrier layer is built in the electrode space, and a discharge space smaller than the electrode space is formed between the insulating dielectric barrier layer and the high-voltage electrode or/and the grounding electrode. During the process that the high-voltage electrode and the grounding electrode are applied with an alternating-current high-voltage by the alternating-current high-voltage power supply, an electric field is concentrated around the point to form a point discharge, easily triggering a positive corona in the vicinity of the high-voltage electrode or triggering a negative corona in the vicinity of the grounding electrode. The above-mentioned positive corona or the above-mentioned negative corona easily develops into local arc light in the discharge space, and an insulating dielectric barrier layer is used to suppress local arc light, for example, the case where high-voltage electrodes can use needle-shaped electrodes or thin wire shaped electrodes as point electrodes.

[0003] In the above-mentioned discharge space, the electric field strength increases as the discharge distance between the insulating dielectric barrier layer and the high-voltage electrode or the grounding electrode decreases, and the discharge distance needs to be limited in the millimeter range to ensure the discharge strength, resulting in a narrow discharge space. Therefore, in the conventional plasma cleaning device, the dielectric barrier electrode structure is limited to the arc light caused by suppressing the point electrode by using the insulating dielectric barrier layer.

Summary of the Invention

[0004] The present invention addresses the problem that the prior art is limited to the arc light caused by suppressing the point electrode by using the insulating dielectric barrier layer, and provides a point-discharge prevention unipolar electrode structure and a plasma cleaning device.

[0005] According to an aspect of the present invention, there is provided a point-discharge prevention unipolar electrode structure. The point-discharge prevention unipolar electrode structure comprises a dielectric-barrier-free electrode assembly, an insulation groove body, and a high-voltage conductive assembly;

the dielectric-barrier-free electrode assembly comprises a first de-pointed electrode and a second de-pointed electrode, wherein the first de-pointed electrode and the second de-pointed electrode are arranged opposite to each other and form an electrode space for expanding a discharge space; and

a groove is provided on the insulation groove body, the first de-pointed electrode and the second de-pointed electrode are both provided in the groove, and the first de-pointed electrode and the second de-pointed electrode are electrically connected to the high-voltage conductive assembly respectively.

[0006] The beneficial effects of the above technical solutions are as follows: a high voltage is conducted to two de-pointed electrodes via a high-voltage conductive assembly, so that the two de-pointed electrodes present the same unipolarity, both of the two de-pointed electrodes have no point, and both of the two de-pointed electrodes have a point-discharge prevention property; in the process of conducting the high voltage to the two de-pointed electrodes via the high-voltage conductive assembly, the triggering of a positive polarity corona or a negative polarity corona is prevented near the two de-pointed electrodes, which helps to suppress arc light caused by the point electrodes, forming an electrode space with an extended discharge space property between the two de-pointed electrodes, expanding the electrode area, widening the electrode spacing, and supporting extending the discharge space on the basis of enhancing the electric field strength; and the electrode space between the two de-pointed electrodes is built-in in the groove of the insulation groove body, preventing the insulation groove body from forming an insulating dielectric barrier layer in the electrode space between the two de-pointed electrodes, thereby breaking through the restraint of suppressing the arc light caused by the point electrode by using the insulating dielectric barrier layer, and helping to get rid of the restriction of the insulating dielectric barrier layer to the discharge space.

[0007] On the basis of the above-mentioned technical solutions, the present invention also makes the following improvements to the point-discharge prevention unipolar electrode structure.

[0008] Optionally, the first de-pointed electrode is a smooth conductive plate in a mesh shape.

[0009] The beneficial effects of the above technical solution are as follows: the first de-pointed electrode is provided with a plurality of gas holes, so as to facilitate the working gas entering the electrode space in the groove of the insulation groove body via the first de-pointed electrode, and prevent the first de-pointed electrode from blocking the working gas.

[0010] Optionally, the dielectric-barrier-free electrode assembly further comprises a first de-pointed conductive connecting piece, the first de-pointed conductive connecting piece being electrically connected to the first de-pointed electrode via the second de-pointed electrode, the first de-pointed conductive connecting piece being embedded in the second de-pointed electrode and the groove, and the first de-pointed conductive connecting piece being electrically connected to the high-voltage conductive assembly.

[0011] The beneficial effects of the above technical solution are as follows: on the one hand, the second de-pointed electrode is fixedly connected in the insulation groove body through the first de-pointed conductive connecting piece; and on the other hand, the first de-pointed conductive connecting piece has de-pointed discharge properties, the two de-pointed electrodes and the high-voltage conductive assembly are electrically connected in the insulation groove body via the first de-pointed conductive connecting piece, so as to not only prevent the triggering of a positive polarity corona or a negative polarity corona near the first de-pointed conductive connecting piece, but also prevent the insulation groove body from obstructing the electrical connection between the dielectric-barrier-free electrode assembly and the high-voltage conductive assembly, thereby improving the versatility of the first de-pointed conductive connecting piece, and reducing the difficulty of electrically connecting the dielectric-barrier-free electrode assembly with the high-voltage conductive assembly.

[0012] Optionally, the dielectric-barrier-free electrode assembly further comprises a second de-pointed conductive connecting piece, the second de-pointed conductive connecting piece being arranged in the electrode space, one end of the second de-pointed conductive connecting piece being electrically connected to the first de-pointed electrode, and the other end of the second de-pointed conductive connecting piece being electrically connected to the high-voltage conductive assembly via the second de-pointed electrode.

[0013] The beneficial effects of the above technical solution are as follows: the second de-pointed conductive connecting piece has a point-discharge prevention property in the electrode space, and the second de-pointed conductive connecting piece electrically connects two de-pointed electrodes with a high-voltage conductive assembly in the electrode space, so as to prevent the triggering of a positive polarity corona or a negative polarity corona near the second de-pointed conductive connecting piece, thereby improving the space utilization rate of the dielectric-barrier-free electrode assembly.

[0014] Optionally, the second de-pointed conductive connecting piece is a conductive cylinder having a cylindrical shape, and both ends of the conductive cylinder are in contact with the first de-pointed electrode and the second de-pointed electrode, respectively.

[0015] The beneficial effects of the above technical solution are as follows: electrically connecting the two de-pointed electrodes in the electrode space through the conductive cylinder helps to reduce the weight of the dielectric-barrier-free electrode assembly and helps to improve the structural stability of the dielectric-barrier-free electrode assembly.

[0016] Optionally, the dielectric-barrier-free electrode assembly further comprises an insulation pin, the insulation pin being successively inserted in the first de-pointed electrode, the second de-pointed electrode, and the conductive cylinder, and a pin tail of the insulation pin being inserted in the groove of the insulation groove body.

[0017] The beneficial effects of the above technical solution are as follows: compared with the insulation pin being exposed in the electrode space between the two de-pointed electrodes, by hiding the insulation pin in the electrode space by the two de-pointed electrodes and the conductive cylinder, the utilization rate of the conductive cylinder is improved, and the electric field loss and dielectric loss in the electrode space are reduced; and the dielectric-barrier-free electrode assembly is detachably fixed in the insulation groove body by means of the insulation pin, so as to simplify the fixing manner of the dielectric-barrier-free electrode assembly in the insulation groove body, and to allow for the removability and stability of the dielectric-barrier-free electrode assembly in the insulation groove body.

[0018] Optionally, at least three conductive cylinders are uniformly arranged in the electrode space, and the number of insulation pins is equal to the number of the conductive cylinders, with each insulation pin inserted into a corresponding conductive cylinder respectively.

[0019] The beneficial effects of the above technical solution are as follows: by uniformly arranging a plurality of conductive cylinders in the electrode space between two de-pointed electrodes, the conductivity uniformity of the dielectric-barrier-free electrode assembly is ensured, thereby helping to improve the discharge uniformity; and each insulation pin respectively aligns each conductive cylinder, thereby improving the stability of the dielectric-barrier-free electrode assembly in the insulation groove body.

[0020] Optionally, the high-voltage conductive assembly is detachably fixed outside the insulation groove body, and the high-voltage conductive assembly is electrically connected to the first de-pointed electrode through the second de-pointed electrode.

[0021] The beneficial effects of the above technical solution are as follows: the high-voltage conductive assembly is detachably and fixedly connected to the insulation groove body, taking into account the detachability and stability between the insulation groove body and the high-voltage conductive assembly, improving the utilization rate of the insulation groove body, and electrically connecting the high-voltage conductive assembly and the first de-pointed electrode via the second de-pointed electrode, and simplifying the electrical connection mode of the point-discharge prevention unipolar electrode structure.

[0022] Optionally, the high-voltage conductive assembly comprises a first insulation sleeve, a vacuum sealing ring, a second insulation sleeve, a conductive pillar, and an alternating-current high-voltage conductive kit, the first insulation sleeve being arranged below the second insulation sleeve and leaving an accommodating gap with the second insulation sleeve, the vacuum sealing ring sealing the accommodating gap, the conductive pillar being successively inserted into the first insulation sleeve, the vacuum sealing ring, and the second insulation sleeve, and the alternating current high-voltage conductive kit being sleeved on the second insulation sleeve; and
the bottom of the conductive pillar is embedded in the groove of the insulation groove body, and the alternating-current high-voltage conductive kit is electrically connected to the second de-pointed electrode and the first de-pointed electrode respectively via the conductive pillar.

[0023] The beneficial effects of the above technical solution are as follows: an insulating hollow kit is formed by the insulation groove body, the first insulation sleeve, the vacuum sealing ring, and the second insulation sleeve together; an alternating-current high-voltage conductive kit and the dielectric-barrier-free electrode assembly are detachably and electrically connected in the insulating hollow kit via a conductive pillar; and the insulating hollow kit isolates the conductive pillar and the dielectric-barrier-free electrode assembly from the electric field, reducing the electric field interference of the conductive pillar on the dielectric-barrier-free electrode assembly, and improving the convenience of the electrical connection between the high-voltage conductive assembly and the dielectric-barrier-free electrode assembly.

[0024] Optionally, the alternating current high-voltage conductive kit comprises a nut, a high-frequency aerial plug, and a protective sleeve, the high-frequency aerial plug is provided with a voltage output part, the nut is nested outside the voltage output part, and the nut and the voltage output part are respectively embedded in the protective sleeve; and
the voltage output part of the high-frequency aerial plug is inserted into the top of the conductive pillar, the protective sleeve is nested outside the second insulation sleeve, and the bottom of the conductive pillar is electrically connected to the first de-pointed electrode via the second de-pointed electrode.

[0025] The beneficial effects of the above technical solution are as follows: by fixing the voltage output part of the high-frequency aerial plug in the protective sleeve in a detachable manner by means of a nut, the detachability and firmness of the voltage output part of the high-frequency aerial plug in the protective sleeve are effectively balanced, and by means of the pluggability of the high-frequency aerial plug, it is convenient for the high-voltage conductive assembly to electrically connect the dielectric-barrier-free electrode component and the alternating current high-voltage power supply.

[0026] Another aspect of the present invention provides a plasma cleaning device. The plasma cleaning device comprises a high-voltage power supply, a grounding electrode, and the point-discharge prevention unipolar electrode structure according to the first aspect. The high-voltage power supply is electrically connected to the grounding electrode and the high-voltage conductive assembly of the point-discharge prevention unipolar electrode structure, respectively, the grounding electrode is arranged outside the insulation groove body of the point-discharge prevention unipolar electrode structure, the grounding electrode and the first de-pointed electrode of the point-discharge prevention unipolar electrode structure are arranged opposite to each other, a first discharge space is formed between the grounding electrode and the first de-pointed electrode, and the electrode space of the point-discharge prevention unipolar electrode structure is extended to have a second discharge space.

[0027] The beneficial effects of the above technical solutions are as follows: in a plasma cleaning device, a high voltage is conducted to two de-pointed electrodes via a high-voltage conductive assembly, so that the two de-pointed electrodes present the same unipolarity, both of the two de-pointed electrodes have no point, and both of the two de-pointed electrodes have a point-discharge prevention property; in the process of conducting the high voltage to the two de-pointed electrodes via the high-voltage conductive assembly, the triggering of a positive polarity corona or a negative polarity corona is prevented near the two de-pointed electrodes, which helps to suppress arc light caused by the point electrodes, forming an electrode space with an extended discharge space property between the two de-pointed electrodes, expanding the electrode area, widening the electrode spacing, and supporting extending the discharge space on the basis of enhancing the electric field strength; and the electrode space between the two de-pointed electrodes is built-in in the groove of the insulation groove body, preventing the insulation groove body from forming an insulating dielectric barrier layer in the electrode space between the two de-pointed electrodes, thereby breaking through the restraint of suppressing the arc light caused by the point electrode by using the insulating dielectric barrier layer, helping to get rid of the restriction of the insulating dielectric barrier layer to the discharge space, helping to improve gas discharging efficiency and plasma production amount, and helping to enhance plasma cleaning efficiency.

Brief Description of the Drawings

[0028] 

Fig. 1 is a schematic diagram of a split structure of a point-discharge prevention unipolar electrode structure in an embodiment of the present invention;

Fig. 2 is a schematic diagram of an assembly structure of another point-discharge prevention unipolar electrode structure in an embodiment of the present invention;

Fig. 3 is a cross-sectional view of the point-discharge prevention unipolar electrode structure of Fig. 2;

Fig. 4 is a locally enlarged view at point A in Fig. 3;

Fig. 5 is a schematic diagram showing a split structure of a dielectric-barrier-free electrode assembly of Fig. 2;

Fig. 6 is a schematic diagram of the structure of a first de-pointed conductive connecting piece in Fig. 5;

Fig. 7 is a schematic diagram of the structure of a second de-pointed conductive connecting piece in Fig. 5;

Fig. 8 is a schematic diagram of a split structure of a high-voltage conductive assembly of Fig. 2;

Fig. 9 is a schematic diagram of a split structure of another dielectric-barrier-free electrode assembly in an embodiment of the present invention;

Fig. 10 is a schematic diagram of the structure of an insulation groove body in an embodiment of the present invention;

Fig. 11 is a schematic diagram of a split structure of another dielectric-barrier-free electrode assembly in an embodiment of the present invention;

Fig. 12 is a schematic diagram of the structure of another insulation groove body in an embodiment of the present invention; and

Fig. 13 is a schematic diagram of a split structure of another high-voltage conductive assembly in an embodiment of the present invention.

Description of reference numerals:

[0029] 1-dielectric-barrier-free electrode assembly, 2-insulation groove body, 3-high-voltage conductive assembly, 11-first de-pointed electrode, 12-second de-pointed electrode, 13-first de-pointed conductive connecting piece, 14-second de-pointed conductive connecting piece, 15-insulation pin, 21-second positioning hole, 22-fourth positioning hole, 31-first insulation sleeve, 32-vacuum sealing ring, 33-second insulation sleeve, 34-conductive pillar, 35-alternating-current high-voltage conductive kit, 121-first positioning hole, 122-third positioning hole, 351-nut, 352-high frequency aerial plug, and 353-protective sleeve.

Detailed Description of the Invention

[0030] 666 To make the above objects, features, and advantages of the present invention more apparent, a detailed description of specific embodiments of the present invention will be made with reference to the accompanying drawings.

[0031] Referring to Fig. 1, a point-discharge prevention unipolar electrode structure is shown in a split state. The point-discharge prevention unipolar electrode structure comprises a dielectric-barrier-free electrode assembly 1, an insulation groove body 2, and a high-voltage conductive assembly 3.

[0032] With reference to Fig. 1, the dielectric-barrier-free electrode assembly 1 comprises a first de-pointed electrode 11 and a second de-pointed electrode 12. The first de-pointed electrode 11 and the second de-pointed electrode 12 are arranged opposite to each other and form an electrode space used for expanding a discharge space. For example, the material and structure of the second de-pointed electrode 12 are the same as those of the first de-pointed electrode 11, and the first de-pointed electrode 11 can use a smooth aluminium alloy plate which has been processed by processes such as grinding and polishing. No point with a small radius of curvature is present on the smooth aluminium alloy plate, so that both the first de-pointed electrode 11 and the second de-pointed electrode 12 have a point-discharge prevention property.

[0033] A groove is provided on the insulation groove body 2, and the first de-pointed electrode 11 and the second de-pointed electrode 12 are both provided in the groove of the insulation groove body 2, preventing the formation of an insulating dielectric barrier layer in the electrode space between the first de-pointed electrode 11 and the second de-pointed electrode 12 of the insulation groove body 2

[0034] The grooves of the insulation groove body 2 may have an air gap with the first de-pointed electrode 11 and the second de-pointed electrode 12, respectively, so that the working gas enters the electrode space between the first de-pointed electrode 11 and the second de-pointed electrode 12 through the air gap.

[0035] The first de-pointed electrode 11 and the second de-pointed electrode 12 are both electrically connected to the high-voltage conductive assembly 3. For example, the high-voltage conductive assembly 3 is composed of a direct-current high-voltage power supply, a resistor, and two cables. The positive electrode of the direct-current high-voltage power supply is electrically connected to a high-voltage electrode in a plate shape, the high-voltage electrode is arranged opposite to the first de-pointed electrode 11 and forms a first discharge space, the high-voltage electrode is arranged opposite to the first de-pointed electrode 11 and the second de-pointed electrode 12, and one end of the resistor is electrically connected to the negative electrode of the direct-current high-voltage power supply. The other end of the resistor is connected in parallel to the first de-pointed electrode 11 and the second de-pointed electrode 12 via two cables, the first de-pointed electrode 11 and the second de-pointed electrode 12 are respectively grounded to form a layered grounding electrode, and a direct-current high-voltage power supply applies a direct-current high-voltage to the high-voltage electrode and the layered grounding electrode, so that the high-voltage electrode is in a positive polarity; at that, both the first de-pointed electrode 11 and the second de-pointed electrode 12 are in a negative polarity, and the electrode space between the first de-pointed electrode 11 and the second de-pointed electrode 12 extends into a second discharge space, preventing the triggering of a negative corona near the first de-pointed electrode 11 and near the second de-pointed electrode 12, thereby helping to suppress the arc light caused by the tipped electrode, expanding the electrode area, widening the electrode spacing, and expanding the discharge space on the basis of enhancing the electric field strength.

[0036] With reference to Fig. 2, there is shown another point-discharge prevention unipolar electrode structure in a self-contained state. With reference to Fig. 3, there is shown a sectional structure of the overall point-discharge prevention unipolar electrode structure in Fig. 2. With reference to Fig. 4, there is shown a partial sectional structure at A of the overall sectional structure in Fig. 3. With reference to Fig. 5, there is shown a dielectric-barrier-free electrode assembly 1 in Fig. 2 in a split state. With reference to Fig. 6, there is shown a first de-pointed conductive connecting piece 13 in Fig. 5. With reference to Fig. 7, there is shown a second de-pointed conductive connecting piece 14 in Fig. 5. With reference to Fig. 8, the high-voltage conductive assembly 3 in Fig. 2 is shown in a split state.

[0037] Optionally, with reference to Figs. 2 to 7, the dielectric-barrier-free electrode assembly 1 further comprises a first de-pointed electrode 11, a second de-pointed electrode 12, a first de-pointed conductive connecting piece 13, a second de-pointed conductive connecting piece 14, and an insulation pin 15. For example, the scenario that the first de-pointed conductive connecting piece 13 is a smooth conductive cavity, the second de-pointed conductive connecting piece 14 is a smooth iron column body, and there is no point with a small radius of curvature on both the smooth conductive cavity and the smooth iron column body, so that the first de-pointed conductive connecting piece 13 and the second de-pointed conductive connecting piece 14 have point-discharge prevention properties.

[0038] Optionally, the first de-pointed conductive connecting piece 13 is electrically connected to the first de-pointed electrode 11 via the second de-pointed electrode 12, the first de-pointed conductive connecting piece 13 is embedded in the second de-pointed electrode 12 and the groove of the insulation groove body 2, and the first de-pointed conductive connecting piece 13 is electrically connected to the high-voltage conductive assembly 3. For example, the high-voltage conductive assembly 3 is electrically connected to one end of the alternating current high-voltage power supply in a pluggable manner, and the other end of the alternating current high-voltage power supply is electrically connected to a grounding electrode in a plate shape. The grounding electrode is arranged opposite to the first de-pointed electrode 11. The grounding electrode is arranged, relative to the first de-pointed electrode 11, opposite to the second de-pointed electrode 12 and the first de-pointed conductive connecting piece 13. The alternating current high-voltage power supply applies the alternating current voltage to the grounding electrode and the high-voltage conductive assembly 3, so that the grounding electrode can exhibit negative polarity. The alternating current high-voltage is transmitted from the high-voltage conductive assembly 3 to the second de-pointed electrode 12 and the first de-pointed electrode 11 respectively through the first de-pointed conductive connecting piece 13 so as to enable the first de-pointed conductive connecting piece 13, the second de-pointed electrode 12, and the first de-pointed electrode 11 to exhibit positive polarity, forming a layered high-voltage electrode to prevent the triggering of a positive polarity corona near the first de-pointed electrode 11 and the second de-pointed electrode 12.

[0039] The second de-pointed electrode 12 is fixedly connected in the insulation groove body 2 via the first de-pointed conductive connecting piece 13, and the first de-pointed electrode 11, the second de-pointed electrode 12, and the high-voltage conductive assembly 3 are electrically connected in the insulation groove body 2 via the first de-pointed conductive connecting piece 13, so as to not only prevent the triggering of a positive polarity corona or a negative polarity corona near the first de-pointed conductive connecting piece 13, but also prevent the insulation groove body 2 from obstructing the electrical connection between the dielectric-barrier-free electrode assembly 1 and the high-voltage conductive assembly 3, thereby improving the versatility of the first de-pointed conductive connecting piece 13, and reducing the difficulty of electrically connecting the dielectric-barrier-free electrode assembly 1 with the high-voltage conductive assembly 3.

[0040] Optionally, the second de-pointed conductive connecting piece 14 is arranged in an electrode space between the first de-pointed electrode 11 and the second de-pointed electrode 12. One end of the second de-pointed conductive connecting piece 14 is electrically connected to the first de-pointed electrode 11, and the other end of the second de-pointed conductive connecting piece 14 is electrically connected to the first de-pointed conductive connecting piece 13 via the second de-pointed electrode 12. The high voltage is conducted from the high-voltage conductive assembly 3 to the second de-pointed electrode 12 via the first de-pointed conductive connecting piece 13, and the high voltage is conducted from the second de-pointed electrode 12 to the first de-pointed electrode 11 via the second de-pointed conductive connecting piece 14, so that the second de-pointed conductive connecting piece 14 presents the same positive polarity or negative polarity as the second de-pointed electrode 12, and the second de-pointed conductive connecting piece 14 forms a de-pointed extension electrode in the electrode space, and thus the first de-pointed electrode 11 is electrically connected to the high-voltage conductive assembly 3 via the second de-pointed conductive connecting piece 14, the second de-pointed electrode 12, and the first de-pointed conductive connecting piece 13 in sequence in the insulation groove body 2.

[0041] By electrically connecting the first de-pointed electrode 11 with the second de-pointed electrode 12 in the electrode space through the second de-pointed conductive connecting piece 14, the positive corona or negative corona is prevented from being caused near the second de-pointed conductive connecting piece 14, the electrical connection mode of the dielectric-barrier-free electrode assembly 1 is simplified, the space utilization rate of the dielectric-barrier-free electrode assembly 1 is improved, and the electrode area is enlarged. Besides, it helps to enhance the discharge strength.

[0042] Optionally, the second de-pointed conductive connecting piece 14 is a conductive cylinder having a cylindrical shape, the conductive cylinder is hollow, two ends of the conductive cylinder are respectively in contact with the first de-pointed electrode 11 and the second de-pointed electrode 12, and the first de-pointed electrode 11 and the second de-pointed electrode 12 are electrically connected in the electrode space via the conductive cylinder, which helps to reduce the weight of the dielectric-barrier-free electrode assembly 1 and helps to improve the structural stability of the dielectric-barrier-free electrode assembly 1.

[0043] Optionally, at least three conductive cylinders are uniformly arranged in the electrode space between the first de-pointed electrode 11 and the second de-pointed electrode 12. By uniformly distributing a plurality of conductive cylinders in the electrode space, the conductivity uniformity of the dielectric-barrier-free electrode assembly 1 is ensured, thereby helping to improve the discharge uniformity, for example, the scenario that six conductive cylinders are arranged in a one-dimensional array and equally spaced in the aforementioned electrode space.

[0044] Optionally, the insulation pin 15 is sequentially inserted into the first de-pointed electrode 11, the second de-pointed electrode 12, and the conductive cylinder. By hiding the insulation pin 15 in the electrode space by the first de-pointed electrode 11, the second de-pointed electrode 12, and the conductive cylinder, the utilization rate of the conductive cylinder is improved, and the electric field loss and the dielectric loss of the electrode space are reduced compared to the scenario that the insulation pin 15 is exposed in the electrode space between the first de-pointed electrode 11 and the second de-pointed electrode 12.

[0045] Optionally, the top tail of the insulation pin 15 is inserted into the groove of the insulation groove body 2, and the dielectric-barrier-free electrode assembly 1 is detachably fixed in the insulation groove body 2 by means of the insulation pin 15, so as to simplify the fixing manner of the dielectric-barrier-free electrode assembly 1 in the insulation groove body 2, and to allow for the removability and stability of the dielectric-barrier-free electrode assembly 1 in the insulation groove body 2.

[0046] Optionally, the number of insulation pins 15 is equal to the number of conductive cylinders, each insulation pin 15 is respectively inserted in a corresponding conductive cylinder, and each insulation pin 15 is respectively aligned with each conductive cylinder, so as to improve the stability of the dielectric-barrier-free electrode assembly 1 in the insulation groove body 2, for example, the scenario that six insulation pins 15 are respectively plastic screws, and the pin tail of the plastic screw is in threaded connection with the groove of the insulation groove body 2.

[0047] Optionally, with reference to Figs. 2 to 4, the high-voltage conductive assembly 3 is detachably fixed outside the insulation groove body 2 to form a tower-shaped structure, taking into account the removability and stability between the insulation groove body 2 and the high-voltage conductive assembly 3, improving the utilization rate of the insulation groove body 2; and the high-voltage conductive assembly 3 is electrically connected to the first de-pointed electrode 11 via the second de-pointed electrode 12, simplifying the electrical connection mode of the point-discharge prevention unipolar electrode structure.

[0048] Optionally, with reference to Figs. 3 and 8, the high-voltage conductive assembly 3 comprises a first insulation sleeve 31, a vacuum sealing ring 32, a second insulation sleeve 33, a conductive pillar 34, and an alternating current high-voltage conductive kit 35. The first insulation sleeve 31 is arranged below the second insulation sleeve 33 and leaves an accommodating gap therebetween, the vacuum sealing ring 32 seals the accommodating gap, the conductive pillar 34 is successively inserted into the first insulation sleeve 31, the vacuum sealing ring 32, and the second insulation sleeve 33, and the alternating current high-voltage conductive kit 35 is nested on the second insulation sleeve 33.

[0049] Optionally, the bottom of the conductive pillar 34 is embedded in the groove of the insulation groove body 2, and the alternating current high-voltage conductive kit 35 is electrically connected to the second de-pointed electrode 12 and the first de-pointed electrode 11 respectively via the conductive pillar 34. For example, the scenario that the first de-pointed conductive connecting piece 13 is hollow, and the bottom of the conductive pillar 34 is inserted into the first de-pointed conductive connecting piece 13, so that the bottom of the conductive pillar 34 is embedded in the groove of the insulation groove body 2 via the first de-pointed conductive connecting piece 13 and is detachably electrically connected to the second de-pointed electrode 12.

[0050] An insulating hollow kit is formed by the insulation groove body 2, the first insulation sleeve 31, the vacuum sealing ring 32, and the second insulation sleeve 33 together; an alternating-current high-voltage conductive kit 35 and the dielectric-barrier-free electrode assembly 1 are detachably and electrically connected in the insulating hollow kit via a conductive pillar 34; and the insulating hollow kit isolates the conductive pillar 34 and the dielectric-barrier-free electrode assembly 1 from the electric field, reducing the electric field interference of the conductive pillar 34 on the dielectric-barrier-free electrode assembly 1, and improving the convenience of the electrical connection between the high-voltage conductive assembly 3 and the dielectric-barrier-free electrode assembly 1.

[0051] Optionally, referring to Figs. 4 and 8, the alternating current high-voltage conductive kit 35 comprises a nut 351, a high-frequency aerial plug 352, and a protective sleeve 353. The nut 351 is nested outside the voltage output part of the high-frequency aerial plug 352, and the voltage output parts of the nut 351 and the high-frequency aerial plug 352 are respectively embedded in the protective sleeve 353. For example, the scenario that the nut 351 is made of a conductive material or an insulating material, the voltage output part of the high-frequency aerial plug 352 is a conductive rod, the protective sleeve 353 is made of an insulating material, and there are two nuts 351. The two nuts are stacked and nested in the protective sleeve 353 to form a double-layer nut, the double-layer nut is threadedly connected to the voltage output part of the high-frequency aerial plug 352, and the nut 351 detachably fixes the voltage output part of the high-frequency aerial plug 352 in the protective sleeve 353, thereby effectively balancing the detachability and security of the voltage output part of the high-frequency aerial plug 352 in the protective sleeve 353.

[0052] Optionally, the voltage output part of the high-frequency aerial plug 352 is inserted into the top of the conductive pillar column 34, so that the conductive pillar column 34 is electrically connected to the high-frequency aerial plug 352; the protective sleeve 353 is nested outside the second insulation sleeve 33; the bottom of the conductive pillar column 34 is electrically connected to the first de-pointed electrode 11 via the second de-pointed electrode 12; and by means of the pluggability of the high-frequency aerial plug 352, it is convenient for the high-voltage conductive assembly 3 to be electrically connected to the dielectric-barrier-free electrode assembly 1 and the alternating current high-voltage power supply.

[0053] Optionally, with reference to Fig. 9, there is shown another dielectric-barrier-free electrode assembly 1 in a split state. The dielectric-barrier-free electrode assembly 1 comprises a first de-pointed electrode 11, a second de-pointed electrode 12, and a first de-pointed conductive connecting piece 13. The structure of the first de-pointed electrode 11 is different from that of the second de-pointed electrode 12, the first de-pointed electrode 11 is a smooth conductive plate in a mesh shape, and the first de-pointed electrode 11 is provided with a plurality of gas holes, so as to facilitate the working gas to enter an electrode space in a groove of an insulation groove body via the first de-pointed electrode 11 such that the first de-pointed electrode 11 is prevented from blocking the working gas, and the second de-pointed electrode 12 is a smooth conductive plate with a first positioning hole 121.

[0054] Optionally, referring to Fig. 10, an insulation groove body 2 is shown. A second positioning hole 21 is provided on a groove of the insulation groove body 2, and a first de-pointed conductive connecting piece 13 is successively inserted into the first positioning hole 121 and the second positioning hole 21.

[0055] Optionally, with reference to Fig. 11, there is shown another dielectric-barrier-free electrode assembly 1 in a split state. The dielectric-barrier-free electrode assembly 1 comprises a first de-pointed electrode 11, a second de-pointed electrode 12, and a plurality of second de-pointed conductive connecting pieces 14; the first de-pointed electrode 11 is in a mesh structure; the second de-pointed electrode 12 is provided with a plurality of third positioning holes 122; the number of the third positioning holes 122 is the same as the number of the second de-pointed conductive connecting pieces 14; and each of the third positioning holes 122 is respectively aligned with each of the second de-pointed conductive connecting pieces 14, for example, the number of the third positioning holes 122 being six.

[0056] Optionally, referring to FIg. 12, an insulation groove body 2 is shown. A plurality of fourth positioning holes 22 are provided on the groove of the insulation groove body 2, the number of the fourth positioning holes 22 is equal to the number of the insulation pins 15, each insulation pin 15 is inserted into a corresponding third positioning hole 122, and the pin tails of each insulation pin 15 are threaded into the aligned fourth positioning holes 22, for example, the number of the fourth positioning holes 22 being six.

[0057] Optionally, referring to Fig. 13, there is shown another high-voltage conductive assembly 3 in a split state. In the high-voltage conductive assembly 3, an alternating-current high-voltage conductive kit 35 comprises a cable wire and a conductive rod electrically connected to one end of the cable wire, and the conductive rod is successively inserted into a second insulation sleeve 33 and a conductive pillar column 34 so that the cable wire is electrically connected to the conductive pillar 34 via the conductive rod. For example, the scenario that a positive electrode of a direct-current high-voltage power supply is electrically connected to the other end of the cable wire, a negative electrode of the direct-current high-voltage power supply is electrically connected to a grounding electrode, and the direct-current high-voltage power supply applies a direct-current high-voltage to the high-voltage conductive assembly 3 and the grounding electrode. The direct-current high-voltage is conducted to the dielectric-barrier-free electrode assembly 1 through the high-voltage conductive assembly 3, so that the dielectric-barrier-free electrode assembly 1 presents a positive polarity.

[0058] The present invention also provides a plasma cleaning device, comprising a high-voltage power supply, a grounding electrode, and the above-mentioned point-discharge prevention unipolar electrode structure. The high-voltage power supply is electrically connected to the grounding electrode and the high-voltage conductive assembly 3 of the point-discharge prevention unipolar electrode structure respectively. The grounding electrode is arranged outside an insulation groove body 2 of the point-discharge prevention unipolar electrode structure, and the grounding electrode is arranged opposite to the first de-pointed electrode 11 of the point-discharge prevention unipolar electrode structure, and a first discharge space is formed between the grounding electrode and the first de-pointed electrode 11 such that the electrode space of the point-discharge prevention unipolar electrode structure is expanded into a second discharge space.

[0059] The present invention breaks through the use of an insulating dielectric barrier layer in a dielectric barrier electrode structure to suppress the confinement of arc light caused by a point electrode, removes the restriction imposed by the insulating dielectric barrier layer on the discharge space, and allows the discharge spacing in the discharge space to break through the millimeter-level restriction, so as to expand the discharge space, which helps to improve the gas discharge efficiency and the plasma generation amount, and helps to improve the plasma cleaning efficiency.

[0060] Although the present disclosure is disclosed above, the scope of the present disclosure is not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the disclosure, and it is intended that such changes and modifications fall within the scope of the present invention.

Claims

1. A point-discharge prevention unipolar electrode structure, characterized in that the point-discharge prevention unipolar electrode structure comprises a dielectric-barrier-free electrode assembly (1), an insulation groove body (2), and a high-voltage conductive assembly (3);

the dielectric-barrier-free electrode assembly (1) comprises a first de-pointed electrode (11) and a second de-pointed electrode (12), wherein the first de-pointed electrode (11) and the second de-pointed electrode (12) are arranged opposite to each other and form an electrode space for expanding a discharge space; and

a groove is provided on the insulation groove body (2), the first de-pointed electrode (11) and the second de-pointed electrode (12) are both provided in the groove, and the first de-pointed electrode (11) and the second de-pointed electrode (12) are both electrically connected to the high-voltage conductive assembly (3).

2. The point-discharge prevention unipolar electrode structure according to claim 1, characterized in that the first de-pointed electrode (11) is a smooth conductive plate in a mesh shape.

3. The point-discharge prevention unipolar electrode structure according to claim 1, characterized in that the dielectric-barrier-free electrode assembly (1) further comprises a first de-pointed conductive connecting piece (13), the first de-pointed conductive connecting piece (13) being electrically connected to the first de-pointed electrode (11) via the second de-pointed electrode (12), the first de-pointed conductive connecting piece (13) being embedded in the second de-pointed electrode (12) and the groove, and the first de-pointed conductive connecting piece (13) being electrically connected to the high-voltage conductive assembly (3).

4. The point-discharge prevention unipolar electrode structure according to claim 1, characterized in that the dielectric-barrier-free electrode assembly (1) further comprises a second de-pointed conductive connecting piece (14), the second de-pointed conductive connecting piece (14) being arranged in the electrode space, one end of the second de-pointed conductive connecting piece (14) being electrically connected to the first de-pointed electrode (11), and the other end of the second de-pointed conductive connecting piece (14) being electrically connected to the high-voltage conductive assembly (3) via the second de-pointed electrode (12).

5. The point-discharge prevention unipolar electrode structure according to claim 4, characterized in that the second de-pointed conductive connecting piece (14) is a conductive cylinder having a cylindrical shape, and both ends of the conductive cylinder are in contact with the first de-pointed electrode (11) and the second de-pointed electrode (12), respectively.

6. The point-discharge prevention unipolar electrode structure according to claim 5, characterized in that the dielectric-barrier-free electrode assembly (1) further comprises an insulation pin (15), the insulation pin (15) being successively inserted in the first de-pointed electrode (11), the second de-pointed electrode (12), and the conductive cylinder, and a pin tail of the insulation pin (15) being inserted in the groove.

7. The point-discharge prevention unipolar electrode structure according to claim 6, characterized in that at least three conductive cylinders are uniformly arranged in the electrode space, and the number of insulation pins (15) is equal to the number of the conductive cylinders, with each insulation pin (15) inserted into a corresponding conductive cylinder respectively.

8. The point-discharge prevention unipolar electrode structure according to any one of claims 1 to 7, characterized in that the high-voltage conductive assembly (3) is detachably fixed outside the insulation groove body (2), and the high-voltage conductive assembly (3) is electrically connected to the first de-pointed electrode (11) through the second de-pointed electrode (12).

9. The point-discharge prevention unipolar electrode structure according to any one of claims 1 to 7, characterized in that the high-voltage conductive assembly (3) comprises a first insulation sleeve (31), a vacuum sealing ring (32), a second insulation sleeve (33), a conductive pillar (34), and an alternating-current high-voltage conductive kit (35), the first insulation sleeve (31) being arranged below the second insulation sleeve (33) and leaving an accommodating gap with the second insulation sleeve (33), the vacuum sealing ring (32) sealing the accommodating gap, the conductive pillar (34) being successively inserted into the first insulation sleeve (31), the vacuum sealing ring (32), and the second insulation sleeve (33), and the alternating current high-voltage conductive kit (35) being nested on the second insulation sleeve (33); and
a bottom of the conductive pillar (34) is embedded in the groove, and the alternating-current high-voltage conductive kit (35) is electrically connected to the second de-pointed electrode (12) and the first de-pointed electrode (11) respectively via the conductive pillar (34).

10. The point-discharge prevention unipolar electrode structure according to claim 9, characterized in that the alternating current high-voltage conductive kit (35) comprises a nut (351), a high-frequency aerial plug (352), and a protective sleeve (353), the high-frequency aerial plug (352) is provided with a voltage output part, the nut (351) is nested outside the voltage output part, and the nut (351) and the voltage output part are respectively embedded in the protective sleeve (353); and
the voltage output part is inserted into a top of the conductive pillar (34), the protective sleeve (353) is nested outside the second insulation sleeve (33), and the bottom of the conductive pillar (34) is electrically connected to the first de-pointed electrode (11) via the second de-pointed electrode (12).

11. A plasma cleaning device, characterized in that the plasma cleaning device comprises a high-voltage power supply, a grounding electrode, and the point-discharge prevention unipolar electrode structure according to any one of claims 1 to 10, wherein the high-voltage power supply is electrically connected to the grounding electrode and the high-voltage conductive assembly (3) of the point-discharge prevention unipolar electrode structure, respectively, the grounding electrode is arranged outside the insulation groove body (2) of the point-discharge prevention unipolar electrode structure, the grounding electrode and the first de-pointed electrode (11) of the point-discharge prevention unipolar electrode structure are arranged opposite to each other, a first discharge space is formed between the grounding electrode and the first de-pointed electrode (11), and the electrode space of the point-discharge prevention unipolar electrode structure is extended to have a second discharge space.

Drawing