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(11)

EP 4 470 036 A1

(12)

(43) Date of publication: 04.12.2024 Bulletin 2024/49 (21) Application number: 23706891.1 (22) Date of filing: 23.01.2023

(51) International Patent Classification (IPC):  H01L 27/02(2006.01) H01L 29/861(2006.01) H01L 29/06(2006.01) (52) Cooperative Patent Classification (CPC): H01L 27/0255; H01L 29/861; H01L 29/0649; H01L 29/0692 (86) International application number: PCT/US2023/011316 (87) International publication number: WO 2023/141315 (27.07.2023 Gazette 2023/30)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 24.01.2022 US 202263302409 P 20.12.2022 US 202218068611 (71) Applicant: Texas Instruments Incorporated Dallas, TX 75265 (US)	(72) Inventors: MYSORE RAJAGOPAL, Krishna, Praveen Santa Clara, CA 95051 (US) DI SARRO, James Dallas, TX 75243 (US) XIU, Yang Dallas, TX 75243 (US) CONCANNON, Ann Santa Clara, CA 95051 (US) (74) Representative: Zeller, Andreas  Texas Instruments Deutschland GmbH EMEA Patent Department Haggertystraße 1 85356 Freising 85356 Freising (DE)