[0001] The present invention relates to a method and a system for real-time monitoring of
noise squeezing effects of a nonlinear device and/or system such as an oscillator,
a resonator, a microelectromechanical system (MEMS) or a nanoelectromechanical system
(NEMS). In particular, the present invention relates to a method and a system for
reducing noise, particularly in-phase noise, of a nonlinear device and/or system in
real-time. In particular, the present invention relates to a method and a system for
enhancing the signal-to-noise ratio, particularly the in-phase signal-to-noise-ratio,
of a nonlinear device and/or system in real-time. In particular, the present invention
relates to a method and a system for improving the sensitivity and/or performance
of oscillators and/or resonators in real-time, particularly in wide applications such
as NEMS/MEMS sensors, mechanical filters, and similar devices and/or systems.
[0002] Oscillators and resonators show noise due to several sources including temperature,
material defects, boundary conditions or other sources of irregularities. In addition,
irregularities and sources of noise may change over time so that noise is not a constant
parameter. Hence, the measurement of noise is difficult because it requires complicated
characterization and an extremely stable environment (which is almost impossible to
achieve), and it is time-consuming as well.
[0003] So-called noise squeezing effects can break the limit of noise in nonlinear devices
and/or systems by redistributing the noise in two conjugates of the observables. One
direction (in-phase) is compressed, and the other direction (quadrature) is enlarged.
Particularly if the signal detection and measurement of a device and/or system is
performed in the in-phase direction, noise can be suppressed by means of such squeezing
effects, and the signal-to-noise ratio and/or the accuracy of the device and/or system
can be enhanced.
[0004] Oscillators and resonators in the nonlinear regime show noise squeezing effects under
certain conditions (e.g. at a particular excitation level or detuning frequency).
This property of nonlinear oscillators or resonators can be utilized to reduce the
noise floor and thus improve the sensitivity or performance of oscillators and/or
resonators in wide applications such as NEMS/MEMS sensors, mechanical filters and
similar devices and/or systems. To dynamically adjust the oscillators and/or resonators
into the best working conditions with lowest noise floor, the real-time monitoring
of noise squeezing effects, and particularly the real-time monitoring of the squeezing
factors, of the oscillators and/or resonators becomes important.
[0005] Traditionally, the squeezing effects are characterized by drawing a distribution
of in-phase and its quadrature (phase-space) by homodyne measurements, as described,
for example, in
D. Rugar and P. Gruetter: "Mechanical parametric amplification and thermomechanical
noise squeezing", Phys. Rev. Lett. 67, 699 (1991). However, the homodyne measurements need to be conducted for a long time, usually
at least several tens of seconds for mechanical resonators, because of a time-consuming
calculation or integration process of the distribution. This method suffers from temperature
and/or frequency drifts and other difficult to control impacts, particularly in ultrasensitive
MEMS/NEMS in engineering applications. Therefore, the integration requires the system
to be extremely stable and requires active stabilization of temperature, pressure
and/or other environmental parameters on short as well as on long time scales (no
drifts allowed).
[0006] Recently, a method by sideband fitting of thermal noise has been developed to characterize
the squeezing effect without the homodyne measurement. In this method, which is described
in
J. S. Huber, G. Rastelli, M. J. Seitner, J. Koelbl, W. Belzig, M. I. Dykman, and E.
M. Weig: "Spectral evidence of squeezing of a weakly damped driven nanomechanical
mode, Phys. Rev. X 10, 021066 (2020), the thermal noise whose frequency is close to that of the drive tone helps to form
one pair of sidebands around the response of resonators to the drive tone in the frequency
spectrum. The difference of the spectral weight determined by integrating the response
curves can be used to calculate the squeezing effects after a complicated post analysis.
This complicated post analysis makes the characterization hard or even impossible
to be applied in real-time scenarios. Besides, in that method, the resonator is required
to work on resonance or very close to the resonance state. Hence, there is no possibility
to optimize the driving point. Furthermore, the method described in the above-mentioned
publication of J. S. Huber et al. is limited to resonators with extremely high-quality
factor, because otherwise the thermal fluctuations are unmeasurably small in amplitude.
[0007] In the publication
F. Yang, M. Fu, B. Bosnjak, R. H. Blick, Y. Jiang, and E. Scheer: "Mechanically Modulated
Sideband and Squeezing Effects of Membrane Resonators", Phys. Rev. Lett. 127, 184301
(2021), which is referred to herein as publication [3] and which is hereby incorporated
by reference, it is described that antiresonance sidebands are formed by modulating
a resonator with low-frequency signals. If the eigenfrequency of a nonlinear system
is modulated at a low frequency (for instance, < 1 kHz), the sidebands will have anti-resonance
behavior in the frequency spectrum. At one frequency, the intensity of the modulated
sideband is severely suppressed, and this frequency is called antiresonance frequency
far (or "M-point" in publication [3], see particularly FIG. 2a of publication [3]). As
shown in publication [3] (see equation 5 therein), the antiresonance frequency
far (or "M-point") can be used to calculate the squeezing of noise in the system through
the following direct relationship between a squeezing factor
φ (also referred to herein as squeezing parameter) and the antiresonance frequency
far:

wherein
ωar =
2πfar is the angular antiresonance frequency, Γ is a damping parameter of the nonlinear
device and/or system, and
δω = (
ωd -
ω0)/Γ with
ωd being a specified (i.e. predetermined or predeterminable) angular drive frequency,
and
ω0 being an angular eigenfrequency of the nonlinear device and/or system. The parameters
Γ and
δω are both known as they are characteristic parameters of the nonlinear device and/or
system. Thus, by monitoring the antiresonance frequency
far (or M-point), the squeezing factor
φ of the nonlinear device and/or system can directly be obtained. Furthermore, as described
in publication [3] and particularly shown in FIG. 3 of publication [3], by adjusting
the drive signal, particularly the drive frequency (detuning) and/or the drive power,
the antiresonance effect and thus the squeezing can be controlled.
[0008] Thus, it is an object of the present invention to achieve real-time monitoring of
squeezing effects of a nonlinear device and/or system (such as a nonlinear oscillator
and/or resonator, i.e. an oscillator and/or a resonator operated in a nonlinear state).
This object is solved by the subject-matters of the independent claims. Preferred
embodiments are defined by the dependent claims.
[0009] According to one aspect of the present invention, a method for real-time monitoring
noise squeezing effects of a nonlinear device and/or system is provided. The method
comprises the following steps:
- applying a drive signal Sd having a drive frequency fd to an input of the nonlinear device and/or system for driving the nonlinear device
and/or system in a nonlinear state
- applying an additional probe signal Sp to the input of the nonlinear device and/or system;
- capturing an output signal Sout of the nonlinear device and/or system;
- determining, based on the captured output signal Sout, a frequency spectrum of the output signal Sout;
- determining, based on the frequency spectrum of the output signal Sout, an antiresonance frequency far, the antiresonance frequency far being a measure for the noise squeezing effects of the nonlinear device and/or system;
wherein:
the additional probe signal Sp comprises a multi-tone signal having a plurality of different probe frequencies,
and/or
the additional probe signal Sp comprises white noise having a frequency bandwidth that is smaller than the drive
frequency fd.
[0010] A "nonlinear device" within the present invention may be a resonator or an oscillator,
particular a resonator or an oscillator that is operated and/or driven in a nonlinear
state. A "nonlinear system" within the present invention may be a MEMS or NEMS. For
example, a nonlinear system may be a gyroscope, a mass detector, an inertial sensor,
an accelerator, etc.
[0011] "Real-time monitoring noise squeezing effects" or "real-time monitoring of a noise
squeezing" of a nonlinear device and/or system" particularly means within the present
invention that it is determined how strong the squeezing of the nonlinear device and/or
system is at a distinct time or within a distinct time period. In particular, monitoring
noise squeezing effects of a nonlinear device and/or system means monitoring (and/or
determining) an intensity, a degree and/or a strength of noise squeezing effects present
in the nonlinear device and/or system. The noise squeezing effects of a nonlinear
device and/or system are monitored based on the determined antiresonance frequency
far which is obtained from the frequency (sideband) spectrum of the output signal of
the nonlinear device and/or system. This is possible, because according to equation
1 above the presence of squeezing effects can be quantized by means of a squeezing
factor
φ which is directly related with the antiresonance frequency
far. Therefore, the antiresonance frequency
far is a measure of the squeezing factor
φ, and thus a measure for the presence of noise squeezing effects in the nonlinear
device and/or system. Hence, monitoring noise squeezing (or noise squeezing effects)
may comprise monitoring the squeezing factor
φ. However, it is noted that for monitoring the noise squeezing (or noise squeezing
effects), it is not necessary to determine the squeezing factor
φ. Rather, the antiresonance frequency can also be used directly to monitor noise squeezing
effects (without calculating the squeezing factor
φ). This can be done by determining if the current working status of the nonlinear
device and/or system has the lowest noise floor. For example, in some nonlinear devices
and/or systems, it is the on-resonance state which provides the best squeezing state
for enhancing the signal. Further, the antiresonance frequency of on-resonance states
is known to be close to zero (i.e. 0 Hz). Therefore, for monitoring the noise squeezing
effects, the determined antiresonance frequency may be compared with zero (i.e. 0
Hz), and the comparison result, i.e. the difference between the determined antiresonance
frequency and zero (i.e. 0 Hz), is a measure for the noise squeezing effects. In particular,
the smaller the difference of the antiresonance frequency from 0 Hz, the larger the
noise squeezing effects. In addition or alternatively, for monitoring the noise squeezing
effects, the determined antiresonance frequency
far may be compared with the driving frequency
fd. The comparison result, i.e. the difference between the determined antiresonance
frequency
far and the driving frequency
fd, is a measure for the noise squeezing effects. In particular, the larger the difference
of the antiresonance frequency
far from the driving frequency
fd, the larger the noise squeezing effects.
[0012] A drive signal having a drive frequency
fd (also referred to herein as working frequency) is applied to an input of the nonlinear
device and/or system. For example, the input of the nonlinear device and/or system
may comprise contacts or electrodes of a piezo actuator.
[0013] Further, an additional probe signal, particularly a pulse of an additional probe
signal, is applied to the input of the nonlinear device and/or system. In particular,
the probe signal has a plurality of different probe frequencies, wherein the plurality
of different probe frequencies comprises a plurality of predefined probe frequencies,
or wherein the plurality of different probe frequencies relates to a white noise signal
(and/or the frequencies present in a white noise signal). Preferably, each of the
probe frequencies is lower than the drive frequency
fd.
[0014] An output signal (also referred to herein as a response signal) of the nonlinear
device and/or system is captured, and a frequency spectrum, particularly a frequency
sideband spectrum, of the output signal is determined (particularly calculated) based
on the captured output signal. In particular, the output signal of the nonlinear device
and/or system is analyzed in real-time by means of a fast Fourier transformation (FFT),
i.e., by applying a FFT to the output signal, thereby obtaining a frequency spectrum
of the output signal. For example, in case that the nonlinear device and/or system
is a membrane resonator, the output signal may be detected by means of detection contacts
or electrodes of the membrane resonator.
[0015] Based on the frequency spectrum of the output signal, an antiresonance frequency
far is determined. The antiresonance frequency
far is a frequency at which an intensity of a corresponding sideband of the output signal
is suppressed so that the intensity of said sideband of the output signal causes a
minimum in the sideband frequency spectrum.
[0016] According to one alternative, the additional probe signal comprises or particularly
is a multi-tone signal having a plurality of different probe frequencies. Within the
present disclosure, a multi-tone signal is particularly a well-defined signal, i.e.,
a signal that can be defined by a mathematical function. Accordingly, a multi-tone
signal in the sense of the present invention differs from a noise signal. In particular,
the multi-tone signal is periodic, i.e., the additional probe signal particularly
comprises or is a periodic multi-tone signal. Preferably, but not necessarily, the
multi-tone signal has equal amplitudes, i.e., the amplitude of each tone of the probe
signal is equal. Preferably, each tone of the multi-tone signal has a distinct frequency
which differs from another tone of the multi-tone signal. In particular, the probe
signal comprises a basic probe frequency and at least one further probe frequency
being a multiple of the basic probe frequency. In particular, the probe signal comprises
a plurality of further probe frequencies, each being a multiple of the basic probe
frequency. Preferably, but not necessarily, the frequency spacing of the multi-tone
signal is equal, i.e., the differences between any two subsequent probe frequencies
of the multi-tone signal may be equal.
[0017] For example, the probe signal may comprise or be a non-sinusoidal wave function having
multiple frequencies with a frequency bandwidth (BD) that is smaller than the drive
frequency
fd. In particular, the frequency of the non-sinusoidal wave function may range from
zero to BD. In other words, any frequency
fnon-sinusoidal of the non-sinusoidal wave function may in particular be between zero and the drive
frequency, i.e. 0 <
fnon-sinusoidal <
fd. It is noted that any non-sinusoidal wave function can be written as a superposition
of sinusoidal probe tones or multi-tones. For example, the non-sinusoidal wave function
may be a pulse-train. In particular, the probe signal may be a series of pulses of
relatively short duration t
1, which are repeated after a longer cycle time t
2 (for example, a cycle time of t
2 = 500*t
1). In this case, the probe signal contains both low frequency and high frequency components.
In particular, a filter may be added to reduce the amplitude of high frequency components.
[0018] In addition or alternatively, the probe signal comprises or particularly is white
noise having a frequency bandwidth (BD) that is smaller than the drive frequency.
In particular, the frequency of the white noise probe signal ranges from zero to BD.
In other words, any frequency
fwhite noise of the white noise is in particular between zero and the drive frequency, i.e. 0
<
fwhite noise <
fd. Contrary to a multi-tone signal which is a well-defined or definable signal, white
noise relates to a random signal.
[0019] By the present invention, the antiresonance frequency and thus the noise squeezing
of a nonlinear device and/or system can be determined fast and easy without the need
of subsequently scanning a broad range of probe frequencies. Thus, by the present
invention, a disturbance of the nonlinear device and/or system due to complex and
time intensive measurements can be avoided. Moreover, contrary to conventional methods,
the present invention enables monitoring noise squeezing effects of a nonlinear device
and/or system in real-time.
[0020] Particularly due to the special design of the additional probe signal according to
the present invention, it is sufficient that the steps of capturing an output signal
of the nonlinear device and/or system and determining a frequency spectrum of the
output signal are performed only once for monitoring noise squeezing effects at a
distinct time. The measurement time of anti-resonance shaped sidebands can therefore
be drastically reduced. In particular, contrary to existing methods such as described
in publication [3], the frequency spectrum obtained by the method according to the
present invention, from which the antiresonance frequency is determined, is not obtained
by overlaying individual frequency spectra as disclosed in publication [3]. In particular,
contrary to the method described in publication [3], the frequency spectrum of the
output signal, from which the antiresonance frequency is determined, is obtained by
applying only one and the same additional probe signal (particularly a pulse thereof).
In other words, the additional probe signal is not changed (particularly not swept)
for determining the antiresonance frequency. In particular, contrary to what is described
in publication [3], namely that the anti-resonance shaped sidebands are obtained by
a time intensive integration of a plurality (e.g. hundreds) of frequency spectra,
the present invention enables to obtain the anti-resonance shaped sidebands in short
time (for instance < 0.1 s), thus making a real-time monitoring of the noise squeezing
possible. Advantageously, according to the present invention, no time-consuming sweeping
and/or overlaying of individual frequency spectra is necessary.
[0021] In particular, by monitoring the antiresonance frequency, the squeezing parameter
of a nonlinear device and/or system can directly be acquired, i.e. in real-time. Further,
by adjusting the excitation level or/and detuning frequency, the squeezing can be
optimized. For example, real-time monitoring of squeezing effects of resonators working
in the nonlinear state improves detector performance in the following aspects: low
noise, high sensitivity and stability enhancement, as well as real-time characterization.
[0022] In a preferred embodiment, the multi-tone signal
Smulti is defined as follows:

wherein
Vk denotes amplitudes,
t denotes the time,
ϕk denotes arbitrary phases, and wherein
n is an integer with
n ≥ 2. Preferably,
ω1 is below 100·2π Hz, more preferably below 50·2π Hz, and particularly about 10·2π
Hz. Alternatively, one or more of the individual sub-tones present in equation 2 may
be missing. For example, a multi-tone signal with sub-sequential tones 1
ω1, 2
ω1, 4
ω1, 5
ω1, 6
ω1, 7
ω1, and 8
ω1 is also possible. Thus, as an alternative to equation 2, the multi-tone signal
Smulti may be defined as follows:

wherein m is an integer with
m ≥ 3, wherein
ak is equal to 1 for at least two different values of
k, and wherein
ak is equal to 0 for at least one another value of
k (i.e., for at least one further different value of k). For example, according to
the above-mentioned exemplary multi-tone signal, where the third subtone is missing,
the parameters are as follows:
m = 8,
a1 =
a2 =
a4 =
a5 =
a6 =
a7 =
a8 = 1, and
a3 = 0 . It is to be understood that instead of or in addition to the third subtone
also one or more other subtones may be missing in the multi-tone signal according
to equation 3. Preferably, but not necessarily, the amplitudes
Vk are equal for each
k, i.e.,
Vk may correspond to a constant probe signal amplitude
Vp for each
k.
[0023] In particular, the multi-tone signal S
multi may be written as follows:

or

[0024] As a non-limiting example,
n and/or
m may be equal to 10, 20, or 100. However, it is noted that the value of
n and/or
m may be determined based on parameters of the nonlinear device and/or system (e.g.
based on the damping or the quality factor of the nonlinear device and/or system).
In particular,
n may be chosen so that the frequency of the highest subtone is equal to or below 10%
of the drive frequency f
d, i.e.
nω
1 ≤ 0,1 · 2
πfd. Similarly, m may particularly be chosen so that the frequency of the highest subtone
is equal to or below 10% of the drive frequency f
d, i.e.
mω1 ≤ 0,1 · 2
πfd.
[0025] In a further preferred embodiment, the frequency bandwidth BD of the non-sinusoidal
wave function and/or the frequency bandwidth BD of the white noise is below 0.1 of
the drive frequency f
d, preferably below 0.05 of the drive frequency f
d, and more preferably equal to or below 0.02 of the drive frequency f
d. Preferably, the frequency of the non-sinusoidal wave function and/or the frequency
bandwidth BD of the white noise probe signal ranges from zero to 0.1 of the drive
frequency
fd (i.e. 0 <
fwhite noise < 0.1
fd), more preferably from zero to 0.05 of the drive frequency f
d (i.e. 0 <
fwhite noise < 0.05
fd), and most preferably from zero to 0.02 of the drive frequency
fd (i.e. 0 <
fwhite noise ≤ 0.02
fd). Noise around the drive frequency can stimulate additional sidebands. These additional
sidebands may be overlaid with the sidebands excited by low-frequency noise, and thus
the antiresonance dip might be submerged or hidden. Within the present invention,
it has been found that the above-mentioned ranges for the frequency bandwidth BD can
lead to a suppression or prevention of further noise introduced to the working or
drive frequency range. In particular, a low bandwidth noise merely modulates the eigen-frequency
(far away from the working frequency) without noise contamination. This makes it possible
to reduce noise of the nonlinear device and/or system in a very effective manner.
[0026] In a further preferred embodiment, the additional probe signal, which is applied
to the input of the nonlinear device and/or system, is not changed for determining
the antiresonance frequency (and particularly for determining the squeezing factor).
In particular, the antiresonance frequency is determined based on only one frequency
spectrum. In particular, the frequency spectrum, from which the antiresonance frequency
is determined, is directly obtained from the detected output signal. The expression
"directly obtained" shall mean in this context that the frequency spectrum, from which
the antiresonance frequency is determined, is not a composed or overlaid frequency
spectrum, i.e. a frequency spectrum that is a composition of several individual frequency
spectra. In addition or alternatively, the expression "directly obtained" shall mean
in this context that the frequency spectrum of the output signal, from which the antiresonance
frequency is determined, is obtained by applying one and the same additional probe
signal, i.e. without changing (particularly without sweeping) the additional probe
signal. By directly obtaining the frequency spectrum, based on which the antiresonance
frequency is determined, from the output signal, a fast monitoring of noise squeezing
effects is possible.
[0027] In a further preferred embodiment, the antiresonance frequency
far is determined by using a fast-fitting process, for example a combination of a real-time
Fourier transformation with error minimalization. Preferably, by means of the fast-fitting
process, an envelope of anti-resonance sidebands present in the frequency spectrum
of the output signal is found and/or determined. More preferably, an envelope of anti-resonance
sidebands present in the frequency spectrum of the output signal is found and/or determined
in a frequency region that is defined by (1 ± 0.02)
fd.
[0028] In a further preferred embodiment, the steps of capturing an output signal of the
nonlinear device and/or system, determining a frequency spectrum of the output signal,
and determining an antiresonance frequency
far, are repeated, in the given order, continuously and/or based on (i.e. by or in response
to) a request. For example, the steps mentioned above may be repeated after a predefined
repetition time in order to continuously monitor the noise squeezing of the nonlinear
device and/or system. In addition or alternatively, the steps mentioned above may
be repeated on demand.
[0029] In a further preferred embodiment, the method further comprises the step of determining
a squeezing factor of the nonlinear device and/or system based on the determined antiresonance
frequency
far. In particular, the squeezing factor
φ is determined by means of equation 1 provided above.
[0030] In a further preferred embodiment, the method serves for reducing noise of the nonlinear
device and/or system in real-time and further comprises the step of adjusting the
drive signal, particularly the drive frequency
fd and/or a drive power of the drive signal, applied to the input of the nonlinear device
and/or system based on the determined antiresonance frequency, particularly based
on the determined squeezing factor
φ. In particular, the drive frequency
fd and/or the drive power of the drive signal may be changed and/or adjusted such that
the squeezing factor and thus the noise squeezing effects increase. Thereby, a reduction
of noise, particularly a reduction of the in-phase noise (i.e. the noise of an in-phase
signal), of a nonlinear device and/or system is possible in real-time. Further, the
signal-to-noise ratio of a nonlinear device and/or system can be enhanced in real-time.
In particular, the sensitivity and/or performance of a nonlinear device and/or system
can be improved in real-time.
[0031] Preferably, the steps of capturing an output signal of the nonlinear device and/or
system, determining a frequency spectrum of the output signal, determining an antiresonance
frequency and/or determining a squeezing factor, and adjusting the drive signal based
on the determined antiresonance frequency and/or the determined squeezing factor are
repeated, in the given order, continuously and/or based on (i.e. by or in response
to) a request.
[0032] According to a further aspect of the present invention, a real-time monitoring system
for real-time monitoring noise squeezing effects of a nonlinear device and/or system
is provided. The real-time monitoring system comprises:
- a drive signal source configured to apply a drive signal Sd having a drive frequency fd to an input of the nonlinear device and/or system for driving the nonlinear device
and/or system in a nonlinear state;
- a probe signal source configured to apply an additional probe signal Sp to the input of the nonlinear device and/or system;
- a signal capturing unit for capturing an output signal Sout of the nonlinear device and/or system;
- a frequency spectrum determination unit being coupled with the signal capturing unit
and configured to determine, based on the captured output signal Sout, a frequency spectrum of the output signal Sout;
- an antiresonance frequency determination unit being configured to determine, based
on the frequency spectrum of the output signal Sout, an antiresonance frequency far, the antiresonance frequency far being a measure for the noise squeezing effects of the nonlinear device and/or system;
wherein:
the additional probe signal Sp comprises a multi-tone signal having a plurality of different probe frequencies,
and/or
the additional probe signal Sp comprises white noise having a frequency bandwidth that is smaller than the drive
frequency fd.
[0033] In particular, the real-time monitoring system is configured to real-time monitor
a squeezing factor. In particular, the real-time monitoring system may further comprise
the nonlinear device and/or system.
[0034] The frequency spectrum determination unit and/or the antiresonance frequency determination
unit may comprise or be a computer and/or processor. In particular, the frequency
spectrum determination unit may comprise or be a spectrum analyzer. In particular,
the frequency spectrum determination unit may be based on performing a fast Fourier
transformation (FFT). In this case, the frequency spectrum determination unit may
also be referred to as FFT-unit.
[0035] That two or more units are "coupled" particularly means in the context of the present
invention that these units are able to exchange information. The coupling may be done
by a physical connection, i.e., the term "coupled" particularly encompasses the term
"connected". In addition or alternatively, the coupling may be done by means of a
wireless technique. In the latter case, each of the coupled units comprises wireless
communication means.
[0036] In a preferred embodiment, the real-time monitoring system further comprises a calculation
unit being coupled with the antiresonance frequency determination unit and configured
to determine a squeezing factor of the nonlinear device and/or system based on the
determined antiresonance frequency
far. The calculation unit may comprise or be a computer and/or processor.
[0037] In a further preferred embodiment, the real-time monitoring system comprises a signal
acquisition unit being coupled with the signal capturing unit and configured to acquire,
based on the captured output signal, an in-phase signal of the nonlinear device and/or
system. The signal acquisition unit may comprise or be a computer and/or processor.
[0038] In a further preferred embodiment, the real-time monitoring system comprises an in-phase
signal processing unit being coupled with the signal acquisition unit and configured
to process and/or analyze the in-phase signal of the nonlinear device and/or system.
The in-phase signal processing unit may comprise or be a computer and/or processor.
[0039] In a further preferred embodiment, the real-time monitoring system comprises a feedback
unit being coupled with the drive signal unit and configured to adjust, based on the
determined antiresonance frequency (particularly based on the determined squeezing
factor), the drive signal applied to the input of the nonlinear device and/or system.
The feedback unit may comprise or be a computer and/or processor. Preferably, a controlling
unit controls the feedback unit. The feedback unit may be coupled and/or connected,
particularly via the controlling unit, to the antiresonance frequency determination
unit and/or the calculation unit.
[0040] In a further preferred embodiment, the real-time monitoring system comprises a command
unit for requesting the determination of the antiresonance frequency, particularly
the determination of the squeezing factor. The controlling unit preferably controls
the command unit. The command unit may be coupled and/or connected, particularly via
the controlling unit, to the antiresonance frequency determination unit and/or the
calculation unit.
[0041] In particular, the real-time monitoring system comprises a controlling unit configured
to control a feedback unit and/or a command unit based on the determined antiresonance
frequency and/or based on the determined squeezing factor. In particular, the controlling
unit comprises or is a computer and/or a processor.
[0042] For the above mentioned further independent aspect and in particular for preferred
embodiments in this regard, the explanations given above or below concerning the embodiments
of the first aspect also hold true. In particular, for one independent aspect of the
present invention and for preferred embodiments in this regard, the explanations given
above and below concerning the embodiments of the respective other aspects also hold
true.
[0043] Individual embodiments for solving the problem are described by way of example below
with reference to the figures. In this case, the individual embodiments described
have in part features which are not absolutely necessary for implementing the claimed
subject matter, but which provide desired properties in specific applications. In
this regard embodiments which do not have all the features of the embodiments described
below are also intended to be regarded as disclosed in a manner coming under the technical
teaching described. Furthermore, in order to avoid unnecessary repetitions, specific
features are mentioned only with regard to individual embodiments from among the embodiments
described below. It is pointed out that the individual embodiments are therefore intended
to be considered not only by themselves but also in a joint consideration. On the
basis of this joint consideration the person skilled in the art will recognize that
individual embodiments can also be modified by inclusion of individual or a plurality
of features of other embodiments. It is pointed out that a systematic combination
of the individual embodiments with individual or a plurality of features described
with regard to other embodiments may be desirable and expedient and is therefore intended
to be taken into account and also to be regarded as encompassed by the description.
Brief description of the figures
[0044] The above and other objects, features and advantages of the present invention will
become more apparent upon reading of the following description of preferred embodiments
and accompanying drawings. Other features and advantages of the subject-matter described
herein will be apparent from the description and the drawings and from the claims.
It should be understood that even though embodiments are separately described, single
features and functionalities thereof may be combined without prejudice to additional
embodiments. The present disclosure is illustrated by way of example and not limited
by the accompanying figures.
[0045] Preferred embodiments of the present invention are exemplarily described regarding
the following figures:
- Fig. 1
- shows a schematic representation illustrating the principle of noise squeezing in
nonlinear systems;
- Fig. 2
- shows a schematic representation of a prior art membrane resonator as an example for
a nonlinear device, and a detection scheme for determining an antiresonance frequency;
- Fig. 3a
- shows a measured power spectrum of a two-tone experiment according to the prior art;
- Fig. 3b
- shows overlaid power spectra obtained from a plurality of two-tone experiments according
to the prior art;
- Fig. 4
- shows a schematic representation illustrating the principle of a preferred embodiment
of the method according to the present invention;
- Fig. 5
- shows a schematic representation for illustrating a preferred embodiment of a system
for real-time monitoring the squeezing effects of a nonlinear device and/or system
according to the present invention.
Detailed description of the figures
[0046] The following detailed description particularly relates to exemplary embodiments
of the present invention. Other embodiments of the invention are possible within the
scope of the invention as defined by the appended claims. Throughout the figures,
same reference signs are used for the same or similar elements.
[0047] Micro- and nanomechanical oscillators and resonators in the nonlinear regime, which
have been shown to be ultra-sensitive for charge, force and mass measurements, show
noise squeezing effects. By exploiting these noise squeezing effects, it is possible
to circumvent limitations due to environmental fluctuations such as thermal noise
or molecular motion.
Fig. 1 shows a corresponding schematic representation illustrating the principle of noise
squeezing in nonlinear systems such as oscillators and resonators. As can be seen
from Fig. 1, squeezing effects are characterized in that the fluctuation of one quadrature
is reduced at the expense of that in its conjugate.
[0048] If the signal detection and measurement is performed in the in-phase direction, the
noise can be compressed and the signal to noise ratio can be enhanced. As already
mentioned above, a homodyne measurement of the noise, as it is conventionally used,
is difficult because it requires a complicated characterization and an extremely stable
environment. Moreover, it is very time consuming.
[0049] The squeezing effect in the quadrature is usually very subtle and requires sensitive
measurements and careful analysis to enable its detection, particularly in systems
of high quality-factors. As already mentioned above, publication [3] describes a sideband
response of a nonlinear vibrating membrane resonator using a two-tone measurement.
[0050] Fig. 2 shows a schematic representation of the nonlinear vibrating membrane resonator 1
as disclosed in publication [3] (see FIG. 1 therein). The nonlinear device 1 is composed
of a ~ 500 nm thick silicon nitride (Si-N) membrane suspended on a massive silicon
frame attached to a piezo ring. The vibration of the freestanding membrane is excited
by applying a drive signal
Sd =
Vexc sin(2
π fdt) onto the piezo ring (i.e. an input 3 of the nonlinear device 1) at a drive frequency
f
d close to the eigenfrequency
f0 of the membrane resonator 1. By means of detection contacts 4 (particularly detection
pads 4), which are electrically connected with one or more detection leads arranged
on the membrane resonator 1, an output signal
Sout of the nonlinear device 1 being a measure of the vibrations is detected. In the present
example, the output signal
Sout is an inductive voltage
Vout across the structures which is measured at an output 5 of the nonlinear device 1
under an external uniform magnetic field B. As illustrated in Fig. 2, the output voltage
Vout and thus the output signal
Sout may be measured by a measuring device 8, for example by using a lock-in amplifier
(Lock-in) and/or an oscilloscope (OSC) and/or a spectrum analyzer (SA). Further, a
pre-amplifier 7 may be used. In addition to the drive tone, that resonantly excites
the system, also an additional probe tone
Vp sin(2
π fpt) with a very low frequency (
fp<1 kHz) is applied to the input 3 of the nonlinear device 1. It was found that that
this probe tone modulates the eigenfrequency of the nonlinear device 1 and leads to
a sideband response markedly different from previous studies. The application of a
single drive tone and an additional single probe tone is referred to herein as "two-tone
experiment".
[0051] If in such a two-tone experiment the nonlinear output signal is observed in the frequency
domain, the noise squeezing effects appear as two sidebands, as it is indicated by
the two arrows in
Fig. 3a showing a measured power spectrum (power P in dependence of frequency f). In the
two-tone experiment shown in Fig. 3a, the following parameters were used:
fd = 251 kHz,
Vexc = 0.5 V,
fp = 380 Hz, and
Vp = 0.5 V. If the probe tone is changed or swept from 10 to 1000 Hz with a step size
of 10 Hz under a fixed drive tone, and the respective sideband responses are plotted,
this results in an overlaid power spectrum as shown in
Fig. 3b. The overlaid power spectrum of Fig. 3b is obtained from a plurality of two-tone experiments
described above, wherein for each two-tone experiment a different probe tone (i.e.
a different probe frequency) was used.
[0052] The power P reaches a maximum at a peak frequency
fpk = ± 380 Hz and starts to decrease if the probe frequency
fp further increases. More importantly, there is a prominent silent region where the
sideband signals are strongly suppressed below a noise floor. In publication [3],
it is shown that the two-tone experiments performed on nonlinear devices and/or systems
show a typical antiresonance response in the frequency domain. In particular, there
exists a minimum point M in the silent region, wherein this minimum point M refers
to an antiresonance frequency
far and a corresponding antiresonance amplitude or power
Par.
[0053] In particular, the overlaid power spectrum of Fig. 3b was obtained with a sweeping
probe frequency
fp increasing from 10 to 1000 Hz in steps of 10 Hz and V
p = 0.5 V under a given drive signal with
Vexc = 0.5 V and f
d = 251 kHz. The dashed line in Fig. 3b shows a parameter free sideband calculation.
The coordinate
M(
far,
Par) marks the calculated minimum point of the silent region. It is noted that the overlaid
power spectrum of Fig. 3b is a black-and-white version of color FIG. 2 (a) disclosed
in publication [3]. The color coding shown in FIG. 2 (a) of publication [3], which
cannot be seen in the black-and-white version of Fig. 3b, indicates different probe
frequencies f
p.
[0054] Thus, in view of the above, if a nonlinear device and/or system is parametrically
modulated, the sidebands will have anti-resonance behavior, and the antiresonance
frequency (M point) can be used to characterize the squeezing effects (particularly
a squeezing factor).
[0055] In particular, the present invention is based on the antiresonance sidebands formed
by modulating the nonlinear device and/or system with low-frequency signals. As mentioned
before, if the eigenfrequency of a nonlinear device and/or system is modulated at
a low frequency (for instance
fp < 1 kHz), the sidebands have anti-resonance behavior in the frequency spectrum. At
the antiresonance frequency the intensity of the modulated sideband is severely suppressed.
And the antiresonance frequency can be used to calculate the squeezing of noise in
the system, for example by the direct relationship between the antiresonance frequency
and the squeezing factor
Φ, see equation 1 above. The calculation from antiresonance frequency to squeezing
factor is quite simple and the determination of the antiresonance frequency can be
based on the frequency spectrum instead of sophisticated phase space characterization.
[0056] In particular, within the present invention, it was found that if the injected low-frequency
probe signal is designed different compared to the probe signal disclosed in publication
[3], one can obtain the anti-resonance shaped sidebands in short time (for instance
< 0.1 s) and make a real-time monitoring on the noise squeezing possible.
[0057] Fig. 4 shows a schematic representation which serves to illustrate the principle of a preferred
embodiment of the method according to the present invention. As shown in Fig. 4, instead
of using a single-tone signal as suggested by publication [3], a multi-tone signal
with a plurality of tones and/or frequencies is used as probe signal
Sp. This is indicated by the plurality of arrows marked with
ωp on the bottom left side of Fig. 4. The multi-tone probe signal
Sp may be defined by equation 2 or 3 provided above. Accordingly, the probe signal
Sp may comprise a plurality of probe frequencies
fp, particularly with equal amplitudes. The drive signal may be defined as in publication
[3], i.e. by
Sd = Vexc sin(2
π fdt) with an excitation voltage
Vexc and a drive frequency
fd. As illustrated in Fig. 4, the probe frequencies
ωp = 2
nfp are low frequencies, i.e. smaller than the drive frequency
fd. For example, a basic frequency
f1 of the probe signal may be below 100 Hz, more preferably below 50 Hz, and particularly
equal to about 10 Hz, while the drive frequency
fd may be equal to about 251 kHz. It is to be understood that the above values merely
serve as an example and that any other values, particularly for the drive frequency,
are possible. Any other frequencies of the multi-tone probe signal
Sp, which are multiples of the probe signal's basic frequency
f1, are below the drive frequency
fd, preferably below 10% of the drive frequency
fd, and more preferably below 5% of the drive frequency
fd.
[0058] Since the power density of the modulated signal decreases dramatically around the
antiresonance dip as shown in Fig. 3b, the antiresonance dip can be determined even
if the amplitude of the individual probe tones or multi-tones is not constant. For
example, when the amplitudes of the probe tones differ within 6 dB, the frequency
spectrum of the modulated signal will be slightly distorted compared with Fig. 3b.
Hence, the distortions are within 6 dB, which will result in a small uncertainty of
the antiresonance. If the amplitude of probe tones varies monotonically, the inaccuracy
is even smaller. In addition, because of the linear relationship between probe tones
and modulated signal, it is easy to perform a post analysis on the modulated signal
by multiplying or dividing with a factor or function to normalize the modulated signal.
[0059] Alternatively or in addition to a multi-tone signal, the probe signal S
p may comprise or be white noise. In this case, it turned out within the present invention
that real-time monitoring of noise squeezing is possible, if the white noise signal
has a frequency bandwidth BW that is smaller than the drive frequency
fd. Preferably, any frequency of the white noise probe signal is smaller than the drive
frequency
fd, wherein the frequencies of the white noise probe signal range from zero to BW. Preferably,
the frequency bandwidth BW of the white noise probe signal is below 0.1 of the drive
frequency
fd, more preferably below 0.05 of the drive frequency
fd, and most preferably equal to or below 0.02 of the drive frequency
fd.
[0060] By capturing the response signal
Sout of the nonlinear device and/or system (not explicitly shown in Fig. 4) and applying
a fast Fourier transformation to the captured response signal (which is fast enough
for a real-time scenario), the frequency spectrum of the response or output signal
is obtained. Due to the probe signal comprising a multi-tone signal and/or white noise
(having a limited frequency bandwidth), as described above, the obtained frequency
spectrum comprises, besides a pronounced amplitude at the drive frequency
fd, a plurality of sidebands showing an antiresonance behavior. Based on the obtained
frequency spectrum, the antiresonance frequency being a measure for the noise squeezing
effects can be determined, particularly by using a fast-fitting process. Thus, by
using a probe signal as proposed by the present invention, there is no need any more
for a complex and time-consuming integration over a plurality of individual frequency
spectra which are obtained, step by step, by sweeping the probe frequency, as described
in publication [3]. In particular, by using a probe signal as proposed by the present
invention, a real-time monitoring of the squeezing effects in a nonlinear device and/or
system is possible.
[0061] For example, a preferred embodiment about how to fast locate the antiresonance frequency
comprises the following steps:
- (1) Drive the system oscillating in a nonlinear state, at a working frequency of fd;
- (2) Simultaneously send additional signal Sp with low-frequencies, the low frequency signal Sp can in particular be periodic or noise, e.g.,
- (i)

wherein ω1 ~ 10×2π Hz, and phase of each frequency can be random, as sketched in Fig. 4, or
- (ii) low-frequency white noise, with a frequency range of 0 - BW, and with a bandwidth
BW of ~ 0.02 fd;
- (3) Send response signal to a processor for FFT analysis; Find the envelope of anti-resonance
sideband (in the region between the dashed vertical line of Fig. 4, (1±0.02)ωd), extract the antiresonance frequency ωar by fast fitting process;
- (4) Then, the squeezing factor φ can be calculated by equation 1 provided above.
[0062] Fig. 5 shows a schematic representation for illustrating a preferred embodiment of a real-time
monitoring system 100 for real-time monitoring squeezing effects of a nonlinear device
and/or system according to the present invention. The real-time monitoring system
100 comprises a drive signal source 10 configured to apply a drive signal
Sd having a drive frequency
fd to an input of the nonlinear device and/or system 1 for driving the nonlinear device
and/or system 1 in a nonlinear state. Further, the monitoring system 100 comprises
a probe signal source 20 configured to apply an additional probe signal
Sp to the input of the nonlinear device and/or system 1. Further, the monitoring system
100 comprises a signal capturing unit 30 for capturing an output signal
Sout of the nonlinear device and/or system 1. Further, the monitoring system 100 comprises
a frequency spectrum determination unit 40 being coupled with the signal capturing
unit 30 and configured to determine, based on the captured output signal
Sout, a frequency spectrum of the output signal
Sout. For example, the frequency spectrum determination unit 40 may comprise a spectrum
analyzer. Further, the monitoring system 100 comprises an antiresonance frequency
determination unit 50 being configured to determine, based on the frequency spectrum
of the output signal
Sout , an antiresonance frequency
far, the antiresonance frequency
far being a measure for the noise squeezing effects of the nonlinear device and/or system
1. Further, the monitoring system 100 comprises a calculation unit 60 being coupled
with the antiresonance frequency determination unit 50 and configured to determine
a squeezing factor of the nonlinear device and/or system 1 based on the determined
antiresonance frequency
far. Further, the monitoring system 100 comprises a signal acquisition unit 32 being coupled
with the signal capturing unit 30 and configured to acquire, based on the captured
output signal
Sout, an in-phase signal of the nonlinear device and/or system 1. Further, the monitoring
system 100 comprises an in-phase signal processing unit 34 being coupled with the
signal acquisition unit 32 and configured to process and/or analyze the in-phase signal
of the nonlinear device and/or system 1. Further, the monitoring system 100 comprises
a feedback unit 80 being coupled with the drive signal unit 10 and configured to adjust,
based on the determined antiresonance frequency
far, the drive signal S
d applied to the input 3 of the nonlinear device and/or system 1. Further, the monitoring
system 100 comprises a command unit 90 for requesting the determination of the antiresonance
frequency
far. The feedback unit 80 and the command unit 90 are controlled by a controlling unit
70, wherein the controlling unit 70 comprises or is a computer and/or a processor.
[0063] Thus, in the embodiment illustrated in Fig. 5, the signal used for further data processing
or detection is the in-phase signal of the vibration of a nonlinear device and/or
system 1. The present invention enables to reduce the noise floor of the in-phase
signal and thus to improve the resolution or sensitivity of the nonlinear device and/or
system 1. To achieve this goal, the nonlinear device and/or system 1 is driven by
a drive signal into a nonlinear state. The nonlinear device and/or system 1, for example,
can be a NEMS/MEMS gyroscope, mass detector, Inertial sensor, accelerator. and so
on and can provide the working state (working frequency, damping and so on) of resonators
(or sensors). In particular, the drive signal drives the nonlinear device and/or system
1 to stay on-resonance or around on-resonance (and provide a squeezing state for enhancing
the signal).
[0064] When the nonlinear device and/or system 1 needs to be optimized to have the lowest
noise floor, a pulse of test or probe signal is sent into the system in addition to
the drive signal. For example, the types of the test or probe signal can be low-frequency
multi-tones (particularly with equal amplitudes) or low-frequency white noise with
small bandwidth or any other non-sinusoidal wave function having multiple low frequencies
and a small bandwidth (particularly a wave function which does not represent just
a single tone or harmonics). It can be either continuously send the device and/or
system 1 or can be performed while requested by a command of requesting the squeezing
factor from a processor.
[0065] In particular, the frequency of the test signal is lower than that of drive signal,
for instance, only 1% of the drive frequency. Then, the vibration of the nonlinear
system is captured by a read-out method, for example by a capacitance detection, electromagnetic
induction, optical interferometry, etc., and converted into an electrical signal.
The captured electrical signal is further processed by applying a real-time FFT to
the electrical signal around the working frequency after the control unit 70 and/or
the command unit 90 requests the squeezing factor. The real-time FFT can be done,
for example, by a field programmable gate array (FPGA) or any other suitable logical
circuit.
[0066] The signal capture and FFT can be done, for example, continuously or time to time
on demand. Subsequent to the real-time FFT, the anti-resonance sideband shape can
be obtained, and the antiresonance frequency can be read out. Optionally, the squeezing
factor can be calculated by the control unit 70 in real-time (providing the information
of how the noise has been suppressed by squeezing effects), and the control unit 70
determines, if the working status of the nonlinear device and/or system 1 needs to
be adjusted as well as how it feeds back to the nonlinear device and/or system 1.
This feedback technique itself is well known to the skilled person and thus not further
described within the present invention. In particular, as it is known from publication
[3], by adjusting the drive power and/or drive frequency (detuning), the squeezing
and the antiresonance effect can be controlled (see FIG. 3 and the corresponding description
in publication [3]).
[0067] Optionally, the antiresonance frequency can also be used directly to determine if
the current working status has the lowest noise floor. For example, the on-resonance
states provide the best squeezing state for enhancing the signal in some nonlinear
system and the antiresonance frequency of the on-resonance states is close to zero.
Therefore, the processor (e.g. the control unit 70) can compare the obtained antiresonance
frequency with zero and then determine how to feed back to the nonlinear system 1.
[0068] Since it is unnecessary to integrate the captured signal, the frequency of the request
and feedback can be relatively high by using the present invention, especially for
a nonlinear system with high working frequency and/or high Q-factor. For example,
if the working frequency of a nonlinear system is at 200 MHz and the Q-factor is 10
5, the test signal can be multi-tones with a basic frequency of 100 Hz, and the frequency
of a squeezing request can be as high as the basic frequency of the multi-tones. For
example, the multi-tones may have frequencies of 100 Hz, 150 Hz, 200 Hz, etc. Then,
the frequency of the squeezing request can be as high as 100 Hz.
[0069] After lowering the noise floor of the nonlinear device and/or system 1 by reading
the antiresonance frequency, the in-phase signal of the working mass (that is the
noise suppressed signal) can be extracted, and a good quality of the output signal
with suppressed noise can be achieved. It is noted that the extraction of the in-phase
signal can be done either before or after the real-time FFT.
[0070] In particular, by the present invention, a real-time monitoring of squeezing effects
of nonlinear oscillators or resonators working in a wide range of conditions can be
achieved. The invention avoids the harsh requirements of phase-space. Rather, it only
needs easy post analysis and thus makes the dynamic feedback of the squeezing factor
easier. In particular, the present invention provides a method and system for monitoring
the noise squeezing factor of nonlinear resonators in real-time and thus reducing
the noise of resonators. More particularly, it provides a method and system for real-time
monitoring the intensity of in-phase noise of nonlinear resonators and feeding back
to the drive source to adjust the working conditions of resonators, for example drive
frequency and power level. More particularly, it provides a method and system for
real-time monitoring the in-phase noise by measuring the antiresonance frequency in
the real-time frequency spectrum obtained by frequency modulation of low-frequency
signals. For example, the present invention enables the realization of noise squeezed
nonlinear resonators, for instance NEMS/MEMS resonating detectors. In applications,
the present invention enables, for example, an improved detection and/or signal transmission.
Thus, the present invention particularly enables real-time monitoring of squeezing
effects of resonators working in the nonlinear state to improve detector performance:
suppressing noise, enhancing sensitivity and stability, fast response, robust applicational
scenarios (e.g. large signal-to-noise-ratio), large operational frequency range, and/or
real time characterization.
List of Reference Numerals
[0071]
- 1
- nonlinear device and/or system
- 3
- input of the nonlinear device and/or system
- 4
- detection contact / detection pad
- 5
- output of the nonlinear device and/or system
- 7
- pre-amplifier
- 8
- measuring device (spectrum analyzer / oscilloscope / lock-in amplifier)
- 10
- drive signal source
- 20
- probe signal source
- 30
- signal capturing unit
- 32
- signal acquisition unit
- 34
- in-phase signal processing unit
- 40
- frequency spectrum determination unit
- 50
- antiresonance frequency determination unit
- 60
- calculation unit
- 70
- controlling unit
- 80
- feedback unit
- 90
- command unit
- 100
- real-time monitoring system