(19)
(11) EP 4 519 335 A1

(12)

(43) Date of publication:
12.03.2025 Bulletin 2025/11

(21) Application number: 23724660.8

(22) Date of filing: 28.04.2023
(51) International Patent Classification (IPC): 
C08F 212/08(2006.01)
C08F 220/14(2006.01)
C09D 133/12(2006.01)
H01L 21/027(2006.01)
C08F 212/32(2006.01)
C09D 133/08(2006.01)
G03F 7/00(2006.01)
(52) Cooperative Patent Classification (CPC):
C08F 212/08; C08F 212/32; C08F 220/14; C09D 133/12; C09D 133/08; G03F 7/0002; C09D 125/02; C09D 125/14
 
C-Sets:
  1. C08F 220/14, C08F 212/32, C08F 212/08, C08F 220/301;
  2. C08F 212/08, C08F 212/32, C08F 220/14, C08F 220/20;
  3. C08F 212/08, C08F 212/32, C08F 220/14, C08F 220/301;
  4. C08F 212/32, C08F 212/08, C08F 220/14, C08F 220/301;
  5. C08F 212/32, C08F 212/08, C08F 220/14, C08F 220/20;

(86) International application number:
PCT/EP2023/061204
(87) International publication number:
WO 2023/213696 (09.11.2023 Gazette 2023/45)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 03.05.2022 US 202263364063 P

(71) Applicant: Merck Patent GmbH
64293 Darmstadt (DE)

(72) Inventors:
  • NG, Edward W.
    Branchburg, New Jersey 08876 (US)
  • BASKARAN, Durairaj
    Branchburg, New Jersey 08876 (US)
  • JEONG, EunJeong
    Branchburg, New Jersey 08876 (US)

(74) Representative: Rippel, Hans Christoph 
Patentanwälte Isenbruck Bösl Hörschler PartG mbB Eastsite One Seckenheimer Landstrasse 4
68163 Mannheim
68163 Mannheim (DE)

   


(54) DEVELOPMENT OF NOVEL NEUTRAL MATS CONTAINING HYDROXYL MONOMERS TO IMPROVE SIARC SUBSTRATE COMPATIBILITY FOR DIRECTED SELF-ASSEMBLY OF DIBLOCK COPOLYMERS