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(11)

EP 4 537 398 A1

(12)

(43) Date of publication: 16.04.2025 Bulletin 2025/16 (21) Application number: 23820329.3 (22) Date of filing: 05.06.2023

(51) International Patent Classification (IPC):  H01L 29/778(2006.01) H01L 29/423(2006.01) H01L 29/417(2006.01) (52) Cooperative Patent Classification (CPC): H10D 64/111; H10D 62/8503; H10D 64/411; H10D 30/475 (86) International application number: PCT/US2023/024474 (87) International publication number: WO 2023/239666 (14.12.2023 Gazette 2023/50)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 07.06.2022 US 202217834013 (71) Applicant: Wolfspeed, Inc. Durham, NC 27703 (US)	(72) Inventors: GUO, Jia New Hill, North Carolina 27562 (US) BOTHE, Kyle Cary, North Carolina 27511 (US) SHEPPARD, Scott Chapel Hill, North Carolina 27516 (US) (74) Representative: Boult Wade Tennant LLP  Salisbury Square House 8 Salisbury Square London EC4Y 8AP London EC4Y 8AP (GB)