(19)

(11)

EP 4 377 749 A1

(12)

(43) Date of publication: 05.06.2024 Bulletin 2024/23 (21) Application number: 22848773.2 (22) Date of filing: 21.07.2022

(51) International Patent Classification (IPC):  G03F 1/20(2012.01) H01J 37/317(2006.01) G03F 1/78(2012.01) (52) Cooperative Patent Classification (CPC): G03F 1/78; G03F 1/36; G03F 7/705; G03F 7/70441; H01J 37/3174; H01J 2237/31776 (86) International application number: PCT/IB2022/056722 (87) International publication number: WO 2023/007321 (02.02.2023 Gazette 2023/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 30.07.2021 US 202117444140 30.07.2021 US 202117444142 (71) Applicant: D2S, Inc. San Jose, CA 95117 (US)	(72) Inventors: FUJIMURA, Akira San Jose, California 95117 (US) UNGAR, P. Jeffrey San Jose, California 95117 (US) SHIRALI, Nagesh San Jose, California 95131 (US) (74) Representative: Haseltine Lake Kempner LLP  One Portwall Square Portwall Lane Bristol BS1 6BH Bristol BS1 6BH (GB)