(19)

(11)

EP 4 573 593 A1

(12)

(43) Date of publication: 25.06.2025 Bulletin 2025/26 (21) Application number: 23768753.8 (22) Date of filing: 17.08.2023

(51) International Patent Classification (IPC):  H01L 21/768(2006.01) H01L 23/532(2006.01) H01L 23/522(2006.01) (52) Cooperative Patent Classification (CPC): H01L 23/53276; H01L 23/53238; H01L 21/76873; H01L 21/76846; H01L 21/76864; H01L 21/76807; H01L 23/5226 (86) International application number: PCT/US2023/072431 (87) International publication number: WO 2024/040200 (22.02.2024 Gazette 2024/08)

(84) Designated Contracting States: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC ME MK MT NL NO PL PT RO RS SE SI SK SM TR Designated Extension States: BA Designated Validation States: KH MA MD TN (30) Priority: 19.08.2022 US 202263399551 P (71) Applicant: Avient Corporation Avon Lake, Ohio 44012 (US)	(72) Inventors: PURAYATH, Vinod Avon Lake, Ohio 44012 (US) ZHOU, Jian Avon Lake, Ohio 44012 (US) OHAMA, Kenta Avon Lake, Ohio 44012 (US) (74) Representative: Appleyard Lees IP LLP  15 Clare Road Halifax HX1 2HY Halifax HX1 2HY (GB)