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EP 4 460 734 A1

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(43) Date of publication: 13.11.2024 Bulletin 2024/46 (21) Application number: 23737643.9 (22) Date of filing: 06.01.2023

(51) International Patent Classification (IPC):  G05B 23/02(2006.01) H01L 21/67(2006.01) G06N 20/00(2019.01) (52) Cooperative Patent Classification (CPC): G06V 20/00; G06V 2201/06; G06V 10/82; G06F 18/214; G06V 10/774; G06N 20/20; H01L 22/12; G06N 5/01; G06N 3/0464 (86) International application number: PCT/US2023/010347 (87) International publication number: WO 2023/133292 (13.07.2023 Gazette 2023/28)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 07.01.2022 US 202217571320 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: HONG, Jeong Jin Santa Clara, California 95054 (US) CHEON, Sejune Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)