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(11)

EP 4 388 578 A1

(12)

(43) Date of publication: 26.06.2024 Bulletin 2024/26 (21) Application number: 22802845.2 (22) Date of filing: 07.10.2022

(51) International Patent Classification (IPC):  H01L 21/033(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/0331; H01L 21/0337; H01L 21/0334; H10N 60/0912 (86) International application number: PCT/US2022/077769 (87) International publication number: WO 2023/060239 (13.04.2023 Gazette 2023/15)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 07.10.2021 US 202163253356 P (71) Applicant: Google LLC Mountain View, CA 94043 (US)	(72) Inventors: BURKETT, Brian James Mountain View, California 94043 (US) KREIKEBAUM, John Mark Mountain View, California 94043 (US) (74) Representative: Thorniley, Peter et al Venner Shipley LLP 200 Aldersgate London EC1A 4HD London EC1A 4HD (GB)