(19)
(11) EP 4 551 733 A2

(12)

(88) Date of publication A3:
29.02.2024

(43) Date of publication:
14.05.2025 Bulletin 2025/20

(21) Application number: 23734004.7

(22) Date of filing: 22.06.2023
(51) International Patent Classification (IPC): 
C23C 16/04(2006.01)
(52) Cooperative Patent Classification (CPC):
C23C 16/045; C23C 16/06; C23C 16/52; C23C 16/4417
(86) International application number:
PCT/EP2023/067035
(87) International publication number:
WO 2024/008472 (11.01.2024 Gazette 2024/02)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 04.07.2022 SE 2250842

(71) Applicant: Canatu Finland Oy
01720 Vantaa (FI)

(72) Inventors:
  • HARIDAS CHOOLAKKAL, Arun
    58329 Linköping (SE)
  • PEDERSEN, Henrik
    61172 Stigtomta (SE)
  • BIRCH, Jens
    58216 Linköping (SE)

(74) Representative: Papula Oy 
P.O. Box 981
00101 Helsinki
00101 Helsinki (FI)

   


(54) A METHOD FOR OPERATING A CHEMICAL VAPOR DEPOSITION PROCESS