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EP 4 508 675 A1

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(43) Date of publication: 19.02.2025 Bulletin 2025/08 (21) Application number: 22937637.1 (22) Date of filing: 19.05.2022

(51) International Patent Classification (IPC):  H01K 1/18(2006.01) C30B 25/10(2006.01) H01L 21/67(2006.01) (52) Cooperative Patent Classification (CPC): H01K 1/18; C30B 25/105; H01L 21/67115; H01K 7/00 (86) International application number: PCT/US2022/030075 (87) International publication number: WO 2023/200461 (19.10.2023 Gazette 2023/42)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (30) Priority: 15.04.2022 WO PCT/US2022/025063 (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)

(72) Inventors: YANG, Yao-Hung Santa Clara, California 95054 (US) GADGIL, Shantanu Rajiv Santa Clara, California 95054 (US) RAO, Kaushik Santa Clara, California 95054 (US) KIRCHHOFF, Vincent Joseph Santa Clara, California 95054 (US) KADIWALA, Sagir Santa Clara, California 95054 (US) MAHYUDIN, Munirah Santa Clara, California 95054 (US) CHOU, Daniel Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)