(19)

(11)

EP 4 562 217 A1

(12)

(43) Date of publication: 04.06.2025 Bulletin 2025/23 (21) Application number: 22760657.1 (22) Date of filing: 26.07.2022

(51) International Patent Classification (IPC):  C23C 14/56(2006.01) C23C 14/24(2006.01) (52) Cooperative Patent Classification (CPC): C23C 14/562; C23C 14/243; C23C 14/246 (86) International application number: PCT/EP2022/070947 (87) International publication number: WO 2024/022579 (01.02.2024 Gazette 2024/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventor: BANGERT, Stefan 36396 Steinau (DE) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)