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(11)

EP 4 392 828 A1

(12)

(43) Date of publication: 03.07.2024 Bulletin 2024/27 (21) Application number: 22754352.7 (22) Date of filing: 19.07.2022

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) B25J 15/06(2006.01) H01L 21/687(2006.01) (52) Cooperative Patent Classification (CPC): G03F 7/70691; H01L 21/68707; G03F 7/7075; G03F 7/70341; H01L 21/6838; H01L 21/68742; H01L 21/67748 (86) International application number: PCT/EP2022/070146 (87) International publication number: WO 2023/025468 (02.03.2023 Gazette 2023/09)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 24.08.2021 EP 21192931 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventor: VAN DONGEN, Paul 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)