(19)

(11)

EP 4 393 009 A1

(12)

(43) Date of publication: 03.07.2024 Bulletin 2024/27 (21) Application number: 22769536.8 (22) Date of filing: 26.08.2022

(51) International Patent Classification (IPC):  H01L 23/482(2006.01) H01L 29/778(2006.01) H01L 29/423(2006.01) (52) Cooperative Patent Classification (CPC): H01L 23/4821; H01L 23/4824; H01L 29/7786; H01L 29/42316; H01L 29/2003 (86) International application number: PCT/US2022/075500 (87) International publication number: WO 2023/056145 (06.04.2023 Gazette 2023/14)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 01.10.2021 US 202117492032 (71) Applicant: MACOM Technology Solutions Holdings, Inc. Lowell, Massachusetts 01851 (US)	(72) Inventors: FISHER, Jeremy Raleigh, North Carolina 27614 (US) FAYED, Khaled Cedar Rapids, Iowa 52411 (US) WOOD, Simon Raleigh, North Carolina 27613 (US) (74) Representative: Yeadon IP Limited  Nexus Discovery Way Leeds LS2 3AA Leeds LS2 3AA (GB)