(19)

(11)

EP 4 573 288 A1

(12)

(43) Date of publication: 25.06.2025 Bulletin 2025/26 (21) Application number: 23855519.7 (22) Date of filing: 18.08.2023

(51) International Patent Classification (IPC):  F04B 43/073(2006.01) F16K 15/04(2006.01) F04B 53/10(2006.01) B22D 39/00(2006.01) (52) Cooperative Patent Classification (CPC): B22D 39/00; F04B 43/073; F04B 53/10; B22D 39/02; F04B 53/16; F04B 53/08; F04B 15/02; F04B 15/04; F04B 49/065 (86) International application number: PCT/US2023/030627 (87) International publication number: WO 2024/039879 (22.02.2024 Gazette 2024/08)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 19.08.2022 US 202263399370 P (71) Applicant: Applied Materials, Inc. Santa Clara, California 95054 (US)	(72) Inventors: STONAS, Bernhard Santa Clara, California 95054 (US) DELMAS, Jean Santa Clara, California 95054 (US) (74) Representative: Zimmermann & Partner Patentanwälte mbB  Postfach 330 920 80069 München 80069 München (DE)