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EP 4 572 913 A1

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(43) Date of publication: 25.06.2025 Bulletin 2025/26 (21) Application number: 22955349.0 (22) Date of filing: 18.08.2022

(51) International Patent Classification (IPC):  B24B 57/00(2006.01) B24B 37/04(2012.01) B24B 57/02(2006.01) B24B 1/00(2006.01) (52) Cooperative Patent Classification (CPC): B24B 57/02; B24B 37/04; B24B 37/0056; B24B 37/044; B24B 37/34; B24B 51/00; B24B 49/00; B24B 49/08 (86) International application number: PCT/CN2022/113377 (87) International publication number: WO 2024/036569 (22.02.2024 Gazette 2024/08)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA ME Designated Validation States: KH MA MD TN (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)

(72) Inventors: HU, Jianjun Shaanxi 710119 (CN) LIU, Peng Shaanxi 710119 (CN) DICKINSON, Colin John Santa Clara, CA 95054 (US) TRUONG, Quoc Santa Clara, CA 95054 (US) LEIGHTON, Jamie Stuart Santa Clara, CA 95054 (US) PRABHU, Gopalakrishna B. Santa Clara, CA 95054 (US) GIVENS, John Howard Santa Clara, CA 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)