(19)
(11) EP 4 423 574 A1

(12)

(43) Date of publication:
04.09.2024 Bulletin 2024/36

(21) Application number: 22813803.8

(22) Date of filing: 27.10.2022
(51) International Patent Classification (IPC): 
G03F 7/022(2006.01)
G02B 27/01(2006.01)
G03F 7/40(2006.01)
G03F 7/023(2006.01)
G03F 7/00(2006.01)
G06F 3/01(2006.01)
(52) Cooperative Patent Classification (CPC):
G03F 7/0236; G03F 7/0226; G03F 7/0035; G03F 7/40; G06F 3/013; G02B 27/0176; G02B 2027/0138; G02B 2027/0174; G02B 2027/0178; G02B 5/1847; G06F 3/011; G06F 3/012
(86) International application number:
PCT/US2022/048009
(87) International publication number:
WO 2023/076465 (04.05.2023 Gazette 2023/18)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 27.10.2021 US 202163272519 P
20.10.2022 US 202217970439

(71) Applicant: META PLATFORMS TECHNOLOGIES, LLC
Menlo Park, CA 94025 (US)

(72) Inventors:
  • DUNDAR ARISOY, Feyza
    Menlo Park, California 94025 (US)
  • KAITZ, Joshua Andrew
    Menlo Park, California 94025 (US)
  • VORA, Ankit
    Menlo Park, California 94025 (US)
  • FRANKE, Elliott
    Menlo Park, California 94025 (US)
  • ZHANG, Keren
    Menlo Park, California 94025 (US)
  • SPORRE, John
    Menlo Park, California 94025 (US)
  • ZHANG, Xu
    Menlo Park, California 94025 (US)

(74) Representative: Murgitroyd & Company 
165-169 Scotland Street
Glasgow G5 8PL
Glasgow G5 8PL (GB)

   


(54) GRAY-TONE RESISTS AND PROCESSES