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(11)

EP 4 523 246 A1

(12)

(43) Date of publication: 19.03.2025 Bulletin 2025/12 (21) Application number: 23722412.6 (22) Date of filing: 02.05.2023

(51) International Patent Classification (IPC):  H01L 21/67(2006.01) H01L 21/60(2006.01) H01L 23/00(2006.01) (52) Cooperative Patent Classification (CPC): H01L 2224/75305; H01L 2224/7598; H01L 2224/75251; H01L 2224/7565; H01L 2224/83203; H01L 2224/8384; H01L 2224/75755; H01L 2224/75705; H01L 2224/75983; H01L 2224/75984; H01L 2224/75804; H01L 24/75; H01L 24/83; H01L 2224/83048; H01L 2224/83075; H01L 2224/83948; H01L 2224/751; H01L 2224/755; H01L 2224/32225 (86) International application number: PCT/EP2023/061567 (87) International publication number: WO 2023/217592 (16.11.2023 Gazette 2023/46)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 13.05.2022 NL 2031849 (71) Applicant: Boschman Technologies B.V. 6921 EX Duiven (NL)	(72) Inventors: PAPEN, Edwin Lambertus Maria 7251 LK Vorden (NL) DE BEIJER, Johannes Cornelis 6686 CM Doornenburg (NL) (74) Representative: Arnold & Siedsma  Bezuidenhoutseweg 57 2594 AC The Hague 2594 AC The Hague (NL)