(19)

(11)

EP 4 388 288 A2

(12)

(88) Date of publication A3: 20.07.2023 (43) Date of publication: 26.06.2024 Bulletin 2024/26 (21) Application number: 22881492.7 (22) Date of filing: 11.10.2022

(51) International Patent Classification (IPC):  G01J 5/02(2022.01) H01L 31/09(2006.01) (52) Cooperative Patent Classification (CPC): G01J 5/20; G01J 5/023; G01J 5/084 (86) International application number: PCT/TR2022/051116 (87) International publication number: WO 2023/063913 (20.04.2023 Gazette 2023/16)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 14.10.2021 TR 202116033 (71) Applicant: Aselsan Elektronik Sanayi ve Ticaret Anonim Sirketi 06200 Ankara (TR)	(72) Inventor: ÇEL K, Özer Ankara (TR) (74) Representative: Yamankaradeniz, Kemal  Destek Patent Inc. Maslak Mah., Büyükdere Cad., No: 243, Kat: 13, Spine Tower, Sariyer, 34485 Istanbul 34485 Istanbul (TR)