(19)
(11) EP 4 533 382 A1

(12)

(43) Date of publication:
09.04.2025 Bulletin 2025/15

(21) Application number: 23735905.4

(22) Date of filing: 02.06.2023
(51) International Patent Classification (IPC): 
G06T 5/00(2024.01)
(52) Cooperative Patent Classification (CPC):
G06T 2207/20084; G06T 2207/20081; G06T 5/60
(86) International application number:
PCT/US2023/024373
(87) International publication number:
WO 2023/235612 (07.12.2023 Gazette 2023/49)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 02.06.2022 US 202217831147

(71) Applicant: FEI COMPANY
Hillsboro, Oregon 97124-5793 (US)

(72) Inventors:
  • POTOCEK, Pavel
    Hillsboro, Oregon 97124-5793 (US)
  • FREITAG, Bert Henning
    Hillsboro, Oregon 97124-5793 (US)
  • PEEMEN, Maurice
    Hillsboro, Oregon 97124-5793 (US)

(74) Representative: Boult Wade Tennant LLP 
Salisbury Square House 8 Salisbury Square
London EC4Y 8AP
London EC4Y 8AP (GB)

   


(54) LIVE-ASSISTED IMAGE ACQUISITION METHOD AND SYSTEM WITH CHARGED PARTICLE MICROSCOPY