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(11)

EP 4 532 791 A1

(12)

(43) Date of publication: 09.04.2025 Bulletin 2025/15 (21) Application number: 23723491.9 (22) Date of filing: 27.04.2023

(51) International Patent Classification (IPC):  C23C 16/44(2006.01) C23C 16/458(2006.01) (52) Cooperative Patent Classification (CPC): C23C 16/4412; C23C 16/4401; C23C 16/4585; C23C 16/4586; H01J 37/32834; H01J 37/32899; H01J 37/3244; H01J 37/32091 (86) International application number: PCT/EP2023/061177 (87) International publication number: WO 2023/227322 (30.11.2023 Gazette 2023/48)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 27.05.2022 CH 6412022 (71) Applicant: Evatec AG 9477 Trübbach (CH)	(72) Inventor: KERSCHBAUMER, Jörg 6800 Feldkirch (AT) (74) Representative: Mantel, Berthold Friedrich  Evatec AG Hauptstrasse 1a 9477 Trübbach 9477 Trübbach (CH)