(19)
(11) EP 4 559 284 A1

(12)

(43) Date of publication:
28.05.2025 Bulletin 2025/22

(21) Application number: 23843906.1

(22) Date of filing: 21.07.2023
(51) International Patent Classification (IPC): 
H05H 1/24(2006.01)
H01J 37/32(2006.01)
H05H 1/34(2006.01)
(52) Cooperative Patent Classification (CPC):
H01J 37/32541; H01J 37/32568; H01J 37/32449; H05H 1/466
(86) International application number:
PCT/US2023/070654
(87) International publication number:
WO 2024/020521 (25.01.2024 Gazette 2024/04)
(84) Designated Contracting States:
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated Extension States:
BA
Designated Validation States:
KH MA MD TN

(30) Priority: 22.07.2022 US 202263391421 P

(71) Applicant: Academia Sinica
Taipei 11529 (TW)

(72) Inventors:
  • LIAO, James, C.
    Taipei 11529 (TW)
  • CHEN, Yang-Yuan
    Taipei (TW)
  • OU, Min-Nan
    Taipei 11529 (TW)
  • WU, Shan-Luo
    Taichung City (TW)
  • CHOU, Mei-Yin
    Atlanta, GA 30327 (US)

(74) Representative: Michalski Hüttermann & Partner Patentanwälte mbB 
Kaistraße 16A
40221 Düsseldorf
40221 Düsseldorf (DE)

   


(54) PLASMA APPARATUS AND METHODS FOR CRACKING A GAS