(19)

(11)

EP 4 423 800 A1

(12)

(43) Date of publication: 04.09.2024 Bulletin 2024/36 (21) Application number: 22888049.8 (22) Date of filing: 25.10.2022

(51) International Patent Classification (IPC):  H01L 21/67(2006.01) H01L 21/687(2006.01) H01L 23/00(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/67184; H01L 21/67173; H01L 21/67161; H01L 21/67766; H01L 21/6836; H01L 2221/68327 (86) International application number: PCT/US2022/047702 (87) International publication number: WO 2023/076249 (04.05.2023 Gazette 2023/18)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 28.10.2021 US 202117513631 (71) Applicant: Applied Materials Inc; Santa Clara CA 95054 (US)

(72) Inventors: HARRIS, Randy, A. Kalispell, MT 59901 (US) GROVE, Coby, Scott Kalispell, MT 59901 (US) WIRTH, Paul, Zachary Kalispell, MT 59901 (US) SHANTARAM, Avinash Kalispell, MT 59901 (US) YILMAZ, Alpay Sunnyvale, CA 94085 (US) NISSAN, Amir Sunnyvale, CA 94085 (US) BHIMJIYANI, Jitendra Ratilal Santa Clara, CA 95054 (US) PINGLE, Niranjan Santa Clara, CA 95054 (US) DICAPRIO, Vincent Sunnyvale, CA 94085 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)