(19)
(11) EP 4 511 526 A1

(12)

(43) Date of publication:
26.02.2025 Bulletin 2025/09

(21) Application number: 23792346.1

(22) Date of filing: 12.04.2023
(51) International Patent Classification (IPC): 
C23C 16/26(2006.01)
C23C 16/44(2006.01)
 C23C 16/04(2006.01)
C23C 16/455(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 16/45553; H01L 21/02115; H01L 21/02118; H01L 21/0228; H01L 21/02205; H01L 21/02315; H01L 21/0234; C23C 16/04; C23C 16/56; C23C 16/0245; C23C 16/26
(86) International application number:
PCT/US2023/018309
(87) International publication number:
WO 2023/205015 (26.10.2023 Gazette 2023/43)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 18.04.2022 US 202217722648

(71) Applicant: Applied Materials, Inc.
Santa Clara, California 95054 (US)

(72) Inventors:
  • WANG, Xinke
    Singapore 117684 (SG)
  • BHUYAN, Bhaskar Jyoti
    Santa Clara, California 95054 (US)
  • SHEN, Zeqing
    Santa Clara, California 95054 (US)
  • ROY, Susmit Singha
    Santa Clara, California 95054 (US)
  • MALLICK, Abhijit Basu
    Santa Clara, California 95054 (US)
  • TANG, Jiecong
    Singapore 117684 (SG)
  • SUDIJONO, John
    Singapore 117684 (SG)
  • SALY, Mark
    Santa Clara, California 95054 (US)

(74) Representative: Zimmermann & Partner Patentanwälte mbB 
Postfach 330 920
80069 München
80069 München (DE)

   


(54) AREA SELECTIVE CARBON-BASED FILM DEPOSITION