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EP 4 453 658 A1

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(43) Date of publication: 30.10.2024 Bulletin 2024/44 (21) Application number: 22834979.1 (22) Date of filing: 09.12.2022

(51) International Patent Classification (IPC):  G03F 7/20(2006.01) H01J 37/22(2006.01) G06T 7/00(2017.01) (52) Cooperative Patent Classification (CPC): G03F 7/70616; H01J 2237/221; H01J 2237/24592; H01J 2237/226; G03F 7/706839 (86) International application number: PCT/EP2022/085173 (87) International publication number: WO 2023/117489 (29.06.2023 Gazette 2023/26)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 20.12.2021 US 202163291569 P (71) Applicant: Carl Zeiss SMT GmbH 73447 Oberkochen (DE)	(72) Inventors: KLOCHKOV, Dmitry 73525 Schwäbisch Gmünd (DE) NEUMANN, Jens Timo 73434 Aalen (DE) KORB, Thomas 73525 Schwäbisch Gmünd (DE) FOCA, Eugen 73479 Ellwangen (DE) AVISHAI, Amir Pleasanton, California 94588 (US) BUXBAUM, Alex San Ramon, California 94582 (US) (74) Representative: Kraus & Lederer PartGmbB  Thomas-Wimmer-Ring 15 80539 München 80539 München (DE)