(19)
(11) EP 4 505 188 A1

(12)

(43) Date of publication:
12.02.2025 Bulletin 2025/07

(21) Application number: 23720467.2

(22) Date of filing: 05.04.2023
(51) International Patent Classification (IPC): 
G01R 1/067(2006.01)
G01R 1/073(2006.01)
(52) Cooperative Patent Classification (CPC):
G01R 1/06744; G01R 1/06722; G01R 1/07314
(86) International application number:
PCT/US2023/017623
(87) International publication number:
WO 2023/196425 (12.10.2023 Gazette 2023/41)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 06.04.2022 US 202263327926 P
04.04.2023 US 202318295712

(71) Applicant: Microfabrica Inc.
Van Nuys, CA 91406 (US)

(72) Inventors:
  • VEERAMANI, Arun, S.
    Vista, CA 92081 (US)
  • WU, Ming Ting
    San Jose, CA 95124 (US)
  • SMALLEY, Dennis, R.
    Santa Clarita, CA 91321 (US)

(74) Representative: Botti & Ferrari S.p.A. 
Via Cappellini, 11
20124 Milano
20124 Milano (IT)

   


(54) PROBES WITH PLANAR UNBIASED SPRING ELEMENTS FOR ELECTRONIC COMPONENT CONTACT, METHODS FOR MAKING SUCH PROBES, AND METHODS FOR USING SUCH PROBES