(19)

(11)

EP 4 460 633 A1

(12)

(43) Date of publication: 13.11.2024 Bulletin 2024/46 (21) Application number: 23700390.0 (22) Date of filing: 03.01.2023

(51) International Patent Classification (IPC):  F04B 37/14(2006.01) F04B 49/20(2006.01) F04C 25/02(2006.01) F04D 19/04(2006.01) F04B 49/06(2006.01) F04B 51/00(2006.01) F04D 17/16(2006.01) (52) Cooperative Patent Classification (CPC): F04B 37/14; F04C 25/02; F04B 49/065; F04B 51/00; F04B 2201/0801; F04B 2201/0802; F04B 2201/0804; F04B 2201/06; F04B 2203/0201; F04B 2203/0209; F04B 2205/01; F04B 2205/02; F04B 2207/043; F04B 2207/04; F04B 49/20; F04D 19/046; F04D 27/001; F05D 2270/707; F05D 2270/709; F05D 2270/301; F05D 2270/303; F05D 2270/304; F05D 2270/333; F05D 2270/334; F04C 23/001; F04C 18/12; F04C 28/28; F04C 2240/81; F04C 2270/19; F04C 2270/052; F04C 2270/42; F04C 2270/18; F04C 2270/12; F04C 2270/07; F04C 2270/13 (86) International application number: PCT/EP2023/050036 (87) International publication number: WO 2023/131592 (13.07.2023 Gazette 2023/28)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 04.01.2022 EP 22315002 (71) Applicants: PFEIFFER VACUUM 74000 Annecy (FR) PFEIFFER VACUUM GMBH 35614 Asslar (DE)	(72) Inventors: CUMONT, Sylvain 74009 Annecy Cedex (FR) MAUVAIS, Stéphane 74009 Annecy Cedex (FR) COLIN, Patrick 74009 Annecy Cedex (FR) SIEBEN, Daniel 35435 WETTENBERG (DE) STAMMLER, Herbert 35396 GIESSEN (DE) (74) Representative: Innovincia  11, avenue des Tilleuls 74200 Thonon-Les-Bains 74200 Thonon-Les-Bains (FR)