(19)
(11) EP 4 459 003 A8

(12) CORRECTED EUROPEAN PATENT APPLICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 A2)

(48) Corrigendum issued on:
18.12.2024 Bulletin 2024/51

(43) Date of publication:
06.11.2024 Bulletin 2024/45

(21) Application number: 24163193.6

(22) Date of filing: 13.03.2024
(51) International Patent Classification (IPC): 
C23C 16/40(2006.01)
 C23C 16/448(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 16/40; C23C 16/4486; H01L 21/0262; C30B 25/02; C23C 18/12; H01L 21/02565; H01L 21/02628; H01L 21/02554; H01L 21/02576; H01L 21/0242; H01L 21/02579; C07F 15/004; C07C 49/14; B05B 17/0615
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
GE KH MA MD TN

(30) Priority: 13.03.2023 JP 2023039132
13.03.2023 JP 2023039133
13.03.2023 JP 2023039134

(71) Applicant: Flosfia Inc.
Kyoto 615-8245 (JP)

(72) Inventors:
  • Shimizu, Makoto
    Tokyo 105-8640 (JP)
  • Shiho, Hiroshi
    Tokyo 105-8640 (JP)
  • Ando, Hiroyuki
    Kyoto 615-8245 (JP)
  • Tsukamoto, Naoyuki,
    Kyoto 615-8245 (JP)
  • Kato, Yuji
    Kyoto 615-8245 (JP)

(74) Representative: Gulde & Partner 
Patent- und Rechtsanwaltskanzlei mbB Wallstraße 58/59
10179 Berlin
10179 Berlin (DE)

   


(54) FILM FORMATION METHOD


(57) The present disclosure provides a film formation method having an excellent mass productivity.
In the film formation method, at least one of a metal complex having two or more different ligands, and a metal complex having same ligands and substituents is used.