(19)
(11) EP 4 413 610 A1

(12)

(43) Date of publication:
14.08.2024 Bulletin 2024/33

(21) Application number: 22879010.1

(22) Date of filing: 05.10.2022
(51) International Patent Classification (IPC): 
H01J 65/04(2006.01)
H05H 1/24(2006.01)
H01J 61/02(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 65/04; H01J 61/302; H01J 61/025
(86) International application number:
PCT/RU2022/050311
(87) International publication number:
WO 2023/059228 (13.04.2023 Gazette 2023/15)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 08.10.2021 RU 2021129398
29.10.2021 US 202117514178

(71) Applicants:
  • ISTEQ B.V.
    5656 AE Eindhoven (NL)
  • ISTEQ Group Holding B.V.
    5656 AE Eindhoven (NL)

(72) Inventors:
  • ABRAMENKO, Dmitriy Borisovich
    Moscow 129128 (RU)
  • GAYASOV, Robert Rafilevich
    Moscow 108840 (RU)
  • GLUSHKOV, Denis Alexandrovich
    3434kt Nieuwegein (NL)
  • KRIVTSUN, Vladimir Mikhailovich
    Moscow 108840 (RU)
  • LASH, Aleksandr Andreevich
    Moscow 127051 (RU)

(74) Representative: Knöner, Gregor et al
Kahler Käck Mollekopf Partnerschaft von Patentanwälten mbB Vorderer Anger 239
86899 Landsberg am Lech
86899 Landsberg am Lech (DE)

   


(54) BROADBAND LASER-PUMPED PLASMA LIGHT SOURCE