FILM FORMATION METHOD - Patent 4450676

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(11)

EP 4 450 676 A8

(12)	CORRECTED EUROPEAN PATENT APPLICATION
	Note: Bibliography reflects the latest situation

(15)	Correction information:
	Corrected version no 2 (W2 A1)

(48)	Corrigendum issued on:
	19.02.2025 Bulletin 2025/08

(43)	Date of publication:
	23.10.2024 Bulletin 2024/43

(21)	Application number: 24163207.4

(22)	Date of filing: 13.03.2024

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International Patent Classification (IPC):

C23C 16/448^(2006.01)

C23C 16/40^(2006.01)

(52)	Cooperative Patent Classification (CPC):
	C23C 16/40; C23C 16/4486; H01L 21/0262; C23C 18/12; H01L 21/02565; H01L 21/02628; H01L 21/02554; H01L 21/02576; H01L 21/0242; H01L 21/02579; C07F 15/004; C07C 49/14; B05B 17/0615

(84)	Designated Contracting States:
	AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
	Designated Extension States:
	BA
	Designated Validation States:
	GE KH MA MD TN

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Priority:

13.03.2023 JP 2023039134
13.03.2023 JP 2023039132
13.03.2023 JP 2023039133

(71)	Applicant: Flosfia Inc.
	Kyoto 615-8245 (JP)

(72)	Inventors:
	Shimizu, Makoto Tokyo 105-8640 (JP) Shiho, Hiroshi Tokyo 105-8640 (JP) Ando, Hiroyuki Kyoto 615-8245 (JP) Tsukamoto, Naoyuki Kyoto 615-8245 (JP) Kato, Yuji Kyoto 615-8245 (JP)

(74)	Representative: Gulde & Partner
	Patent- und Rechtsanwaltskanzlei mbB Berliner Freiheit 2 10785 Berlin 10785 Berlin (DE)

(54)	FILM FORMATION METHOD

(57) The present disclosure provides a film formation method having an excellent mass productivity.
The present disclosure provides a film formation method using one aqueous solution or different aqueous solutions containing at least one of a metal complex having two or more different ligands and a metal complex having same ligands and substituents as well as a gallium compound, in which the metal complex having the two or more different ligands has nitrogen atom, and the metal complex having the same ligands and substituents has a halogen atom.