(19)
(11) EP 4 526 914 A1

(12)

(43) Date of publication:
26.03.2025 Bulletin 2025/13

(21) Application number: 23725737.3

(22) Date of filing: 16.05.2023
(51) International Patent Classification (IPC): 
H01J 37/04(2006.01)
H01J 37/26(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/04; H01J 2237/2614; H01J 37/265
(86) International application number:
PCT/EP2023/063191
(87) International publication number:
WO 2023/222733 (23.11.2023 Gazette 2023/47)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 17.05.2022 IT 202200010184

(71) Applicant: Consiglio Nazionale Delle Ricerche
00185 Roma (IT)

(72) Inventors:
  • GRILLO, Vincenzo
    41125 MODENA (IT)
  • RONCAGLIA, Alberto
    41012 CARPI (Modena) (IT)
  • ROTUNNO, Enzo
    41125 MODENA (IT)
  • BELSITO, Luca
    40138 BOLOGNA (IT)

(74) Representative: Vanzini, Christian et al
Jacobacci & Partners S.p.A. Corso Emilia 8
10152 Torino
10152 Torino (IT)

   


(54) METHOD AND APPARATUS FOR CONTROLLING AN ELECTRON BEAM WITH A PHASE MODULATOR DRIVEN BY ANALOG MULTIPLEXING