(19)

(11)

EP 4 445 410 A1

(12)

(43) Date of publication: 16.10.2024 Bulletin 2024/42 (21) Application number: 22890935.4 (22) Date of filing: 06.12.2022

(51) International Patent Classification (IPC):  H01L 21/20(2006.01) C23C 14/34(2006.01) H01L 21/67(2006.01) H01L 21/02(2006.01) C30B 25/00(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/67207; H01L 21/67167; H01L 33/007; H01L 21/02631; H01L 21/0254; H01L 21/02521; C23C 14/0617; C23C 14/0073 (86) International application number: PCT/US2022/051978 (87) International publication number: WO 2023/081540 (11.05.2023 Gazette 2023/19)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 06.12.2021 US 202117543296 (71) Applicant: Jorgenson, Robbie Minneapolis, Minnesota 55410 (US)	(72) Inventor: Jorgenson, Robbie Minneapolis, Minnesota 55410 (US) (74) Representative: Carpmaels & Ransford LLP  One Southampton Row London WC1B 5HA London WC1B 5HA (GB)