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EP 4 511 635 A1

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(43) Date of publication: 26.02.2025 Bulletin 2025/09 (21) Application number: 23719917.9 (22) Date of filing: 21.04.2023

(51) International Patent Classification (IPC):  G01N 21/3586(2014.01) G01Q 60/22(2010.01) G01N 21/63(2006.01) G01N 33/00(2006.01) H01L 21/66(2006.01) G01J 3/42(2006.01) G01N 21/17(2006.01) G01N 21/95(2006.01) (52) Cooperative Patent Classification (CPC): G01N 21/3586; G01N 2021/1725; H01L 22/12; G01N 21/9505; G01N 21/636; G01N 33/0095 (86) International application number: PCT/NL2023/050213 (87) International publication number: WO 2023/204712 (26.10.2023 Gazette 2023/43)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 21.04.2022 NL 2031654 (71) Applicant: Technische Universiteit Eindhoven 5612 AE Eindhoven (NL)	(72) Inventors: RIVAS, Jaime Gómez 5612 AE Eindhoven (NL) RAMEZANI, Mohammad 5612 AE Eindhoven (NL) (74) Representative: Algemeen Octrooi- en Merkenbureau B.V.  P.O. Box 645 5600 AP Eindhoven 5600 AP Eindhoven (NL)