Technical Field
[0001] This invention relates to copper paste.
Background Art
[0002] Power modules are constructed by bonding a semiconductor element for controlling
electrical power, an insulating heat-dissipation substrate, and the respective components
for the cooling fins. Among these, materials such as Si, SiC, GaN, and Ga
2O
3 are used for the semiconductor element. For the insulating heat-dissipation substrate,
ceramics with excellent thermal conductivity, such as Al
2O
3, AIN, and Si
3N
4 are used. Additionally, Al is commonly used for the cooling fins. To bond the respective
components, a surface of the semiconductor element to be bonded is coated with thin
metal films such as Cu, Ni, and Ag, and a surface of the insulating heat-dissipation
substrate to be bonded is formed with a Cu thin plate using techniques known as Direct
Bonding of Copper (DBC) or Active Metal Brazing (AMB). Furthermore, an additional
Ag thin film may be formed on the surface of the Cu thin plate.
[0003] Bonding a semiconductor element to an insulating heat dissipation substrate is generally
referred to as "die bonding." The die bonding process involves a coating process for
applying a conductive paste to the surface of a Cu thin film formed on the insulating
heat dissipation substrate using methods like screen printing method or dispensing
method, a drying process for drying the paste, a die mounting process for placing
a semiconductor element onto the area where the conductive paste was applied, and
a press sintering process for heating the conductive paste while applying a pressure
of approximately 20 MPa in the lamination direction of the obtained laminate, so as
to form a metal thin film as a sintered body of the conductive paste on the surface
of the semiconductor element, thereby bonding/joining the same. Typical sintering
conditions include heating at 250-300°C for 3-10 minutes, and the atmosphere used
during sintering may include air, nitrogen, hydrogen, or other gases depending on
the paste used. The bonding strength of the die bonding formed through this process
is required to have a die shear strength of at least 30 MPa.
[0004] The sintered body formed from the conductive paste exhibits excellent thermal conductivity,
allowing heat generated during the operation of the semiconductor element under high
voltage and high current conditions to be efficiently transferred to the insulating
heat-dissipation substrate and dissipated from the cooling fins. Traditionally, high-lead-content
solder paste has been used as the paste for die bonding; however, to accommodate the
increasing operating temperatures of devices, silver paste with superior thermal conductivity
has replaced it, and more recently, attention has turned to copper paste, which enables
further cost reduction.
[0005] However, when copper paste is press-sintered under the aforementioned sintering conditions,
the temperature is low and the time is short compared to normal sintering conditions,
and as a result, it is not fully sintered, making it difficult to achieve the die
shear strength required for the product. To promote sintering, it has been proposed
to use fine copper particles with a large surface area to produce the paste.
[0006] For example, in Non-Patent Document 1, it is proposed to use copper nanoparticles
with an average particle size of 50-60 nm, obtained by reducing a mixed solution of
copper hydroxide and nitrilotriacetic acid disodium salt with hydrazine, in copper
paste. This copper paste forms a sintered body by heating at 200°C for 30 minutes
in a nitrogen atmosphere, and the die shear strength of the die bond is reported to
be a maximum of 39 MPa.
Prior Art References
Non-Patent Literature
Summary of the Invention
Problems to be Solved by the Invention
[0008] However, as in Non-Patent Document 1, when the particles are made finer, the particles
tend to agglomerate, which can lead to the formation of holes, protrusions, or cracks
after the coating and drying processes. These defects are carried over into the bonded
body after the press sintering process, potentially causing a reduction in die shear
strength. Additionally, when the particles are finely divided, the specific surface
area increases, and during storage of the copper particles or the drying process after
the copper paste is applied, the particle surfaces are prone to oxidation, leading
to degrading of the sinterability, which in turn degrades the die shear strength and
reduces the required thermal conductivity for heat dissipation.
[0009] The present invention has been made in view of the above circumstances, and an object
of the present invention is to provide a copper paste that has excellent oxidation
resistance and superior die shear strength in the resulting sintered body.
Means for Solving the Problems
[0010] The inventors of the present invention conducted intensive studies to solve the aforementioned
problems. As a result, it was found that a copper paste containing copper powder and
an alcohol solvent, where the alcohol solvent contains a first alcohol selected from
a group including monohydric alcohols and dihydric alcohols, which has a viscosity
of 3mPa·s or more and 70 mPa·s or less at 25°C and a second alcohol selected from
a group including dihydric alcohols and trihydric alcohols, which has a viscosity
of 300 mPa·s or more and 1000 mPa·s or less at 25°C, wherein the viscosity of η
10 at a shear rate of 10 s
-1 at 25°C is 1 Pa·s or more and 50 Pa-s or less, and the square root of √σ
0 of the Casson yield stress of σ
0 is 10Pa
1/2 or less, results in a copper paste with excellent oxidation resistance and superior
die shear strength in the resulting sintered body, leading to the completion of the
present invention. In other words, the present invention provides the following.
- (1) A copper paste comprising copper powder and an alcohol solvent, wherein the alcohol
solvent contains: a first alcohol composed of at least one type of alcohol selected
from the group comprising monohydric alcohols and dihydric alcohols, which has a viscosity
of 3mPa·s or more and 70 mPa·s or less at 25°C; and a second alcohol composed of at
least one type of dihydric alcohols and trihydric alcohols, which has a viscosity
of 300 mPa·s or more but 1000 mPa·s or less at 25°C, and wherein the viscosity of
η10 at a shear rate of 10 s-1 at 25°C is 1 Pa·s or more and 50 Pa·s or less, and the square root of √σ0 of the Casson yield stress of σ0 is 10Pa1/2 or less.
- (2) The copper paste according to the above (1), wherein the square root of √η∞ of the Casson viscosity of η∞ is 1 Pa·s1/2 or less.
- (3) The copper paste according to the above (1) or (2), wherein the copper powder
further comprises: first copper particles which have an average particle diameter
of 50 nm or more and 900 nm or less, second copper particles which have an average
particle diameter of 150 nm or more and 1 µm or less, which is at least 100 nm larger
than the average particle diameter of the first copper particle, and third copper
particles that are in a plate-shape, a scaly shape, a flat-shape, or a flaky shape
and have an average particle diameter of 1.5 µm or more and 20 µm or less.
- (4) The copper paste according to the above (3), wherein the copper powder contains,
relative to 100 mass% of the copper powder, 1 mass% or more and 30 mass% or less of
the second copper particles, and 5 mass% or more and 60 mass% or less of the third
copper particles.
- (5) The copper paste according to the above (1) or (2), wherein the total amount of
the first alcohol and the second alcohol is 5 mass% or more and 50 mass% or less,
relative to the total mass of the copper powder, the first alcohol, and the second
alcohol, which is 100 mass%.
- (6) The copper paste according to the above (1) or (2), wherein the paste contains
no resin or contains resin in an amount of more than 0 mass% and10 mass% or less,
relative to 100 mass% of the copper powder.
- (7) The copper paste according to the above (1) or (2), which does not contain a silane
coupling agent that has an epoxy group and a silane coupling agent that has an amino
group, or contains the silane coupling agent that has the epoxy group and the silane
coupling agent that has the amino group in an amount of more than 0 mass% and 0.05
mass% or less, relative to 100 mass% of the copper powder.
- (8) The copper paste according to the above (1) or (2), wherein the first alcohol
contains one or more elements selected from the group comprising 1-hexanol, 1-heptanol,
2-heptanol, 1-octanol, 2-octanol, 2-ethyl-1-hexanol, benzyl alcohol, ethylene glycol,
1,2-propanediol, 1,3-propanediol, and 2,3-butanediol.
- (9) The copper paste according to the above (3), wherein at least one of the first
copper particles and the second copper particles has polysaccharides coated on at
least a part of their surface.
- (10) The copper paste according to the above (3), wherein at least one of the first
copper particles and the second copper particles has one or more acids selected from
the group comprising octanoic acid, nonanoic acid, decanoic acid, dodecanoic acid,
and tetradecanoic acid on at least a part of its surface.
Advantages of the Invention
[0011] According to the present invention, it is possible to provide a copper paste that
has excellent oxidation resistance and superior die shear strength in the sintered
body.
Brief Description of the Drawings
[0012]
Fig. 1 is a Casson plot of the paste in Comparative Example 2 (η10 = 185 Pa·s).
Fig. 2 is a Casson plot of the paste in Comparative Example 1 (η10 = 11 Pa·s).
Fig. 3 is a Casson plot of the paste in Example 4 (η10 = 8 Pa·s).
Fig. 4 is an optical microscope image of the dried product of the paste in Comparative
Example 1.
Fig. 5 is an optical microscope image of the dried product of the paste in Example
4.
Embodiments of the Invention
[0013] The embodiments of the present invention will be described below; however, the present
invention is not limited to the description of these embodiments and can be implemented
with appropriate modifications.
<Copper Paste>
[0014] The copper paste according to this embodiment contains copper powder and an alcohol
solvent. Among these, the alcohol solvent contains a first alcohol selected from a
group comprising monohydric alcohols and dihydric alcohols, which has a viscosity
of 3 mPa·s or more and 70 mPa·s or less at 25°C and a second alcohol selected from
a group comprising dihydric alcohols and trihydric alcohols, which has a viscosity
of 300 mPa·s or more and 1000 mPa·s or less at 25°C, wherein the viscosity of η
10 at a shear rate of 10 s
-1 at 25°C is 1 Pa·s or more and 50 Pa·s or less, and the square root of √σ
0 of the Casson yield stress of σ
0 is 10 Pa
1/2 or less, results in a copper paste with excellent oxidation resistance and superior
die shear strength in the resulting sintered body, leading to the completion of the
present invention.
[0015] Regarding the viscosities of the first alcohol and the second alcohol, both of these
alcohols are Newtonian fluids, meaning their viscosity does not depend on the shear
rate, and therefore, the viscosity refers to the viscosity at any given shear rate.
[0016] In the case of copper paste, it is a non-Newtonian fluid, and therefore, the viscosity
is measured using a cone-plate type dynamic shear rheometer (for example, a Brookfield
RST Cone-Plate Rheometer), and it refers to the viscosity of the copper paste at a
shear rate of 10 s
-1.
[0017] In the copper paste according to this embodiment, at least two types of alcohols
are used together as organic solvents for the dispersion medium. This helps to suppress
the oxidation of copper powder during storage and sintering. The resulting sintered
body has a reduced amount of oxides present within it, resulting in excellent thermal
conductivity and bonding strength.
[0018] In the copper paste according to this embodiment, the viscosity of η
10 at a shear rate of 10 s
-1 is 1 Pa·s or more and 50 Pa·s or less. By ensuring that the viscosity of η
10 at the shear rate of 10 s
-1 is above the required value, the paste can be prevented from seeping under the printing
plate and forming a diffused form during application by the printing method. Additionally,
it prevents the paste from flowing after application by dispensing method, maintaining
the desired shape. Furthermore, by ensuring that the viscosity of η
10 is below the required value, during the die-mounting process, the paste can be uniformly
distributed between the semiconductor element and the insulating heat dissipation
substrate, sintering variations in respective portions of the pressure-sintered body
can be suppressed, and the variations that depends upon the die shear strength can
be suppressed.
[0019] The viscosity of η
10 at a shear rate of 10 s
-1 is not particularly limited as long as it is 1 Pa·s or more and 50 Pa·s or less;
however, for example, it is preferable for the viscosity to be at 1.5 Pa·s or more,
2 Pa·s or more, 2.5 Pa·s or more, 3 Pa·s or more, 3.5 Pa·s or more, 4 Pa·s or more,
4.5 Pa·s or more, 5 Pa·s or more, 5.5 Pa·s or more, 6 Pa·s or more, 6.5 Pa·s or more,
7 Pa·s or more, 7.5 Pa·s or more, 8 Pa·s or more, 8.5 Pa·s or more, 9 Pa·s ormore,
9.5 Pa·s or more, or 10 Pa·s or more. On the other hand, the viscosity of η
10 at a shear rate of 10 s
-1 is preferably at 49 Pa·s or less, 47 Pa·s or less, 45 Pa·s or less, 42 Pa·s or less,
40 Pa·s or less, 37 Pa·s or less, 35 Pa·s or less, 32 Pa·s or less, or 30 Pa·s or
less.
[0020] In the copper paste according to this embodiment, the square root of √σ
0 of the Casson yield stress of σ
0 is 10 Pa
1/2 or less. The square root of √σ
0 of the Casson yield stress of σ
0 is an indicator of the size and strength of agglomerates, and by ensuring that the
square root of √σ
0 is below the required value, the agglomerates are prevented from becoming too large
or strongly aggregated, which helps suppress the formation of holes or protrusions
on the paste surface after drying, thereby preventing a reduction in the die shear
strength after pressure sintering.
[0021] The square root of √σ
0 of the Casson yield stress of σ
0 is not particularly limited as long as it is 10 Pa
1/2 or less; however, for example, it is preferable for the square root of √σ
0 to be 9.7 Pa
1/2 or less, 9.5 Pa
1/2 or less, 9.2 Pa
1/2 or less, 9 Pa
1/2 or less, 8.7 Pa
1/2 or less, 8.5 Pa
1/2 or less, 8.2 Pa
1/2 or less, 8 Pa
1/2 or less, 7.7 Pa
1/2 or less, 7.5 Pa
1/2 or less, 7.2 Pa
1/2 or less, 7 Pa
1/2 or less, 6.7 Pa
1/2 or less, 6.5 Pa
1/2 or less, 6.2 Pa
1/2 or less, 6 Pa
1/2 or less, 5.7 Pa
1/2 or less, 5.5 Pa
1/2 or less, 5.2 Pa
1/2 or less, or 5 Pa
1/2 or less.
[0022] In the copper paste according to the present embodiment, the Casson viscosity of
η
∞ is not particularly limited, but its square root of √η
∞ is preferably 1 (Pa·s)
1/2 or less, 0.97 (Pa·s)
1/2 or less, 0.95 (Pa·s)
1/2 or less, 0.92 (Pa·s)
1/2 or less, 0.9 (Pa·s)
1/2 or less, 0.87 (Pa·s)
1/2 or less, 0.85 (Pa·s)
1/2 or less, 0.82 (Pa·s)
1/2 or less, 0.8 (Pa·s)
1/2 or less, 0.77 (Pa·s)
1/2 or less, 0.75 (Pa·s)
1/2 or less, 0.72 (Pa·s)
1/2 or less, 0.7 (Pa·s)
1/2 or less, 0.67 (Pa·s)
1/2 or less, 0.65 (Pa·s)
1/2 or less, 0.62 (Pa·s)
1/2 or less, 0.6 (Pa·s)
1/2 or less, 0.57 (Pa·s)
1/2 or less, 0.55 (Pa·s)
1/2 or less, 0.52 (Pa·s)
1/2 or less, or 0.5 (Pa·s)
1/2 or less. The square root of √η
∞ of the Casson viscosity of η
∞ can be used as an indicator of the ease of movement of the paste during the paste
application process, and when √η
∞ is below the required value, the paste can follow the movement of the squeegee more
easily during screen printing, preventing defects in the paste application area and
ensuring uniformity in the paste thickness.
<Measurement of Dynamic Viscoelastic Behavior of Copper Paste>
[0023] The dynamic viscoelastic behavior of the copper paste was measured using a dynamic
viscoelastic measurement device equipped with a cone-plate type spindle (for example,
Brookfield's RST Cone Plate Rheometer), where the viscosity of the copper paste at
a shear rate of 10 s
-1 was designated as η
10.
[0024] Additionally, a Casson plot was obtained by plotting the square root of √σ of the
shear stress σ on the vertical axis and the square root of √γ of the shear rate of
γ on the horizontal axis. When an approximate straight line is obtained in this plot,
the intersection of the approximate straight line with the vertical axis in the region
where the shear rate is 10 s
-1 or higher represents the square root of √σ
0 of the Casson yield stress, and the slope of the line represents the square root
of √η
∞ of the Casson viscosity.
<Alcohol Solvent>
[0025] The organic solvent used in the copper paste according to this embodiment is a combination
of monohydric or dihydric alcohols with different viscosities and dihydric or trihydric
alcohols. If polyhydric alcohols with a valence of 4 or more are used as solvents,
during sintering, particularly at low temperatures of around 300°C or lower under
reducing atmospheres or nitrogen atmospheres, the alcohol may remain in the sintered
body, potentially lowering electrical conductivity and adhesion strength. On the other
hand, if only a monohydric alcohol is used as the solvent, it may easily volatilize
during storage or printing of the copper paste, causing the viscosity of the copper
paste to change and deteriorating its workability. In the copper paste according to
this embodiment, by combining monohydric or dihydric alcohols with different viscosities
and dihydric or trihydric alcohols, such issues can be avoided, providing a copper
paste with excellent properties and workability, with uniformly dispersed copper powder.
Particularly, because it contains a high-viscosity second alcohol, sagging of the
paste, which deforms the desired shape, after application is suppressed, and, as described
later, the viscosity of the copper paste can be adjusted to an appropriate value even
without binder components such as resin. If the copper paste does not contain resin
components, there is no need to consider carbon residues from the resin components,
allowing sintering in a non-oxidizing atmosphere at relatively low temperatures.
[0026] In this specification, the term "alcohol solvent" refers to a mixed solvent primarily
composed of alcohol, and it may also include a mixed solvent containing a small amount
of organic solvents other than water and alcohols, where the mixed solvent, for example,
may contain at least one of ethers, ketones, and esters in an amount of 1 to 20 mass%,
2 to 17 mass%, 3 to 15 mass%, 4 to 12 mass%, or 5 to 10 mass%. Additionally, the alcohol
solvent may include solvents such as hydrocarbon solvents and halogenated hydrocarbon
solvents; however, nitrogen-containing solvents, such as amines and amides, tend to
remain in the dried residue, and therefore, it is preferable that these are either
not included or, if included, limited to 5 mass% or less, 4 mass% or less, 3 mass%
or less, 2 mass% or less, 1 mass% or less, 0.7 mass% or less, 0.5 mass% or less, 0.2
mass% or less, or 0.1 mass% or less.
[0027] The total amount of the first alcohol and the second alcohol is not particularly
limited; however, it is preferably 5 mass% or more, 5.5 mass% or more, 6 mass% or
more, 6.5 mass% or more, 7 mass% or more, 7.5 mass% or more, or 8 mass% or more, relative
to the total amount of the copper paste at 100 mass%. On the other hand, the total
amount of the first alcohol and the second alcohol is preferably 40 mass% or less,
35 mass% or less, 30 mass% or less, 25 mass% or less, or 20 mass% or less, relative
to the total amount of the copper paste at 100 mass%. Ensuring the total amount of
the first and second alcohols is above the required level allows the copper paste
to be applied uniformly across the entire interface at the desired thickness, resulting
in excellent bonding strength. Furthermore, keeping the total amount of the first
and second alcohols below the required level prevents the solvent from remaining during
sintering, thus suppressing any reduction in electrical conductivity or bonding strength.
[0028] The total amount of the first alcohol and the second alcohol is not particularly
limited; however, it is preferably 5 mass% or more, 7 mass% or more, 10 mass% or more,
12 mass% or more, 15 mass% or more, 17 mass% or more, 20 mass% or more, 22 mass% or
more, 25 mass% or more, 27 mass% or more, or 30 mass% or more, relative to the total
amount of copper powder, the first alcohol, and the second alcohol at 100 mass%. Conversely,
the total amount of the first alcohol and the second alcohol is preferably 50 mass%
or less, 47 mass% or less, 45 mass% or less, 42 mass% or less, 40 mass% or less, 37
mass% or less, 35 mass% or less, 32 mass% or less, 30 mass% or less, 27 mass% or less,
or 25 mass% or less, relative to the total amount of copper powder, the first alcohol,
and the second alcohol at 100 mass%.
[0029] The total amount of the first alcohol and the second alcohol is not particularly
limited; however, it is preferably 70 mass% or more, 75 mass% or more, 80 mass% or
more, 85 mass% or more, 90 mass% or more, 95 mass% or more, 97 mass% or more, 98 mass%
or more, 99 mass% or more, 99.9 mass% or more, or 99.99 mass% or more relative to
the total solvent in the copper paste at 100 mass%. Since alcohols, particularly trivalent
alcohols, have a reducing effect, increasing their content in the solvent of the copper
paste can more effectively suppress oxidation of the copper powder.
[0030] The mass ratio (X/Y) of the first alcohol (X) to the second alcohol (Y) in the copper
paste is not particularly limited; however, it is preferably 0.2 or more, 0.3 or more,
0.4 or more, or 0.5 or more. Conversely, the ratio (X/Y) of the first alcohol (X)
and the second alcohol (Y) is preferably 8 or less, 7 or less, 6 or less, or 5 or
less.
To ensure sufficient bonding strength of the copper paste, for example the die shear
strength between a chip and a substrate, the copper paste layer must be printed with
a nearly uniform thickness at the interface between the chip and the substrate. By
maintaining the ratio (X/Y) at or above the required value, the paste achieves a viscosity
suitable for application, resulting in superior bonding strength. On the other hand,
keeping the ratio (X/Y) at or below the required value ensures that the reducing effect
derived from the alcohols is sufficiently manifested, leading to excellent sinterability
of the resultant sintered body, achieving high electrical conductivity and bonding
strength.
<First Alcohol>
[0031] The first alcohol is at least one alcohol selected from a group consisting of a monohydric
alcohol and a dihydric alcohol with viscosities at 25°C ranging from 3 mPa·s to 70
mPa·s. If the viscosity of the first alcohol falls within this range, it facilitates
the application of the copper paste, ensuring ease of use and good workability.
<Boiling Point of the First Alcohol>
[0032] The boiling point of the first alcohol is not particularly limited; however, it is
preferably 150°C or more, 155°C or more, 160°C or more, 165°C or more, 170°C or more,
175°C or more, 180°C or more, 185°C or more, or 190°C or more. On the other hand,
the boiling point of the first alcohol is preferably 250°C or less, 245°C or less,
240°C or less, 235°C or less, 230°C or less, 225°C or less, 220°C or less, 215°C or
less, 210°C or less, 205°C or less, or 200°C or less. Having a boiling point of the
first alcohol at 150°C or higher prevents from forming voids in the paste due to a
sudden boiling during heating and lowering the sinterability, thereby enhancing the
thermal conductivity and bonding strength of the sintered body. In addition, a boiling
point of 150°C or higher ensures that the solvent does not evaporate quickly while
storing the copper paste at room temperature, which prevents short-term viscosity
changes due to the evaporation of the solvent. Consequently, refrigeration or freezing
for storage becomes unnecessary, thus reducing storage costs. Unless otherwise stated,
the term "boiling point" in this specification refers to the boiling point under atmospheric
pressure.
[0033] The boiling point of the first alcohol is not particularly limited; however, it is
preferably more than 50°C lower than the sintering temperature of the copper paste.
[0034] The vapor pressure of the first alcohol is not particularly limited; however, it
is preferred to have a vapor pressure around room temperature, for example, at 25°C,
of 0.1 Pa or more, 0.2 Pa or more, 0.3 Pa or more, 0.4 Pa or more, 0.5 Pa more, 0.6
Pa or more, 0.7 Pa or more, 0.8 Pa or more, 0.9 Pa or more, 1 Pa or more, 1.2 Pa or
more, 1.5 Pa or more, 1.7 Pa or more, 2 Pa or more, 2.2 Pa or more, 2.5 Pa or more,
2.7 Pa or more, or 3 Pa or more. On the other hand, the vapor pressure of the first
alcohol is not particularly limited; however, it is preferred to have a vapor pressure
around room temperature, for example, at 25°C, of 100 Pa or lower, 90 Pa or less,
80 Pa or less, 70 Pa or less, 60 Pa or less, 50 Pa or less, 40 Pa or less, or 30 Pa
or less. Having the vapor pressure of the first alcohol within the desired range ensures
excellent storage stability and printability.
[0035] Examples of the first alcohol include monohydric alcohols such as 1-hexanol (with
viscosity of 4.58 mPa·s, boiling point 158°C, and vapor pressure 80 Pa), 1-heptanol
(with viscosity of 5.81 mPa·s, boiling point 176°C, and vapor pressure 44 Pa), 2-heptanol
(viscosity of 3.96 mPa·s, boiling point 159°C, and vapor pressure 78 Pa), 1-octanol
(with viscosity of 7.29 mPa·s, boiling point 195°C, and vapor pressure 24 Pa), 2-octanol
(with viscosity of 6.49 mPa·s, boiling point 180°C, and vapor pressure 42 Pa), 2-ethyl-1-hexanol
(with viscosity of 6.27 mPa·s, boiling point 185°C, and vapor pressure 35 Pa), benzyl
alcohol (with viscosity of 5.47 mPa-s, boiling point 205°C, and vapor pressure 18
Pa) and the dihydric alcohols such as ethylene glycol (with viscosity of 16.1 mPa·s,
boiling point 197°C, and vapor pressure 20 Pa), 1,2-propanediol (with viscosity of
40.4 mPa·s, boiling point 188°C, and vapor pressure 28 Pa), 1,3-propanediol (with
viscosity of 47 mPa·s, boiling point 214°C, and vapor pressure 5 Pa), 2,3-butanediol
(with viscosity of 45 mPa·s, boiling point 182°C, and vapor pressure <100 Pa). Among
these, it is preferable to use 1-octanol, 2-octanol, 2-ethyl-1-hexanol, ethylene glycol,
or 1,2-propanediol as the first alcohol. As the first alcohol, any of the above-mentioned
alcohols that meet the requirements may be used singly or in combination. The viscosity
and vapor pressure are both measured at 25°C. As mentioned above, since the first
alcohol has low viscosity, it is possible to adjust the viscosity of the copper paste
to the appropriate value by adding a smaller amount. Therefore, the total amount of
organic solvents in the copper paste can be reduced, and the remaining organic solvent
content during firing can be suppressed.
<Second Alcohol>
[0036] The second alcohol is at least one alcohol selected from a group consisting of divalent
alcohols and trivalent alcohols that have a viscosity of 300 mPa·s or more and 1000
mPa·s or less at 25°C. If the viscosity of the second alcohol is within this range,
it can prevent the copper paste from slumping and losing its desired shape before
sintering, and also ensures that the workability of the copper paste is not impaired.
[0037] The boiling point of the second alcohol is not particularly limited; however, it
is preferable to be 150°C or more, 160°C or more, 170°C or more, 180°C or more, 190°C
or more, 195°C or more, 200°C or more, 205°C or more, 210°C or more, 215°C or more,
220°C or more, 225°C or more, 230°C or more, 235°C or more, 240°C or more, 245°C or
more, 250°C or more, 255°C or more, 260°C or more, 265°C or more, 270°C or more, 275°C
or more, 280°C or more, or 285°C or more. On the other hand, the boiling point of
the second alcohol is preferably 320°C or lower, 315°C or lower, 310°C or lower, 305°C
or lower, 300°C or lower, or 295°C or lower. By having the boiling point of the second
alcohol within this range, it ensures that the alcohol will not remain in the gaps
between copper particles in the sintered body after low-temperature sintering, preventing
a reduction in thermal conductivity. Furthermore, by having the boiling point of the
second alcohol meet the required value or higher, it prevents from reducing the sinterability
due to occurrence of voids in the paste because of the sudden boiling and increases
the thermal conductivity and bonding strength of the sintered body. Additionally,
if the boiling point of the second alcohol meets the required value or higher, the
copper paste can be stored at room temperature without the solvent evaporating and
causing a rapid viscosity change, which eliminates the need for refrigeration or freezing,
thus reducing storage costs.
[0038] The boiling point of the second alcohol is not particularly limited; however, it
is preferable to be 50°C lower than the sintering temperature of the copper paste.
[0039] It is preferable to use a second alcohol with a higher boiling point than the first
alcohol. The inclusion of a low-viscosity first alcohol makes the copper paste according
to the present embodiment have an appropriate viscosity and excellent workability;
however, after applying the paste, there is no need to adjust the viscosity, and from
the perspective of preventing the paste from spreading, it is preferable that the
first alcohol is eliminated. On the other hand, among the alcohols, divalent alcohols,
trivalent alcohols, and especially trivalent alcohols, have strong reducing properties,
so the second alcohol containing at least one of these is preferably present at a
high concentration during sintering. Therefore, by using a second alcohol with a higher
boiling point than the first alcohol, one that evaporates near the sintering temperature
of the copper paste, it is possible to maintain good workability and more effectively
suppress oxidation of the copper powder.
[0040] Moreover, when the vapor pressure at around room temperature, for example, at 25°C,
is 1 mPa or more and 5 Pa or less, and more preferably 1.5 Pa or less, especially
1 Pa or less, the storage stability improves and the oxidation suppression effect
during sintering is further enhanced, making it preferable. This effect becomes particularly
prominent when the vapor pressure of the second alcohol is lower compared to that
of the first alcohol.
[0041] The vapor pressure of the second alcohol is not particularly limited; however, it
is preferable that the vapor pressure at around room temperature, for example at 25°C,
be 1 mPa or more, 2 mPa or more, 3 mPa or more, 4 mPa or more, 5 mPa or more, 6 mPa
or more, 7 mPa or more, 8 mPa or more, 9 mPa or more, or 10 mPa or more. On the other
hand, the vapor pressure of the second alcohol is not particularly limited; however,
it is preferable that the vapor pressure be 100 Pa or less, 90 Pa or less, 80 Pa or
less, 70 Pa or less, 60 Pa or less, 50 Pa or less, 40 Pa or less, and 30 Pa or less.
By ensuring that the vapor pressure of the first alcohol falls within the required
range, both storage stability and printability are enhanced.
[0042] Specifically, as the second alcohol, one can use a divalent alcohol such as 2-ethyl-1,3-hexanediol
(with viscosity of 323 mPa·s, boiling point 244°C, and vapor pressure <1.4 Pa) and
a trivalent alcohol such as glycerol (with viscosity of 934 mPa·s, boiling point 290°C,
and vapor pressure 0.01 Pa). The second alcohol may be used either singly, provided
it meets the requirements of the second alcohol described above, or as a mixture of
two or more types.
<Copper Powder>
[0043] The copper powder is contained within the copper paste, and by sintering such a paste,
it forms the sintered body.
[0044] Copper powder is not particularly limited and can be any commercially available product.
For copper powder, methods such as the high-pressure water atomization method described
in International Publication
WO99/11407, or the wet reduction precipitation method described in
WO2014/80662, can be used for its production. The high-pressure water atomization method is a
process for producing metal powders such as copper from molten metal, where a molten
metal is split by the gas near the nozzle outlet as the molten metal stream flows
downward through the center of the nozzle, where the gas flows, and subsequently,
the molten metal, which has been split, is further fragmented by a liquid ejected
in an inverted conical shape. According to this method, allowing the continuous fragmentation
of the molten metal by both gas and liquid results in particles with fine diameters
in a spherical or granular shape, and the large-scale, low cost production of metal
powders such as copper with a low oxygen content can be achieved industrially. On
the other hand, the wet reduction precipitation method is a technique for reducing
copper ions using a reducing agent like hydrazine in a wet process, where an organic
solvent that is miscible with water and reduces the surface tension of water is used.
Specifically, in this method, using water and the organic solvent as the liquid medium,
and the reaction solution containing monovalent copper ions and divalent copper ions
and the reducing agent are mixed to reduce the copper ions to generate the copper
particles. Generally, the high-pressure water atomization method can produce particles
with a size of 0.7 µm or larger. The wet reduction precipitation method is more suitable
for producing particles with finer dimensions.
[0045] In one embodiment, the average particle diameter of copper powder (copper particles)
is not particularly limited; however, it is preferably, for example, 0.05 µm or more,
0.06 µm or more, 0.07 µm or more, 0.08 µm or more, 0.09 µm or more, 0.1 µm or more,
0.12 µm or more, 0.15 µm or more, 0.17 µm or more, 0.2 µm or more, 0.22 µm or more,
0.25 µm or more, 0.27 µm or more, or 0.3 µm or more. On the other hand, the average
particle diameter of copper powder is preferably 2.0 µm or less, 1.9 µm or less, 1.8
µm or less, 1.7 µm or less, 1.6 µm or less, 1.5 µm or less, 1.4 µm or less, 1.3 µm
or less, 1.2 µm or less, 1.1 µm or less, 1 µm or less, 0.9 µm or less, 0.8 µm or less,
or 0.7 µm or less. When the average particle diameter of the copper powder is below
the required value, the surface area of the copper powder increases relatively, making
it easier to sinter at low temperatures. On the other hand, when the average particle
diameter of the copper powder is above the required value, the increase in the price
of the copper powder can be suppressed. Furthermore, when the average particle diameter
is above the required value, it is possible to prevent the formation of defects in
the sintered body due to the aggregation of numerous particles. In this specification,
"average particle diameter" refers to the 50% particle diameter (D50), which is the
median of the particle size distribution measured using a laser particle size analyzer
or the like.
[0046] In one embodiment, the copper powder preferably includes the first copper particles
with an average particle diameter of 50 nm or more and 900 nm or less, the second
copper particles with an average particle diameter of 150 nm or more and 1 µm or less,
which is 100 nm or more larger than the average particle diameter of the second copper
particle of the first copper particles, and the third copper particles, which are
plate-like, scale-like, flat-like, or flaky in shape, with an average particle diameter
of 1.5 µm or more and 20 µm or less. As there is a difference in average particle
diameter of 100 nm or more between the first copper particles and the second copper
particles, the first copper particles, which have smaller average diameter than that
of the second copper particles, can fill gaps between the second copper particles,
which have larger average diameter than that of the first copper particles, resulting
in a dense sintered body. Furthermore, by containing the third copper particles in
a flaky shape or the like, it is possible to suppress the occurrence of cracks after
applying and drying the paste.
[0047] The shape of the first copper particles is not particularly limited; however, examples
of preferable shapes of the first copper particle includes a spherical shape, an elliptical
shape, a polyhedral shape, an irregular shape, a wire-like shape, and a dendritic
shape.
[0048] The average particle diameter of the first copper particles is preferably, for example,
60 nm or more, 70 nm or more, 80 nm or more, 90 nm or more, 100 nm or more, 120 nm
or more, 150 nm or more, 170 nm or more, 200 nm or more, 220 nm or more, or 250 nm
or more. On the other hand, the average particle diameter of the first copper particles
is preferably 850 nm or less, 800 nm or less, 750 nm or less, 700 nm or less, 650
nm or less, 600 nm or less, 550 nm or less, 500 nm or less, 450 nm or less, 400 nm
or less, 350 nm or less, or 300 nm or less.
[0049] The content of the first copper particles is not particularly limited; however, it
is preferably, for example, 20 mass% or more, 25 mass% or more, 30 mass% or more,
35 mass% or more, 40 mass% or more, 45 mass% or more, 50 mass% or more, 55 mass% or
more, 60 mass% or more, 65 mass% or more, or 70 mass% or more, based on 100 mass%
of copper powder. On the other hand, the content of the first copper particles in
the copper powder is preferably 90 mass% or less, 85 mass% or less, or 80 mass% or
less, based on 100 mass% of copper powder.
[0050] The shape of the second copper particles is not particularly limited; however, it
is preferable that they have shapes such as spherical, elliptical, polyhedral, irregular,
wire-like, or dendritic.
[0051] The average particle diameter of the second copper particles is preferably, for example,
160 nm or more, 170 nm or more, 180 nm or more, 190 nm or more, 200 nm or more, 220
nm or more, 250 nm or more, 270 nm or more, 300 nm or more, 320 nm or more, or 350
nm or more. On the other hand, the average particle diameter of the second copper
particles is preferably 950 nm or less, 900 nm or less, 850 nm or less, 800 nm or
less, 750 nm or less, 700 nm or less, 650 nm or less, 600 nm or less, 550 nm or less,
500 nm or less, 450 nm or less, or 400 nm or less.
[0052] The average particle diameter of the second copper particles is preferably 100 nm
larger than that of the first copper particles. On the other hand, the average particle
diameter of the second copper particles is preferably 900 nm or less, 800 nm or less,
700 nm or less, 600 nm or less, 500 nm or less, 400 nm or less, 300 nm or less, or
200 nm or less than that of the first copper particles.
[0053] The content of the second copper particles is not particularly limited; however,
it is preferably, for example, 1 mass% or more, 2 mass% or more, 3 mass% or more,
4 mass% or more, 5 mass% or more, 6 mass% or more, 7 mass% or more, 8 mass% or more,
9 mass% or more, 10 mass% or more, 11 mass% or more, or 12 mass% or more, based on
100 mass% of copper powder. On the other hand, the content of the second copper particles
in the copper powder is preferably 30 mass% or less, 27 mass% or less, 25 mass% or
less, 22 mass% or less, 20 mass% or less, or 18 mass% or less, based on 100 mass%
of copper powder.
[0054] The average particle diameter of the third copper particles is preferably, for example,
1.5 µm or more, 2 µm or more, 2.5 µm or more, 3 µm or more, 3.5 µm or more, 4 µm or
more, 4.5 µm or more, 5 µm or more, 5.5 µm or more, or 6 µm or more. On the other
hand, the average particle diameter of the third copper particles is preferably 20
µm or less, 19 µm or less, 18 µm or less, 17 µm or less, 16 µm or less, 15 µm or less,
14 µm or less, 13 µm or less, 12 µm or less, 11 µm or less, 10 µm or less, 9 µm or
less, or 8 µm or less.
[0055] The content of the third copper particles in the copper powder is not particularly
limited; however, it is preferably, for example, 5 mass% or more, 5.5 mass% or more,
6 mass% or more, 6.5 mass% or more, 7 mass% or more, 7.5 mass% or more, 8 mass% or
more, 8.5 mass% or more, 9 mass% or more, or 9.5 mass% or more, based on 100 mass%
of copper powder. On the other hand, the content of the third copper particles in
the copper powder is preferably 60 mass% or less, 55 mass% or less, 50 mass% or less,
45 mass% or less, 40 mass% or less, 35 mass% or less, 30 mass% or less, 25 mass% or
less, 20 mass% or less, 15 mass% or less, or 12 mass% or less, based on 100 mass%
of copper powder.
[0056] The copper powder (copper particles) may have a portion of its surface coated with
an organic material. As organic materials, compounds of either polysaccharides or
fatty acid are preferred. Polysaccharide molecules make the outer side (the side in
contact with the solvent) hydrophilic when coating the copper powder, which interacts
with the hydroxyl groups of the organic solvent in the copper paste to provide an
appropriate viscosity. On the other hand, fatty acids have their carboxyl groups bound
to the copper particle surface, while the opposite end of the fatty acid becomes hydrophobic,
improving the dispersion of the copper particles and suppressing particle agglomeration.
As a result of these actions of the polysaccharides and fatty acids, the copper paste
can form a uniform layer with consistent thickness, ensuring excellent bonding strength
across the entire interface.
[0057] Specific examples of polysaccharides include gum arabic, carboxymethyl cellulose,
hydroxyethyl cellulose, cellulose nanofibers, starch, glycogen, agarose (agar), pectin,
and alginic acid, as well as their salts; however, the selection is not limited to
these, and sulfur-containing polysaccharides, such as carrageenan, can also be used.
Among the examples, it is preferable to use one or more selected from gum arabic and
sodium alginate.
[0058] Specific examples of fatty acids include medium-chain fatty acids such as pentanoic
acid, octanoic acid, nonanoic acid, decanoic acid, dodecanoic acid, and tetradecanoic
acid. Among these, it is preferable to use one or more selected from octanoic acid,
nonanoic acid, decanoic acid, dodecanoic acid, and tetradecanoic acid.
[0059] The surface coverage of the organic material is not particularly limited; however,
it is preferable that, with respect to copper powder with a coating layer accounting
for 100 mass%, the carbon content is 0.05 mass% or more and 0.8 mass% or less, and
more preferably 0.1 mass% or more and 0.5 mass% or less, and the oxygen content is
preferably 0.05 mass% or more and 1.5 mass% or less, and more preferably 0.1 mass%
or more and 1 mass% or less.
By ensuring that the carbon and oxygen contents are above the required levels, the
hydrophilicity of the polysaccharide molecules on the copper powder surface can be
sufficiently manifested, which reduces the viscosity of the copper paste and forms
a uniform paste layer, thereby improving the bonding strength of the resulting sintered
body. On the other hand, by keeping the carbon and oxygen contents below the required
levels, for example it is possible to prevent carbon-oxygen containing components
from remaining inside the sintered body during sintering in a nitrogen atmosphere,
thereby enhancing the thermal conductivity and bonding strength of the sintered body.
[0060] When using the three types of copper particles described above that are the first
copper particles, the second copper particles, and the third copper particles as copper
powder, it is preferable that at least one of the first and second copper particles
has at least a portion of its surface coated with an organic material. The organic
material may be polysaccharides or fatty acids, with polysaccharides being preferred.
Additionally, the third copper particles may also have at least a portion of their
surface coated with an organic material (such as polysaccharides, fatty acids, etc.).
[0061] In the copper paste according to the present embodiment, the total content of elements
other than copper in the copper powder is not particularly limited; however, it is
preferably, for example, 1 mass% or less, 0.5 mass% or less, or 0.1 mass% or less,
based on 100 mass% of the copper powder. Among the components other than copper, especially
metal elements, some may deteriorate the sinterability by segregating on the surface
of the copper powder or forming oxides, and could dissolve within the copper powder,
potentially reducing the electrical conductivity of the sintered body. If the total
content of metal elements such as As, Co, Cr, Fe, Ir, P, S, Sb, Se, Te, Ti, V, and
Zr is below the required amount, the electrical resistivity of the copper paste sintered
body can be further reduced, and it will show better thermal conductivity. With such
thermal conductivity, it becomes possible to efficiently dissipate heat generated
from power modules to the outside.
<Other Components>
[0062] Other than the above-described substances, the copper paste according to the present
embodiment may contain dispersants and surfactants made of amines, antioxidants, reducing
agents such as hydrazine, glass frits, and binders including resin components.
[0063] As resin components, there is no particular limitation; however, one or more resins
can be selected from cellulose-based resins such as methyl cellulose, ethyl cellulose,
and carboxymethyl cellulose, acrylic resins, butyral resins, alkyd resins, epoxy resins,
and phenolic resins.
[0064] The content of resin components is not particularly limited; however, based on 100
mass% of the copper powder, it is preferably more than 0 mass%, 0.01 mass% or more,
0.05 mass% or more, and 0.1 mass% or more. The resin component content, based on the
mass of the copper particles (100 mass%), may be, for example, 10 mass% or less, 9
mass% or less, 8 mass% or less, 7 mass% or less, 6 mass% or less, 5 mass% or less,
4 mass% or less, 3 mass% or less, 2 mass% or less, 1 mass% or less, 0.5 mass% or less,
0.1 mass% or less, 0.05 mass% or less, 0.01 mass% or less; however, it is preferable
that the copper paste does not contain resin components. If the copper paste contains
resin components, the sinterability (especially below 350°C) may deteriorate. For
example, thermosetting resins such as epoxy resins remain in the copper paste sintered
body even after sintering. When using cellulose resins, although decomposition starts
around 300°C, heating above 400°C is required to fully decompose, and sintering in
an oxygen atmosphere is necessary to remove the carbon residue generated during the
decomposition, which could cause oxidation of the copper powder. In contrast, a copper
paste without resin components can be sintered at relatively low temperatures in a
non-oxidizing atmosphere, leading to the formation of a sintered high-density copper
body without the risk of conductivity degradation due to oxidation of the copper powder.
Since the copper paste according to this embodiment contains a high-viscosity second
alcohol, the viscosity can be appropriately adjusted to the desired value even without
the inclusion of resin components.
[0065] Furthermore, the copper paste preferably does not contain either an epoxy group-containing
silane coupling agent or an amino group-containing silane coupling agent, or it may
contain both an epoxy group-containing silane coupling agent and an amino group-containing
silane coupling agent, in a total amount of more than 0 mass% but not exceeding 0.05
mass% based on 100 mass% of the copper powder.
<Applications of the Copper Paste>
[0066] The copper paste according to the present embodiment, as described above, has high
electrical conductivity and thermal conductivity, and exhibits excellent storage stability
and workability. In addition, the copper paste of the present embodiment can be sintered
at low temperatures and in a short time, and can exhibit high die shear strength.
Therefore, the copper paste can be used for the formation of wiring in electronic
components such as power modules, chip resistors, chip capacitors, and solar cells,
and for electronic assemblies such as substrates with through-holes formed thereon.
For example, by applying the copper paste according to the present embodiment to such
as substrates for mounting such as power modules, solar cell, and electronic assemblies,
printed circuit boards, and substrates with through-holes, and sintering the same
to form the sintered copper body. Here, the substrate materials that can be used include,
but are not limited to: silicon substrates; oxide substrates, such as silicate glass,
alumina, and quartz; nitride substrates, such as silicon nitride and aluminium nitride;
carbide substrates, such as silicon carbide and titanium carbide; resin-based substrates,
such as polyimide, polyethylene terephthalate, and polyethylene naphthalate; and substrates
with transparent conductive films (TCO) or metal films on the surface.
<Production of the Copper Paste>
[0067] The copper paste according to the present embodiment can be produced by mixing the
copper powder described above with a solvent, and if necessary, kneading the mixture
using a device such as a planetary mixer. Additionally, if necessary, the dispersion
of the copper powder can be enhanced by using a three-roll mill. Furthermore, the
paste can be subjected to filtration or defoaming treatment as needed.
<Sintering the Copper Paste>
[0068] When sintering the copper paste according to the present embodiment, the method and
conditions are not particularly limited, and can be performed using any method depending
on the target product and the substrate on which the paste is applied. However, it
is preferable to first dry and remove the first alcohol before sintering the copper
paste. Removing the first alcohol before sintering the copper paste increases the
proportion of the second alcohol around the copper powder, which helps to more effectively
prevent the oxidation of the copper powder during the sintering process. The drying
conditions are not particularly restricted and can be set based on the boiling point
of the first alcohol and the target product; however, for example, it is preferable
to heat in an atmospheric environment at 50-200°C, particularly 60-150°C, for 1 to
60 minutes. Drying can also be carried out under reduced pressure, allowing for lower
heating temperatures. Additionally, the drying process can be performed under an inert
gas atmosphere or reducing atmosphere.
[0069] The copper paste according to the present embodiment allows for sintering at low
temperatures and in a short time, so the sintering conditions are not particularly
limited. For example, sintering can be carried out in an inert gas atmosphere such
as nitrogen and argon, or in a reducing atmosphere containing 0.1 to 30 volume % of
hydrogen, ammonia, carbon monoxide, and alcohol vapor at temperatures ranging from
150°C to 400°C or 200°C to 300°C , particularly temperatures ranging at 250°C to 300°C,
for 10 seconds to 60 minutes, more preferably for 2 minutes to 30 minutes, resulting
in sintered bodies that exhibit excellent electrical conductivity, thermal conductivity,
and die shear strength.
Example(s)
[0070] The following provides a more detailed explanation of the present invention through
examples; however, the invention is not limited to these examples.
[Physical Properties of the Samples- Performance Evaluation]
[0071] The paste prepared under the compositions and conditions described below was evaluated
for its physical properties and performance according to the evaluation methods outlined
in the following sections.
<Viscosity Measurement and Measurement of Casson Yield Stress and Casson Viscosity
>
[0072] The viscosity of the prepared paste was measured using a dynamic viscoelasticity
measurement device (RST Cone Plate Rheometer by Brookfield) equipped with a cone-plate
spindle, and the viscosity of the copper paste at a shear rate of 10 s
-1 was denoted as η
10. Additionally, a Casson plot, where the square root of √σ
0 of the shear stress σ is plotted on the vertical axis and the square root of √ γ
of the shear rate of γ is plotted on the horizontal axis, was obtained. In this plot,
when an approximate straight line is obtained, a Casson plot becomes possible, and
the intercept of the vertical axis of the approximate straight line in the region
where the shear rate is 10 s
-1 or higher represents the square root of √σ
0 of the Casson yield stress, while the slope of the approximate straight line represents
the square root of √η
∞ of the Casson viscosity. Here, obtaining the approximate straight line means that
the R
2 value (coefficient of determination) is 0.9 or higher.
[0073] The following describes specific examples of the present invention. As a representative
result, Casson plots were created for three types of copper pastes including Comparative
Example 2, Comparative Example 1, and Example 4, details of which are provided later.
Figure 1 shows the Casson plot of the paste in Comparative Example 2 (η
10 = 185 Pa·s). In the region where the shear rate is 10 s
-1 or higher, the R
2 value was 0.0615. As clearly seen in Figure 1, the plot does not exhibit linearity,
making it impossible for fitting using the Casson equation.
[0074] On the other hand, Figure 2 shows the Casson plot of the paste in Comparative Example
1 (η
10 = 11 Pa·s), and Figure 3 shows the Casson plot of the paste in Example 4 (η
10 = 8 Pa·s). In the Casson plots shown in Figure 2 and Figure 3, the R
2 values in the region where the shear rate is 10 s
-1 or higher are 0.9994 and 0.9996, respectively, indicating that linear approximation
of the data is possible. In both cases, a sharp increase of √σ can be seen in the
low shear rate region and a gradual increase of √σ can be seen in high shear rate
region. Since the sharp increase corresponds to the phenomenon of breaking up agglomerates
of fine particles contained in the paste, reflecting the characteristics of a homogeneous
paste, the intercept √σ
0 and slope √η
∞ are obtained from the approximate straight line in the high shear rate region of
10 s
-1 or higher.
<Observation of Structural Defects>
[0075] The prepared paste was stencil printed onto a glass substrate using a metal mask
to form a square with a side length of 20 mm and was then dried in the atmosphere
at 100°C for 5 minutes. The surface structure of the dried paste was observed using
a stereomicroscope with 10x magnification to check for any structural defects such
as holes, protrusions, and cracks.
[0076] Explanations are provided below with specific examples. The following shows the results
of surface observations of the dried materials obtained by printing the pastes of
Comparative Example 1 and Example 4, where linear approximation was possible in the
Casson plot, onto a glass substrate and drying them. Figure 4 shows an optical microscope
image of the dried material of the paste from Comparative Example 1. Figure 5 shows
an optical microscope image of the dried material of the paste from Example 4. In
the dried material of the paste from Comparative Example 1, numerous holes were observed,
which are indicated by arrows in Figure 4. In contrast, no holes or other structural
defects were observed in the dried material of the paste from Example 4. Similar tests
were conducted on pastes prepared under various process conditions to confirm the
presence or absence of surface defects and printing deficiencies.
<Measurement of Electrical Resistivity>
[0077] The prepared paste was applied onto a glass substrate by stencil printing using a
metal mask to form a square with 20 mm side and then dried in the air at 100°C for
5 minutes. Subsequently, pressure sintering was performed in a nitrogen atmosphere
using a high-temperature press machine to sinter by applying a load of 20 MPa at the
heating temperature of 280°C for 2 minutes, resulting in a sintered copper paste body
with a thickness of approximately 20 µm. The electrical resistivity of the sintered
body was measured using a direct current four-point probe method, with a probe spacing
of 1 mm. According to the Wiedemann-Franz law, the electrical resistivity was converted
into thermal conductivity, which corresponded to a value of 134 Wm
-1K
-1 or higher.
<Measurement of Die Shear Strength>
[0078] A copper plate with a thickness of 1 mm was used as the substrate, and a copper paste
was applied to achieve a thickness of 100 µm. A semiconductor chip made of silicon
carbide (SiC) with dimensions of 2 mm × 2 mm × 0.4 mm was then placed on top of the
paste. A Ti layer with a thickness of 500 nm and a Cu layer with a thickness of 500
nm were deposited on the surface of the copper paste contacting the SiC chip using
the sputtering method. The obtained laminate was subjected to a press-sintering process
by applying a load of 20 MPa in a nitrogen atmosphere using a high-temperature press
machine and sintering at the sintering temperature of 280°C for 3 minutes. The sample
obtained through the press-sintering process was cooled to room temperature, and an
adhesion strength between the SiC chip and the copper substrate was measured as the
die shear strength using a die shear tester (NAGE4000 by Nordson).
<Evaluation Criteria>
[0079] With respect to the measurement, the evaluation was classified as "AA" if all of
the following four conditions were satisfied: (1) the dried paste has no surface defects;
(2) the dried paste has no printing defects; (3) the electrical resistivity of the
sintered body is 5 µΩcm or less; and (4) the die shear strength of the sintered body
is 30 MPa or more. Further evaluation classified as "A" if three of the conditions
were satisfied, "B" if two of the conditions were satisfied, and "C" if 1 of the condition
was satisfied.
[Test 1: Effect of Paste Viscosity and Casson Yield Stress]
<Example 1>
[0080] For the copper particles, Example 1 used a first copper particle with a D50 of 270
nm and a roughly spherical shape, a second copper particle with a D50 of 380 nm and
a roughly spherical shape, and a third copper particle with a D50 of 7 µm and a flaky
shape. The two types of copper particles as described above, with the exception of
the flaky shape, were coated with gum arabic having a polysaccharide surface.
[0081] First, the first copper particle, second copper particle, and third copper particle
were mixed in a mass ratio of 65:30:5. The impurity content in the first to third
copper particles was as follows: carbon of 0.3%, oxygen of 0.7%, and copper-free metal
elements of 0.2%. Ethylene glycol was used as the first alcohol and glycerol as the
second alcohol, and the copper particles, ethylene glycol, and glycerol were weighed
in a mass ratio of 60:20:20 to be mixed using a planetary mixer in order to prepare
the copper paste. The evaluation results are shown in Table 1.
<Examples 2-7 and Comparative Examples 1-4>
[0082] Except for the changes in the mass ratio of copper powder to solvent and the mass
ratio of the first to third copper particles, the copper paste was prepared under
the same conditions as in Example 1. The evaluation results are shown in Table 1.
In
[0083] Table 1, "N/A" indicates that a good approximation line (fitting) could not be obtained
in the Casson plot.
[Table 1]
| |
Copper powder : Solvent (Mass Ratio) |
Copper particles First : Second : Third (Mass ratio) |
η10 [Pa·s] |
√σ0 [Pa-1/2] |
√η∞ [Pa·s1/2] |
Surface defects |
Printing defects |
Electrical resistivity [µΩcm] |
Die shear strength [Mpa] |
Evaluation |
| Example 1 |
60:40 |
65:30:5 |
49 |
9.8 |
0.57 |
None |
None |
4.2 |
43 |
AA |
| Example 2 |
95:5 |
60:30:10 |
29 |
9.1 |
0.32 |
None |
None |
3.6 |
62 |
AA |
| Example 3 |
75:25 |
50:20:30 |
11 |
8.7 |
0.3 |
None |
None |
3.2 |
89 |
AA |
| Example 4 |
70:30 |
35:15:50 |
8.0 |
7.7 |
0.32 |
None |
None |
3.5 |
58 |
AA |
| Example 5 |
60:40 |
39:1:60 |
3.0 |
6.8 |
0.31 |
None |
None |
4.8 |
42 |
AA |
| Example 6 |
65:35 |
50:20:30 |
7.0 |
8.0 |
1.2 |
None |
None |
5.3 |
30 |
A |
| Example 7 |
55:45 |
50:20:30 |
1.0 |
1.0 |
1.1 |
None |
None |
6.0 |
34 |
A |
| Comparative Example 1 |
80:20 |
65:20:15 |
11 |
11.3 |
0.3 |
Yes |
None |
5.2 |
31 |
B |
| Comparative Example 2 |
96:4 |
70:28:2 |
185 |
N/A |
N/A |
Yes |
Yes |
6.1 |
15 |
C |
| Comparative Example 3 |
85:15 |
70:10:20 |
73 |
N/A |
N/A |
None |
Yes |
5.9 |
23 |
C |
| Comparative Example 4 |
80:20 |
70:10:20 |
47 |
16 |
0.3 |
Yes |
None |
5.1 |
29 |
C |
[0084] It was found that the values of η
10, √σ
0, and √η
∞ can be controlled by adjusting a paste composition by using a first alcohol (ethylene
glycol) with a viscosity range of 3 mPa·s or more to 70 mPa·s or less and a second
alcohol (glycerol) with a viscosity range of 300 mPa·s or more to 1000 mPa·s or less
as the solvents. Additionally, by adjusting η
10 and √σ
0, it was found that a paste with favorable evaluation results can be obtained.
[Test 2: Effect of the First Alcohol Type]
<Examples 8-13 and Comparative Examples 5-7>
[0085] Except for changing the first alcohol (ethylene glycol) to the alcohols shown in
Table 2, the paste was prepared and evaluated in the same manner as in Example 3.
The evaluation results are shown in Table 2.
[Table 2]
| |
First alcohol |
η10 [Pa·s] |
√σ0 [Pa-1/2] |
√η∞ [Pa·s1/2] |
Surface defects |
Printing defects |
Electrical resistivity (µΩcm) |
Die shear strength (MPa) |
Evaluation |
| |
Type |
Viscosity [mPa·s] |
Boiling point [°C] |
| Example 3 |
Ethylene glycol |
16 |
197 |
11 |
8.7 |
0.3 |
None |
None |
3.2 |
89 |
AA |
| Example 4 |
Diethylene glycol |
30 |
245 |
13 |
8.7 |
0.32 |
None |
None |
4.1 |
54 |
AA |
| Example 5 |
Hexylene glycol |
34 |
197 |
13 |
9.6 |
0.41 |
None |
None |
3.8 |
53 |
AA |
| Example 6 |
1,2-Propylene glycol |
36 |
188 |
15 |
9.8 |
0.43 |
None |
None |
3.8 |
67 |
AA |
| Example 7 |
1,3-Propylene glycol |
47 |
214 |
14 |
8.6 |
0.33 |
None |
None |
4.3 |
71 |
AA |
| Example 8 |
Triethylene glycol |
49 |
285 |
15 |
8.9 |
0.38 |
None |
None |
4.8 |
54 |
AA |
| Example 9 |
2,3-Butanediol |
45 |
182 |
18 |
9.1 |
0.48 |
None |
None |
5.8 |
41 |
A |
| Comparative Example 5 |
Ethanol |
1.1 |
78 |
2 |
0.5 |
0.1 |
Yes |
None |
7.1 |
38 |
B |
| Comparative Example 6 |
2-Propanol |
2.1 |
82 |
1.5 |
0.2 |
0.12 |
Yes |
None |
6.9 |
34 |
B |
| Comparative Example 7 |
1,4-Butanediol |
71 |
235 |
52 |
12 |
0.94 |
Yes |
Yes |
6.1 |
28 |
C |
[0086] From Table 2, it can be seen that the first alcohol is not limited to ethylene glycol,
and as long as the copper paste uses a monohydric or dihydric alcohol with a viscosity
within the required range, a sintered body with the desired performance can be obtained.
Test 3
Effect of the Second Alcohol Type
<Example 14 and Comparative Examples 8-9>
[0087] Except for changing the second alcohol from glycerol to the alcohols shown in Table
3, the paste was prepared in the same manner as Example 3 and evaluated. The evaluation
results are shown in Table 3.
[Table 3]
| |
Second alcohol |
η10 [Pa·s] |
√σ0 [Pa1/2] |
√η∞ [Pa·s1/2] |
Surface defects |
Printing defects |
Electrical resistivity (µΩcm) |
Die shear strength (MPa) |
Evaluation |
| |
Type |
Viscosity [mPa·s] |
Boiling Point [° C] |
| Example 3 |
Glycerol |
934 |
290 |
11 |
8.7 |
0.3 |
None |
None |
3.2 |
89 |
AA |
| Example 14 |
2-Ethyl-1,3-hexanediol |
323 |
244 |
13 |
8.7 |
0.32 |
None |
None |
4.7 |
56 |
AA |
| Comparative Example 8 |
1,3-Propylene glycol |
47 |
214 |
13 |
9.6 |
0.41 |
Yes |
None |
5.9 |
24 |
C |
| Comparative Example 9 |
Triethylene glycol |
49 |
285 |
15 |
9.8 |
0.43 |
Yes |
None |
5.8 |
28 |
C |
[0088] From Table 3, it was found that the second alcohol is not limited to ethylene glycol,
and as long as a copper paste is used with a divalent or trivalent alcohol within
the required viscosity range, a sintered body with the desired performance can be
obtained.