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(11)

EP 4 562 677 A1

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(43) Date of publication: 04.06.2025 Bulletin 2025/23 (21) Application number: 23745286.7 (22) Date of filing: 19.07.2023

(51) International Patent Classification (IPC):  H01L 21/68(2006.01) H01L 21/687(2006.01) G03F 7/20(2006.01) G03F 7/00(2006.01) (52) Cooperative Patent Classification (CPC): H01L 21/68764; H01L 21/68; G03F 7/70758; G03F 7/70716; G03F 7/70841 (86) International application number: PCT/NL2023/050387 (87) International publication number: WO 2024/025411 (01.02.2024 Gazette 2024/05)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 27.07.2022 NL 2032608 (71) Applicant: VDL Enabling Technologies Group B.V. 5652 AW Eindhoven (NL)	(72) Inventors: VAN DE RIJDT, Johannes Hubertus Antonius 5652 AW EINDHOVEN (NL) VERKOOIJEN, Rob Antonius Andries 5652 AW EINDHOVEN (NL) DE KLERK, Johannes Wilhelmus 5652 AW EINDHOVEN (NL) (74) Representative: Algemeen Octrooi- en Merkenbureau B.V.  P.O. Box 645 5600 AP Eindhoven 5600 AP Eindhoven (NL)