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EP 4 440 739 A1

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(43) Date of publication: 09.10.2024 Bulletin 2024/41 (21) Application number: 22851441.0 (22) Date of filing: 02.12.2022

(51) International Patent Classification (IPC):  B01J 20/28(2006.01) D06M 14/18(2006.01) C23C 4/00(2016.01) (52) Cooperative Patent Classification (CPC): B01J 20/3289; B01J 20/3219; B01J 20/28038; B01J 20/28007; D06M 10/025; B01J 20/321; B01J 20/3212; B01J 20/28085; B01J 20/28088; B01J 20/28023; B01J 20/286; B01J 20/3274; B05D 1/62; B05D 3/144; B05D 3/0486; D06M 10/08; D06M 14/28; D06M 15/15; D06M 2101/22; D06M 2400/01 (86) International application number: PCT/US2022/080784 (87) International publication number: WO 2023/102503 (08.06.2023 Gazette 2023/23)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 02.12.2021 US 202163285364 P 02.12.2021 US 202163285369 P 02.12.2021 US 202163285373 P (71) Applicant: DDP Specialty Electronic Materials US, LLC Wilmington, DE19805 (US)

(72) Inventors: TOMLINSON, Ian Wilmington, Delaware 19805 (US) FRISK, Simon Wilmington, Delaware 19805 (US) DEETZ, Martin Wilmington, Delaware 19803 (US) (74) Representative: Abitz & Partner  Postfach 86 01 09 81628 München 81628 München (DE)