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EP 4 449 487 A1

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(43) Date of publication: 23.10.2024 Bulletin 2024/43 (21) Application number: 22908449.6 (22) Date of filing: 15.12.2022

(51) International Patent Classification (IPC):  H01L 21/683(2006.01) H01L 21/67(2006.01) H01L 21/687(2006.01) H01J 37/32(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/6833; H01J 37/32724; H01J 37/32834; H01J 37/32642; H01L 21/68735; H01L 21/68742; H01L 21/6831; H01L 21/67109; H01J 37/32715 (86) International application number: PCT/US2022/053029 (87) International publication number: WO 2023/114410 (22.06.2023 Gazette 2023/25)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 16.12.2021 US 202117553305 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)

(72) Inventors: CARDUCCI, James David Sunnyvale, California 94085 (US) COLLINS, Kenneth S. Sunnyvale, California 94085 (US) RICE, Michael R. Santa Clara, California 95054 (US) RAMASWAMY, Kartik Sunnyvale, California 94085 (US) RODRIGUES, Silverst Antony Bangalore 560066 (IN) YANG, Yang Sunnyvale, California 94085 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)