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EP 4 540 663 A1

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(43) Date of publication: 23.04.2025 Bulletin 2025/17 (21) Application number: 23739764.1 (22) Date of filing: 16.06.2023

(51) International Patent Classification (IPC):  G03F 7/16(2006.01) G03F 7/40(2006.01) G01N 15/08(2006.01) G03F 7/20(2006.01) B33Y 10/00(2015.01) (52) Cooperative Patent Classification (CPC): G03F 7/40; G03F 7/2014; G03F 7/16; B33Y 10/00; G01N 15/0806 (86) International application number: PCT/US2023/025614 (87) International publication number: WO 2023/244832 (21.12.2023 Gazette 2023/51)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 17.06.2022 US 202263353267 P 15.06.2023 US 202318335603 (71) Applicants: Saudi Arabian Oil Company Dhahran, 31311 (SA) King Abdullah University of Science and Technology Jeddah, 23955-6900 (SA)

(72) Inventors: CHA, Dong, Kyu Dhahran, 31311 (SA) ALOMIER, Abdullah, Abdulaziz Thuwal, 23955-6900 (SA) AYIRALA, Subhash, C. Dhahran, 31311 (SA) AL-OTAIBI, Mohammed, Badri Dhahran, 31311 (SA) AL-YOUSEF, Ali, Abdallah Dhahran, 31311 (SA) HOTEIT, Hussein Thuwal, 23955-6900 (SA) (74) Representative: Osha BWB  2, rue de la Paix 75002 Paris 75002 Paris (FR)