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EP 4 377 047 A1

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(43) Date of publication: 05.06.2024 Bulletin 2024/23 (21) Application number: 21952070.7 (22) Date of filing: 28.07.2021

(51) International Patent Classification (IPC):  B24B 53/017(2012.01) H01L 21/67(2006.01) B24B 37/30(2012.01) (52) Cooperative Patent Classification (CPC): B24B 37/30; B24B 53/017; H01L 21/67046; H01L 21/67219; H01L 21/68742; H01L 21/67028; H01L 21/68785; H01L 21/6838 (86) International application number: PCT/US2021/043554 (87) International publication number: WO 2023/009116 (02.02.2023 Gazette 2023/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: RANGARAJAN, Jagan Santa Clara, California 95054 (US) GOLUBOVSKY, Edward Santa Clara, California 95054 (US) GURUSAMY, Jay Santa Clara, California 95054 (US) ZUNIGA, Steven M. Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)