(19)

(11)

EP 4 519 905 A1

(12)

(43) Date of publication: 12.03.2025 Bulletin 2025/11 (21) Application number: 23799810.9 (22) Date of filing: 14.04.2023

(51) International Patent Classification (IPC):  H01J 37/32(2006.01) (52) Cooperative Patent Classification (CPC): H01J 37/32183; H01J 37/32935; H01J 37/32082; H03H 7/38; G01R 19/0061 (86) International application number: PCT/US2023/018707 (87) International publication number: WO 2023/215096 (09.11.2023 Gazette 2023/45)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 05.05.2022 US 202217737659 (71) Applicant: Applied Materials Inc; Santa Clara CA 95054 (US)	(72) Inventor: COUMOU, David NY 14580 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)