(19)
(11) EP 4 504 992 A1

(12)

(43) Date of publication:
12.02.2025 Bulletin 2025/07

(21) Application number: 23789802.8

(22) Date of filing: 31.08.2023
(51) International Patent Classification (IPC): 
C23C 14/34(2006.01)
B22F 3/105(2006.01)
C22C 1/04(2023.01)
C04B 35/626(2006.01)
H01J 37/34(2006.01)
C04B 35/58(2006.01)
C22C 29/14(2006.01)
(52) Cooperative Patent Classification (CPC):
B22F 3/105; B22F 2003/1051; B22F 2998/10; C23C 14/3414; C23C 14/3485; H01J 37/3426; C22C 1/045; C22C 29/14; C04B 35/58064; C04B 2235/666; C04B 35/62615; H01J 37/3491; H01J 37/3467; C04B 35/645; C04B 2235/6562; C04B 2235/6581; C04B 2235/6567; C04B 2235/3813; C04B 2235/94; C04B 2235/79
 
C-Sets:
B22F 2998/10, B22F 2009/043, B22F 2003/1051;
(86) International application number:
PCT/PL2023/000046
(87) International publication number:
WO 2024/263043 (26.12.2024 Gazette 2024/52)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 17.06.2023 PL 44525523

(71) Applicant: Siec Badawcza Lukasiewicz - Poznanski Instytut Technologiczny
61-755 Poznan (PL)

(72) Inventor:
  • The designation of the inventor has not yet been filed
     ()

(74) Representative: Urbanska-Luczak, Barbara 
Kancelaria Patentowa TAX - PAT B. Urbanska-Luczak, J.Luczak ul. Kosciuszki 103/1
61-717 Poznan
61-717 Poznan (PL)

   


(54) A METHOD FOR THE MANUFACTURING OF A MULTI-COMPONENT TARGET FOR MAGNETRON SPUTTERING, A SET OF TOOLS FOR THE MANUFACTURING OF A MULTI-COMPONENT TARGET FOR MAGNETRON SPUTTERING, AND THE SPUTTERING TARGET WITH ITS APPLICATION FOR THE DEPOSITION OF PROTECTIVE COATING