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(11)

EP 4 460 876 A1

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(43) Date of publication: 13.11.2024 Bulletin 2024/46 (21) Application number: 22838861.7 (22) Date of filing: 21.12.2022

(51) International Patent Classification (IPC):  H01S 3/00(2006.01) H01S 5/00(2006.01) G03F 7/20(2006.01) H05G 2/00(2006.01) (52) Cooperative Patent Classification (CPC): H05G 2/005; H01S 3/0071; H01S 5/0071; H01S 3/2316; H01S 5/5027; H05G 2/008; G02B 26/0816; G03F 7/70033; G03F 7/70025 (86) International application number: PCT/EP2022/087377 (87) International publication number: WO 2023/131536 (13.07.2023 Gazette 2023/28)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 07.01.2022 EP 22150540 (71) Applicant: ASML Netherlands B.V. 5500 AH Veldhoven (NL)	(72) Inventor: VAN MELICK, Petrus, Antonius, Johannes 5500 AH Veldhoven (NL) (74) Representative: ASML Netherlands B.V.  Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven 5500 AH Veldhoven (NL)